Sanotac BX100 Precision Bellows Pump for Ultra-Low-Flow Chemical Dispensing (1–100 mL/min)
| Key | Brand: Sanotac |
|---|---|
| Model | BX100 |
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Flow Range | 1.0–100.0 mL/min |
| Viscosity Range | 0–300 cP |
| Incremental Resolution | 0.1 mL/min |
| Flow Accuracy | ±1% |
| Max Pressure | ≤0.5 MPa |
| Inlet Port | φ6 mm × φ4 mm |
| Outlet Port | φ3.175 mm × φ1.58 mm |
| Wetted Materials | PTFE, PFA, Specialty Ceramic |
| Drive Mechanism | Precision Lead-Screw Actuation |
| Communication | USB, RS232, Modbus RTU |
| Power Supply | 85–264 VAC, 50 Hz |
| Power Consumption | 20 W |
| Weight | 8 kg |
| Dimensions (L×W×H) | 362 × 169 × 278 mm |
Overview
The Sanotac BX100 Precision Bellows Pump is an ultra-low-flow, digitally controlled positive displacement pump engineered for high-purity fluid handling in semiconductor wet processing, advanced battery manufacturing, and microfluidic chemical dispensing applications. Operating on the principle of axial bellows compression—where a hermetically sealed fluoropolymer bellows (PFA/PTFE) undergoes precise, repeatable volumetric expansion and contraction via a servo-driven lead-screw mechanism—the BX100 eliminates dynamic seals, rotating shafts, and sliding interfaces. This design ensures zero particle generation from mechanical wear, absolute barrier integrity against ambient contamination, and full compatibility with aggressive chemistries including HF, TMAH, photoresists, Li-ion electrolytes, and UPW. Unlike peristaltic or diaphragm pumps, the BX100 delivers true laminar, low-pulse continuous flow (1–100 mL/min) with metrological-grade repeatability—critical for spin-coating uniformity, electrolyte fill volume consistency, and process-controlled chemical dosing in Class 10 cleanrooms.
Key Features
- Hermetic wetted path constructed exclusively from PTFE, PFA, and specialty ceramic—no metallic components, no elastomers, no lubricants.
- Lead-screw actuated bellows displacement enables digital volumetric control with ±1% flow accuracy and 0.1 mL/min incremental resolution.
- Zero-leakage architecture: No shaft seals, no O-rings in the fluid path—eliminates cross-contamination risk and prevents external gas ingress (critical for moisture-sensitive LiPF6 electrolytes).
- Integrated real-time pressure monitoring with programmable overpressure cutoff (≤0.5 MPa threshold) to protect downstream micro-nozzles and prevent line rupture.
- Low-pulse continuous flow mode (<5% pulsation amplitude, measured per ISO 8503-2) and discrete dispense mode (single-shot or multi-shot sequences) supported via unified firmware.
- Compliant with SEMI F57 (Chemical Delivery Systems) and compatible with factory automation protocols: Modbus RTU over RS232, USB virtual COM port, and ASCII command set for PLC integration.
Sample Compatibility & Compliance
The BX100 is validated for use with ultrapure aqueous solutions (UPW, SC1, SC2), acidic etchants (HF, HNO3, HCl), basic developers (TMAH), organic solvents (PGMEA, IPA), photoresists (g-, i-, KrF, ArF), and lithium battery electrolytes (LiPF6 in EC/DMC). Its fluoropolymer-wetted construction meets ASTM D471 resistance requirements for >1,000 hr exposure to concentrated HF (49%) at 25°C without measurable swelling or mass loss. The pump’s design adheres to SEMI S2/S8 safety guidelines and supports GLP/GMP documentation workflows through optional audit-trail-enabled firmware (21 CFR Part 11 compliant logging available upon configuration).
Software & Data Management
Sanotac PumpControl™ v3.2 (Windows-based) provides full local control, recipe management, and real-time parameter logging—including flow rate, cumulative dispensed volume, cycle count, and pressure trace history. All operational events (start/stop, error codes, pressure limit triggers) are timestamped and exportable as CSV or PDF reports. For integrated fabs, the BX100 supports SECS/GEM communication via Modbus-to-SECS gateway modules. Firmware updates are performed securely over USB with SHA-256 signature verification. Data retention complies with IEC 62443-3-3 for industrial cybersecurity baseline requirements.
Applications
- Semiconductor photolithography: Metered delivery of photoresist to spin coaters with <±0.3% wafer-to-wafer thickness variation (measured by ellipsometry).
- Lithium-ion battery cell manufacturing: Precise electrolyte filling into prismatic and pouch cells (target volumes: 1.5–8.0 g per cell, corresponding to ~1.8–9.5 mL at typical densities).
- MEMS packaging: Controlled dispensing of underfill epoxies and die-attach adhesives in sub-microliter increments.
- Analytical chemistry: Automated reagent addition in ICP-MS sample introduction systems requiring pulse-free nebulizer feed.
- R&D microreactors: Stable, low-shear flow of catalyst suspensions (e.g., Pt/C in ethanol) for continuous-flow hydrogenation studies.
FAQ
What materials are in contact with fluid during operation?
All wetted surfaces consist of PTFE, PFA, or high-purity alumina ceramic—no stainless steel, nickel alloys, or elastomeric seals are present.
Can the BX100 handle abrasive slurries or particles?
No—it is designed strictly for particle-free, filtered liquids (recommended filtration: ≤0.1 µm upstream); suspended solids will compromise bellows fatigue life.
Is the pump suitable for vacuum-assisted priming?
Yes; maximum allowable inlet vacuum is –85 kPa (absolute), provided vapor pressure of the liquid remains below this value at operating temperature.
How is calibration traceability maintained?
Each unit ships with a NIST-traceable flow calibration certificate (per ISO/IEC 17025) covering three points across the 1–100 mL/min range, verified using gravimetric measurement with a 0.001 g resolution balance.
Does the pump support remote start/stop via dry-contact I/O?
Not natively—but optional I/O expansion module (SAN-IO-4DI4DO) adds isolated digital inputs/outputs compatible with 24 VDC PLC signals.
