Measurement Instruments
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| Brand | ASIDA |
|---|---|
| Model | 8070 |
| Measurement Range (X×Y×Z) | 800 mm × 700 mm × 200 mm |
| Granite Base & Column | Grade-0 Natural Granite |
| Motion System | Air-bearing Guideways (X/Y), Panasonic Servo Motors |
| Optical Magnification | 0.75×–5× Objective + 1× Eyepiece → Total 30×–230× |
| Encoders | ≤0.001 mm Resolution |
| Linear Accuracy | ≤(3 + L/200) µm (L in mm) |
| Repeatability | ≤±0.003 mm |
| Illumination | Ring-type LED Cold Light Source |
| Software | AISDA VMA 3.00.01 (Trilingual: Simplified Chinese, Traditional Chinese, English) |
| Output Formats | DXF, Excel, Word |
| Compliance | Designed for ISO 10360-2 & GB/T 16857.2 compliant geometric metrology workflows |
| Environmental Requirements | 20 ±2 °C, 45–75% RH, Vibration <0.002 g (<15 Hz) |
| Optional Accessories | NAVITAR Metrology Lens, Renishaw TP20 Trigger Probe Kit, KEYENCE LJ-V Series Laser Displacement Sensor |
| Brand | ASIDA |
|---|---|
| Model | Manual Vision Measuring Machine (2010/3020/4030/5040 Series) |
| Measurement Principle | Optical Coordinate Metrology with CCD Imaging |
| Base Material | Natural Granite |
| Motion System | Precision Linear Rolling Guides + Friction-Driven Stage |
| Illumination | Adjustable Ring LED Cold Light Source |
| Optics | Manual Zoom Objective (0.7×–4.5× or 0.7×–5.0×) + Interchangeable Eyepieces (0.5×, 1×, 2×) |
| Encoder Resolution | 1 µm |
| XY Axis Accuracy | (3 + L/200) µm (L in mm) |
| Repeatability | ≤ ±3 µm |
| Z-Axis Travel | 150–200 mm |
| XY Travel Range | 200×100 mm to 500×400 mm |
| Stage Load Capacity | 25 kg |
| Working Distance | 90 mm |
| Software | ASIDA VMM3.0D (Multilingual: English, Simplified Chinese, Traditional Chinese) |
| Compliance | Designed for ISO 10360-7 and GB/T 16857.7 alignment with geometric dimensioning and tolerancing (GD&T) workflows |
| Brand | ASIDA |
|---|---|
| Origin | Guangdong, China |
| Model | ASIDA6050A, ASIDA7060A, ASIDA8070A |
| Measurement Range (X×Y×Z) | 600×500×200 mm |
| Optical Magnification | 0.75×–5× Objective + Digital Zoom → Total Magnification: 30×–230× |
| Encoders Resolution | ≤0.001 mm |
| X/Y Linear Accuracy | (3 + L/200) µm (L in mm) |
| Repeatability | ≤±0.003 mm |
| Worktable Size | 650×550 mm / 750×650 mm / 850×750 mm |
| Max Load Capacity | 30 kg |
| Working Distance | 82 mm |
| Software | AISDA MEASURE VMA 3.00.01 (Trilingual: Simplified Chinese, Traditional Chinese, English) |
| Output Formats | DXF, Excel (.xlsx), Word (.docx) |
| OS Compatibility | Windows XP Pro, Windows 7 |
| Minimum PC Requirements | Dual-Core CPU, ≥2 GB RAM, ≥320 GB HDD |
| Power Supply | 220 V AC, 50 Hz |
| Environmental Conditions | Temp. 20 ±2 °C, Humidity 45–75 % RH, Vibration <0.002 g (<15 Hz) |
| Optional Accessories | NAVITAR Metrology Lens (USA), RENISHAW TP20 Trigger Probe (UK), KEYENCE LJ-V Series Laser Displacement Sensor (Japan) |
| Brand | ASIDA |
|---|---|
| Model | VMA Series |
| Type | Fully Automated Vision Measuring Machine |
| Origin | Guangdong, China |
| Construction | Granite Base & Column |
| Motion System | Panasonic Servo Motors (X/Y/Z) |
| Optical System | 0.7×–4.5× Zoom Objective with 25×–225× Total Magnification |
| Illumination | Ring-type LED Cold Light Source |
| Linear Accuracy | (3 + L/200) µm |
| Repeatability | ≤ ±0.003 mm |
| Encoder Resolution | 1 µm |
| Measurement Range (X×Y×Z) | 200×100×150 mm to 500×400×300 mm |
| Software | ASIDA VMA3.00.01 (Multilingual: EN/CN/TC) |
| Output Formats | DXF, Excel, Word |
| Compliance | Designed for ISO 1101, ISO 10360-2, and GD&T metrology workflows |
| Brand | ASP / Advanced Sensing Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrumentation |
| Model | YKF Series |
| Instrument Class | Temperature Verification and Calibration System |
| Temperature Range | –260 °C to +850 °C |
| Nominal Resistance at 0.01 °C | 25.5 Ω or 100 Ω (per model) |
| TCR (Temperature Coefficient of Resistance) | 0.003850 Ω/Ω/°C or 0.003925 Ω/Ω/°C |
| Long-Term Stability | <0.0025 °C/year @ 0 °C |
| High-Temperature Drift (500 h) | <0.006 °C @ 500 °C |
| Repeatability | <0.0005 °C (–260 °C to 260 °C, 20 cycles) |
| Probe Diameter | 3.2 mm (standard sensing tip) |
| Standard Sheath Diameters | 4.78 mm or 6.35 mm |
| Standard Length | 305 mm |
| Vibration Resistance | 20 G, 10–2000 Hz |
| Standard Connector | 6-pin |
| Optional Connectors | Spade terminals, 5-pin DIN, 2-pin DIN, 4-pin DIN |
| Brand | ASP/Advanced Sensing Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | YKF200 |
| Instrument Type | Temperature Verification and Calibration System |
| Temperature Range | −260 °C to +260 °C |
| Nominal Resistance | 25.5 Ω or 100 Ω at 0 °C |
| TCR (α) | 0.003850 Ω/Ω/°C or 0.003925 Ω/Ω/°C |
| Stability Drift | <0.0025 °C/year at 0 °C |
| Repeatability (R₀) | <0.0005 °C over 20 consecutive cycles across full range |
| Vibration Resistance | 20 G, 10–2000 Hz |
| Dimensions | Ø3.2 mm × 9.7 mm |
| Fill Gas | Dry Helium |
| Sheath Material | Gold-Plated Copper |
| Primary Application | NIST-Traceable Cryogenic Reference Standard |
| Brand | ASP / Advanced Sensing Products |
|---|---|
| Origin | USA |
| Model | YKI Series |
| Temperature Range | −200 °C to 1100 °C |
| Resistance at 0 °C | 10 Ω, 100 Ω, 500 Ω, or 1000 Ω (customizable) |
| TCR (α) | 0.003850 Ω/Ω/°C |
| Accuracy Class | IEC 60751 DIN Class A (±0.06 °C at 0 °C) or Class B (±0.12 °C at 0 °C) |
| Stability | R₀ drift < 0.002 °C after 1000 h at 300 °C |
| Repeatability | R₀ deviation < 0.002 °C over 100 cycles (25–300 °C) |
| Thermal Hysteresis | < 0.001 °C (−196 °C to 300 °C) |
| Sheath Material | Stainless steel or Inconel® alloy |
| Standard Diameter | 3–6.35 mm |
| Standard Length | 305–457 mm (12–18 in) |
| Vibration Resistance | 20 g from 10–5000 Hz |
| Brand | ASP / Advanced Sensing Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | YKI1100 |
| Instrument Class | Temperature Verification and Calibration System |
| Temperature Range | −200 °C to 1100 °C |
| Nominal Resistance | 10 Ω or 100 Ω (customizable at 0.01 °C reference) |
| Temperature Coefficient of Resistance (TCR) | 0.003850 Ω/Ω/°C |
| Stability | ΔR₀ < 0.1 °C after 100 h continuous exposure at 1100 °C |
| Repeatability | ΔR₀ < 0.020 °C over 10 consecutive cycles from 25 °C to 1100 °C |
| Shock & Vibration Resistance | Withstands 20 G acceleration across 10–5000 Hz frequency range |
| Standard Probe Dimensions | Ø6.35 mm × 450 mm (custom lengths/diameters available) |
| Brand | ASP/Advanced Sensing Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | YKS Series |
| Instrument Type | Temperature Verification and Calibration System |
| Temperature Range | -250 °C to +850 °C |
| Nominal Resistance at 0.01 °C | 25.5 Ω or 100 Ω (customizable) |
| Temperature Coefficient of Resistance (TCR) | 0.003850 Ω/Ω/°C or 0.003925 Ω/Ω/°C |
| Accuracy Class | IEC 60751 DIN Class A (±0.06 °C), Class B (±0.12 °C), or W(Ga) ≥ 1.11807 |
| Long-Term Stability | R₀ drift < 0.002 °C after 1000 h at 300 °C |
| Repeatability | R₀ deviation < 0.005 °C over repeated cycling from −196 °C to +850 °C |
| Probe Housing Material | Inconel® alloy (nickel-chromium) |
| Standard Probe Dimensions | Ø 0.188" (4.78 mm), Ø 6 mm, or Ø 0.25" (6.35 mm) |
| Vibration Resistance | Withstands 20 G acceleration across 10–2000 Hz |
| Brand | ASP/Advanced Sensing Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | YKS500 Series |
| Instrument Category | Standard Platinum Resistance Thermometer (SPRT) |
| Temperature Range | −200 °C to +500 °C |
| Nominal Resistance | 25.5 Ω or 100 Ω (customizable) |
| Temperature Coefficient | α = 0.003850 Ω/Ω/°C or 0.003925 Ω/Ω/°C (IEC 60751 / ASTM E1137 compliant) |
| Stability (25–500 °C, 100 thermal cycles) | R₀ drift < 0.008 °C |
| Repeatability (25–500 °C, 100 cycles) | R₀ deviation < 0.008 °C |
| Vibration Resistance | 20 G, 10–2000 Hz |
| Probe Diameter | 4.78 mm (0.188″) or 6.35 mm (0.25″) |
| Probe Length | 305–457 mm (12–18″), customizable |
| Brand | ATAGO |
|---|---|
| Origin | Japan |
| Model | RX-5000α |
| Measurement Principle | Abbe-type refractometry with automatic temperature control (Peltier) |
| Refractive Index Range | 1.32000–1.70000 nD |
| Brix Range | 0.0–100.0% |
| Refractive Index Accuracy | ±0.00004 nD |
| Brix Accuracy | ±0.03% |
| Temperature Control Range | 5–75°C |
| Temperature Accuracy | ±0.05°C |
| Compliance | FDA 21 CFR Part 11 (electronic records & signatures), ISO/IEC 17025 traceable operation, GLP/GMP-ready data audit trail |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM Manufacturer |
| Product Category | Domestic |
| Model | NA-500 |
| Pricing | Upon Request |
| Instrument Type | Non-contact Profilometer / Surface Roughness Analyzer |
| Operating Principle | White-Light Interferometry |
| Vertical Resolution | Sub-nanometer (≤ 0.03 nm) |
| Scan Speed | Up to 400 µm/s |
| Measurement Range | Large-Range Vertical Scanning (Typical Z-range > 10 mm) |
| Compliance | ISO 25178-2, ISO 4287, ASTM E1392, USP <1058> (for instrument qualification) |
| Brand | Atometrics |
|---|---|
| Model | AR-7020 |
| Type | 3D Line Laser Scanner |
| Resolution | 3840 measurement points per profile |
| Repeatability | ±0.4 µm |
| Origin | Guangdong, China |
| Manufacturer | Atometrics (OEM/ODM capable) |
| Software Platform | BSmart Pro / BSmart Lite (API-enabled, ROI-customizable, multi-head synchronized) |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM/ODM Manufacturer |
| Country of Origin | China |
| Model | AR-7040 |
| Instrument Category | 3D Line Laser Scanner |
| Point Density | 3840 points per profile |
| Repeatability | ±0.4 µm |
| Software Platform | BSmart Pro / BSmart Lite |
| Multi-Sensor Support | Up to 6 sensors (daisy-chainable) |
| Target Applications | Weld seam inspection, flatness measurement, height differential analysis, surface defect detection, ROI-based glue bead verification |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | AR-7120 |
| Instrument Type | Laser-Based 3D Line Scanner |
| Key Specifications | 3840-point per scan line |
| Repeatability | ±0.4 µm |
| Measurement Principle | Triangulation-based laser line profiling |
| Software Platform | BSmart Pro / BSmart Lite |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | Domestic (China) |
| Model | FM-9020 |
| Operation Mode | Fully Automatic |
| Measurement Accuracy | ±1.5 µm |
| Encoder Resolution | 50 nm |
| Camera | 20 MP Monochrome CMOS |
| Illumination | Transmission Light, Ring Light, Movable Profile Light, Slit Ring Light |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | FM-9030 |
| Operation Mode | Fully Automatic |
| Measurement Accuracy | ±1.5 µm |
| Encoders Resolution | 50 nm |
| Camera | 20 MP Monochrome CMOS |
| Illumination System | Transmission Light, Ring Light, Movable Profile Light, Slit Ring Light |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Manufacturer |
| Product Origin | Domestic (China) |
| Model | FM9000 Series 9030 |
| Operation Mode | Fully Automatic |
| Measurement Accuracy | ±1.5 µm |
| Encoder Resolution | 50 nm |
| Camera | 20 MP Monochrome CMOS |
| Illumination | Transmission Light, Ring Light, Movable Profile Light, Slit Ring Light |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Manufacturer |
| Product Category | Domestic |
| Model | FM9000 Series-9005 |
| Pricing | Upon Request |
| Operation Mode | Fully Automatic |
| Measurement Accuracy | ±1.5 µm |
| Encoder Resolution | 50 nm |
| Camera | 20 MP Monochrome CMOS |
| Illumination | Transmission Light, Ring Light, Movable Profile Light, Slit Ring Light |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Manufacturer |
| Product Origin | Domestic |
| Model | FMX Series |
| Operation Mode | Fully Automatic |
| Measurement Accuracy | ±1.5 µm |
| Encoder Resolution | 50 nm |
| Camera | 20 MP Monochrome CMOS |
| Illumination | Transmission Light, Ring Light, Movable Profile Light, Slit Ring Light |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM/ODM Producer |
| Country of Origin | China |
| Model | WM300R |
| Pricing | Upon Request |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM/ODM Manufacturer |
| Country of Origin | China |
| Model | WM300X |
| Pricing | Upon Request |
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM Manufacturer |
| Product Category | Domestic |
| Model | WPM Series |
| Pricing | Upon Request |
| Instrument Type | Non-Contact Profilometer / Surface Roughness Analyzer |
| Operating Principle | White-Light Interferometry |
| Vertical Resolution | 0.001 nm |
| Surface Topography Repeatability (PSI mode, 3×3 filter, 1M points, Sqj/� | 2): 0.03 nm |
| Step Height Accuracy (12 µm NIST-traceable step standard, n=50) | ±0.3% |
| XY Positional Repeatability | <0.19 µm |
| Maximum Vertical Scan Speed | 400 µm/s |
| Typical Vertical Scan Speed | 35 µm/s |
| Maximum Lateral Resolution | 0.19 µm |
| Multi-Layer Thin-Film Measurement Capability | Up to 10 layers |
| Roughness Standards Compliance | ISO 25178, ISO 4287, ISO 287 |
| Overlay Measurement Support | Custom algorithm-enabled |
| Bump & RDL Profile Reconstruction | Enabled via phase-resolved interferometric imaging |
| CMP Uniformity Analysis | Full-wafer die-level topography mapping with dishing/erosion quantification |
| Brand | Atotech (AITOLY) |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300_RS485 |
| Type | Thermal Mass Flow Controller |
| Power Supply | 15–40 VDC |
| Communication Interfaces | RS232 / RS422 / RS485 / CAN (galvanically isolated) |
| Accuracy | ±0.5% FS |
| Linearity | ±1% FS |
| Repeatability | ±0.5% FS |
| Response Time | <1 s |
| Full-Scale Flow Ranges | 0–5, 10, 50, 100, 200, 300, 500 sccm |
| Display Resolution | 0.1 sccm |
| Operating Pressure Differential | 0–1 MPa |
| Burst Pressure | 1.1 MPa |
| Ambient Temperature Range | 0–65 °C |
| Gas Compatibility | Air, He, Ar, N₂, CO₂ |
| Electrical Interface | DB9 connector |
| Gas Port Options | M8×1 thread, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Zero Drift | Extremely low |
| Moving Parts | None |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 |
| Flow Principle | Thermal Mass Flow Measurement |
| Flow Ranges | 0–5/10/20/50/100/200/300/500 SCCM |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Flow Rangeability | 2–100% FS |
| Operating Temperature | −20 to +65 °C |
| Humidity | 0–98% RH (non-condensing) |
| Max Working Pressure | 3 MPa |
| Response Time | <1 s |
| Supply Voltage | 15–40 VDC |
| Power Consumption | <5 W |
| Communication Interfaces | RS232, RS485, CAN, 0–5 VDC analog output, 4–20 mA analog output |
| Gas Path Materials | SUS304 / SUS316L |
| Seals | FKM (Viton®) |
| Connection Types | Push-to-connect, Quick-fit, Swagelok®-style ferrule, VCR |
| Electrical Interface | DB9 male |
| Display & Control | Integrated LCD with membrane keypad |
| Built-in Sensors | Temperature and pressure compensation sensors |
| Gas Compatibility | Multi-gas (N₂, O₂, Ar, He, CO₂, H₂, Air, N₂O, CH₄, etc., with gas-specific calibration) |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | MFC330 |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min recommended for optimal stability |
| Valve Type | Normally Closed |
| Gas Compatibility | Clean, dry gases |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | Atotech MFC330 Micro-Flow Gas Mass Flow Controller |
| Flow Range Options | 0–2, 10, 20, 50, 100, 300, 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min optimal |
| Valve Type | Normally Closed |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | MFC330 |
| Product Category | Thermal Mass Flow Controller |
| Full Scale Ranges (N₂ equivalent) | 0–2, 10, 20, 50, 100, 300, 500 sccm |
| Measurement Range | 0.5% FS (1:200) |
| Control Range | 1–100% FS (1:100) |
| Accuracy (Standard) | ±1% FS |
| Accuracy (High Performance) | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Settling Time (Control Mode) | <3 s |
| Warm-up Time (T95) | 5 min |
| Optimal Stability | 30 min |
| Valve Function | Normally Closed |
| Leak Integrity | ≤1×10⁻⁸ Pa·m³/s (He) |
| Max Operating Pressure | 3 MPa (30 bar) |
| Operating Differential Pressure | 0–1 MPa |
| Operating Temperature Range | −20 to +65 °C (ambient & gas) |
| Relative Humidity | 0–98% RH (non-condensing) |
| Process Connections | Push-in, Push-on, Compression, VCR (optional) |
| Wetted Materials | FKM elastomers, 304/316 stainless steel |
| Housing IP Rating | IP40 |
| Mounting Orientation | Horizontal only (factory calibrated) |
| Mounting Holes | M4 × 5 mm |
| Weight | 0.96 kg |
| Electrical Interface | DB9 male |
| Analog I/O | 0–5 VDC, 4–20 mA (configurable) |
| Input Impedance | >10 MΩ |
| Output Impedance | <1 kΩ |
| Analog Data Update Rate | 200 Hz |
| Digital Interface | Modbus RTU (RS232/RS485), CAN |
| Baud Rates | 9600–115200 bps (user-selectable) |
| Power Supply | 15–40 VDC, <200 mA |
| Display Update Rate | 50 Hz |
| Analog Signal Accuracy | ±0.05% FS |
| STP Reference | 20 °C, 1 atm |
| Gas Selection | Software-configurable for >98 gas types |
| Software | Aitoly Stepwise Flow Control Suite |
| Brand | ATP Optosky |
|---|---|
| Origin | Fujian, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | ATM5100 |
| Price | Upon Request |
| Sampling Rate | 2 MHz |
| Spectral Range | 800–1650 nm |
| Photosensitive Area | Ø3 mm (customizable) |
| Max. Measurable Power | +3 dBm |
| Min. Measurable Power | −70 dBm |
| Nonlinearity | <0.5% |
| Measurement Uncertainty | ±2% |
| Calibration | Built-in traceable calibration |
| Output Interface | USB 2.0 High-Speed |
| Optical Input | FC/PC connector and free-space coupling |
| Optional Accessory | OD3 calibrated neutral-density attenuator |
| Brand | Attocube Systems AG |
|---|---|
| Origin | Germany |
| Model | IDS3010 |
| Light Source | Single-frequency laser |
| Measurement Range | 0–5 m |
| Linear Measurement Accuracy | ±1 pm |
| Sampling Bandwidth | 10 MHz |
| Operating Environment | 10 mK, 1×10⁻¹⁰ mbar vacuum, up to 10 MGy radiation tolerance |
| Interface Options | HSSL, AquadB, CANopen, Profibus, EtherCAT |
| Probe Wavelengths | 650 nm (alignment), 1530 nm (measurement) |
| Probe Spot Sizes | 2 µm to 7.6 mm (depending on configuration) |