Measurement Instruments
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| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Fimetrics P3D |
| Measurement Principle | White-Light Interferometry |
| Type | Non-Contact 3D Surface Profilometer / Roughness Analyzer |
| Key Resolution | Sub-nanometer vertical resolution (≤0.1 nm typical) |
| Field-of-View Scalability | Multi-field stitching enabled |
| Optical Configuration | Phase-shifting and vertical-scanning interferometry (CSI) |
| Compliance Basis | Designed for ISO 25178-2, ISO 4287, ASTM E1392, and VDI/VDE 2634 Part 3 |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | HRP®-260 |
| Measurement Principle | Stylus-based contact profilometry with dual-stage scanning (macro-stage + high-resolution piezo stage) |
| Scan Range | 200 mm (macro), 90 µm (high-res piezo) |
| Step Height Range | 0.1 nm to 327 µm |
| Normal Force Range | 0.03–50 mg |
| Sample Diameter Support | 75–200 mm (opaque & transparent substrates) |
| Automation | Fully automated wafer handling, pattern recognition, SECS/GEM compliance |
| Software | Integrated metrology suite with ISO 4287/4288, ASME B46.1, and SEMI E10/E126 compliant analysis modules |
| Data Management | Audit-trail enabled, FDA 21 CFR Part 11 ready, GLP/GMP traceable reporting |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | HRP®-260 |
| Product Type | Contact Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-Based Profilometry |
| Horizontal Scan Range (Long-Range Stage) | 200 mm (no stitching required) |
| High-Resolution Stage Travel | 90 µm × 90 µm |
| Vertical Resolution | 1 nm |
| Stylus Normal Force Range | 0.03–50 mg |
| Step Height Measurement Range | <1 nm to 327 µm |
| Stylus Tip Radius Options | 20 nm – 50 µm |
| Stylus Included | DuraSharp® diamond stylus (40 nm radius) |
| Wafer Handling | Automatic robotic loading for 75–200 mm opaque (e.g., Si, GaAs) and transparent (e.g., sapphire) substrates |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | P-17 |
| Product Type | Contact Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-Based Profilometry |
| Scan Range | Up to 200 mm (no image stitching required) |
| Step Height Range | 1 nm to 1000 µm |
| Stylus Force Control | 0.03–50 mg |
| Camera Resolution | 5 MP color, optical zoom |
| Compliance | SEMI E4, E5, E30, E37 |
| Software Platform | Apex Analysis Software (ISO/ASME-compliant), Offline Analysis Module, SECS/GEM & HSMS support |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-170 |
| Pricing | Available Upon Request |
| Measurement Principle | Capacitive Sensing |
| Measurement Range | 0–1000 µm |
| Accuracy | ±0.5 nm |
| Probe Tip Radius | 2.0 µm |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | Up to 200 mm (Seamless, No Stitching Required) |
| Step Height Repeatability | 0.4 nm |
| Vertical Resolution | 0.001 nm |
| Maximum Sample Size | 200 mm Diameter |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | P-170 |
| Product Category | Contact Stylus Profilometer / Surface Roughness Tester |
| Operating Principle | Stylus-based Contact Profilometry |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Price | USD 75,000 (FOB) |
| Measurement Principle | Capacitive Probe-Based Profilometry |
| Vertical Measurement Range | 0–1000 µm |
| Vertical Accuracy | ±0.5 Å |
| Tip Radius | 2.0 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 150 mm (single-pass, no stitching required) |
| Step Height Repeatability | ≤4 Å |
| Vertical Resolution | ≤0.01 Å |
| Maximum Sample Diameter | 150 mm |
| Platform Positioning Repeatability | 2 µm |
| Max Sample Height | ≥30 mm |
| Optical Zoom | 4× (motorized) |
| Camera | 5 MP color CCD |
| Digital Magnification | 4× |
| Vibration Isolation Requirement | ≤250 µin/sec (1–100 Hz) |
| Ambient Noise Limit | ≤80 dB(A) |
| Airflow Limit | ≤100 ft/min |
| Dimensions (W×D×H) | 430 × 570 × 670 mm |
| Weight | 80 kg |
| Brand | KLA |
|---|---|
| Model | Profilm 3D |
| Type | Non-contact Optical Profilometer / Surface Roughness Analyzer |
| Measurement Principle | White Light Interferometry (WLI) with Vertical Scanning Interferometry (VSI) and Phase-Shifting Interferometry (PSI) |
| Vertical Range | VSI: 50 nm – 100 mm |
| PSI | 0 – 3 µm |
| Reflectance Range | 0.05% – 100% |
| Piezo Scan Range | 500 µm |
| XY Stage Travel | 100 mm × 100 mm |
| Compliance | ISO 25178-604, ISO 4287, ISO 4288, ASME B46.1, ASTM E2923 |
| Software | ProfilmOnline™ Cloud-Based Analysis Platform |
| Data Export | CSV, TIFF, BMP, OBJ, STP, DXF |
| Roughness Parameters | 47 ISO/ASME/EUR-compliant parameters |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Profilm3D |
| Product Type | Non-contact 3D Optical Profilometer / Surface Roughness Analyzer |
| Operating Principle | White Light Interferometry |
| Measurement Modes | Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI) |
| Z-Stage Travel | 100 mm |
| Objective Turret | 5×–100× (Michelson 5×, Mirau 10×/20×/50×/100×) |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 1 nm to 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Lateral Resolution | Determined by stylus tip radius (0.1–50 µm selectable) |
| Stylus Tip Radius | 0.7 µm (standard), down to 100 nm optional |
| Normal Force Range | 0.03–50 mg (force-controlled feedback) |
| Scan Length | Up to 150 mm (single-pass, no stitching required) |
| Wafer/Specimen Max Size | 150 mm diameter |
| Step Height Repeatability | < 0.2% of measured height (1σ) |
| Surface Flatness Calibration | Arc correction algorithm integrated |
| Imaging System | 5 MP color CCD with motorized zoom and focus |
| Software Platform | Apex™ v6.x with ISO/ASME-compliant analysis modules |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Product Type | Imported |
| Model | Tencor® P-170 |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 0.5 nm – 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | < 12 nm (standard diamond tip) |
| Normal Force Range | 0.03–15 mg (closed-loop force control) |
| Maximum Scan Length | 200 mm (single-pass, no stitching required) |
| Step Height Repeatability | ≤ 0.15 nm (1σ, over 24 h) |
| Maximum Sample Size | Ø200 mm × 25 mm thick |
| Optical System | 5 MP color camera with motorized zoom and dual-view (top + side) optics |
| Automation | Integrated robotic handler for opaque (e.g., Si) and transparent (e.g., sapphire) wafers (Ø75–200 mm) |
| Compliance | ASTM E1399, ISO 4287, ISO 25178-2, USP <1059>, FDA 21 CFR Part 11 (audit trail & electronic signature enabled) |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | ZETA-20 |
| Product Type | Non-contact Optical Profilometer / Surface Roughness Analyzer |
| Operating Principle | White-light Interferometry |
| Key Imaging Technology | ZDot™ 3D Imaging |
| Vertical Resolution | Sub-Ångström (≤0.1 nm) |
| Measurement Modes | Six Integrated Optical Modules |
| Surface Reflectivity Range | 0.5% – >85% |
| Output | True-color 2D/3D Images |
| Compliance | ASTM E2921, ISO 25178-2, ISO 4287, USP <1056>, FDA 21 CFR Part 11 Ready (via optional software module) |
| Brand | KLA |
|---|---|
| Origin | USA |
| Model | Zeta-20 |
| Product Type | Non-contact 3D Optical Profilometer / Surface Roughness Analyzer |
| Measurement Principles | ZDot™ Multi-Mode Imaging, White Light Interferometry (WLI), Nomarski Differential Interference Contrast (DIC), Shear Interference, Broadband Reflectometry, Automated Optical Inspection (AOI) |
| Vertical Resolution | Sub-nanometer (typical, dependent on mode) |
| Lateral Resolution | ~0.4 µm (optical diffraction-limited) |
| Step Height Range | 1 nm – 10 mm |
| Surface Roughness Range | Ra 0.01 nm – 50 µm |
| Film Thickness Range | 30 nm – 100 µm (transparent films) |
| Defect Detection Limit | ≥1 µm |
| Field of View | Up to 8 mm × 6 mm (configurable via objective lenses) |
| Objective Lenses | 2.5×, 5×, 10×, 20×, 50×, 100× (motorized turret) |
| Software Platform | ZetaWare™ v6.x (GLP/GMP-compliant, 21 CFR Part 11 ready) |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Zeta-20 |
| Product Type | Non-contact Profilometer / Surface Roughness Analyzer |
| Measurement Principle | Multi-Mode Optical Interferometry (ZDot™, White-Light Interferometry, Nomarski DIC, Shear Interference), Spectral Reflectometry |
| Key Capabilities | 3D Topography, True-Color Imaging, Step Height (0.008 nm – 10 mm), Surface Roughness (Ra down to sub-Å), Film Thickness (30 nm – 100 µm), Automatic Defect Detection (>1 µm), Wafer-Scale Warpage & Stress Analysis |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | Zeta-300 |
| Product Type | Non-contact profilometer / surface roughness analyzer |
| Measurement Principle | Multi-mode optical interferometry (ZDot™, white-light interferometry, Nomarski differential interference contrast, shear interferometry) |
| Optical Capabilities | Simultaneous high-resolution 3D topography and true-color surface imaging |
| Vertical Resolution | Sub-nanometer (ZIC/ZSI), <0.1 nm (PSI), ≤1 nm (VSI) |
| Step Height Range | 0.8 nm to 1 mm |
| Surface Roughness Range | <0.05 nm RMS to >100 µm Sa |
| Film Thickness Range (ZFT) | 30 nm – 100 µm (transparent films) |
| Defect Detection Limit | ≥1 µm lateral resolution |
| Maximum Sample Size | Up to 280 mm Z-height |
| Compliance | ISO 25178, ISO 4287/4288, ASME B46.1, NIST-traceable calibration standards |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CS1 |
| Pricing | Available Upon Request |
| Substrate Diameter Range | 2 in. – 200 mm |
| Substrate Thickness Range | 350 μm – 1,100 μm |
| Material Compatibility | Opaque or transparent polished surfaces with ≥10% light scattering efficiency |
| Defect Detection Sensitivity | 0.3 μm PSL sphere equivalent (≥95% capture rate on bare Si) |
| Minimum Detectable Features | Scratches (100 μm × 0.1 μm × 50 Å), Pits (20 μm Ø × 50 Å depth), Stains (20 μm Ø × 10 Å thickness) |
| Signal Threshold | Defect signal amplitude >3× peak-to-valley background noise |
| Brand | Klocke Nanotechnik |
|---|---|
| Origin | Germany |
| Product Type | Contact-Mode 3D Profilometer / Surface Topography & Roughness Measuring System |
| Measurement Range (X/Y/Z) | 10–50 mm / 10–50 mm / 10–20 mm |
| Extended XY Travel | 100 × 100 mm² or 350 × 350 mm² |
| Motion Resolution | 1 nm |
| Tip Resolution | 0.5 nm |
| Probe Types | Metallic wire tip (radius < 100 nm), hook-type wire tip (radius < 100 nm), spherical tip (Ø 0.12–0.3 mm), diamond tip (for indentation) |
| Sensor Configuration | Dual-axis (horizontal & vertical) capacitive displacement sensors |
| Software Features | Automated tip calibration & approach, 2D/3D visualization, quantitative surface analysis, optional sequence generator for automated measurement routines |
| Brand | Klocke Nanotechnik |
|---|---|
| Origin | Germany |
| Type | Precision Piezo-Based Nanopositioning Platform |
| Model | Klocke Nano Positioning |
| Compliance | Designed for UHV, Cryogenic, and High-Magnetic-Field Environments |
| Max Load Capacity | 2 kg |
| Travel Range | 5–70 mm |
| Velocity | < 2 mm/s |
| Open-Loop Motion Resolution | 2 nm |
| Sensor Resolution (Closed-Loop) | < 10 nm |
| Degrees of Freedom | XYZ linear, Θ/Φ rotation, XY/Z scanning, hybrid coarse/fine modes |
| Customization | Fully configurable mechanical design, material options (Invar, titanium, ceramics), vacuum-compatible variants, integrated metrology interfaces |
| Brand | KNF |
|---|---|
| Origin | Germany |
| Model | VC900 |
| Measurement Principle | Piezoresistive Pressure Sensor |
| Range | 0–1100 mbar abs. |
| Vacuum Port | ID 10 mm, PVDF |
| Accuracy | ±1 mbar |
| Power Supply | 100–240 V AC, 50/60 Hz |
| Max. Current | 1.0 A |
| IP Rating | IP30 |
| Operating Temperature | +10 to +40 °C |
| Dimensions (W×D×H) | 181 × 101 × 67 mm |
| Weight | 1.2 kg |
| Interface | Mini-USB |
| Control Ports | Inlet (ID 10 mm, PVDF), Outlet (ID 10 mm, PVDF), Vent (ID 4 mm, nickel-plated brass) |
| Origin | Japan |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | ET200 |
| Price | USD 22,500 (FOB Japan) |
| Z-Range | 600 µm |
| Z-Resolution | 0.1 nm |
| Vertical Reproducibility | 1σ = 1 nm |
| Stylus Tip Radius | 2 µm |
| Normal Force Range | 1–50 mgf |
| X-Scan Length | 100 mm |
| X-Linearity Error | 0.2 µm / 100 mm |
| X-Position Resolution | 0.1 µm |
| Z-Axis Travel | 50 mm |
| Sample Max. Diameter | Ø160 mm |
| Sample Max. Thickness | 50 mm |
| Sample Max. Weight | 2 kg |
| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Kosaka SE-500-59 |
| Price Range | USD 42,000 – 56,000 |
| Measurement Principle | Contact Stylus Profilometry (ISO 3274, ISO 4287, ISO 11562 compliant) |
| Vertical Measurement Range | ±400 µm (800 µm total) |
| Vertical Resolution | 0.08 nm |
| Horizontal Measurement Length | 55 mm (extendable to 81 mm via multi-trace stitching) |
| Straightness Accuracy | ≤0.3 µm over 55 mm |
| Stylus Tip Radius | 2 µm diamond |
| Stylus Force | 0.75 mN |
| Scan Speeds | 0.05–2.0 mm/s (6 discrete speeds + high-speed positioning) |
| Filter Types | Gaussian, 2RC, Special Gaussian |
| Cutoff Wavelengths (Roughness) | λc = 0.08, 0.25, 0.8, 2.5, 8.0 mm |
| Cutoff Wavelengths (Waviness) | λf = 0.8, 2.5, 8.0, 25.0 mm |
| Evaluation Parameters | 120+ standardized parameters per ISO, JIS, ANSI/ASME B46.1, and DIN 4768 |
| Display | 640×480 RGB TFT color LCD with capacitive touchscreen |
| Data Storage | USB flash drive (up to 8 GB) |
| Interface | RS-232 serial output |
| Power Supply | AC 90–240 V, 50/60 Hz, 200 VA |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model Series | PHE127, PHE167, PHE224, PHE227, PHP164, PHP167 |
| Output | 0.5–6 VDC (ratiometric or fixed), 4-wire shielded |
| Pressure Ranges | 2–600 bar (absolute, gauge, sealed gauge) |
| Operating Temperature | −55 °C to +150 °C (peak +150 °C) |
| Diaphragm & Housing Material | Grade 5 Titanium (Ti-6Al-4V) or 17-4 PH Stainless Steel |
| Accuracy (Nonlinearity + Hysteresis) | ≤ ±0.25 %FS (standard), ≤ ±0.05 %FS (high-precision PGP variants) |
| Overpressure Limit | 150–300 %FS depending on range |
| Burst Pressure | 200–300 %FS |
| Response Time | ≤ 0.5 ms (PHE127/PHE167), 1–2 ms (PHE224/PHE227/PGP) |
| Electrical Connection | MIL-C-26482 circular connector (optional) or 1 m shielded Viton® cable (4-conductor) |
| IP Rating | IP65 (absolute/sealed gauge), IP50 (vented gauge) |
| Mounting Threads | M5×0.8, M10×1, M14×1.5, 1/4 NPT (male/female options) |
| Brand | Kulite |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | RDD |
| Pricing | Upon Request |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | XTL Series |
| Price | Upon Request |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CSTM-VCSEL-PW-060-LIVT |
| Pricing | Available Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | 240 |
| Channel Options | 2-channel (240-2P) or 8-channel (240-8P) |
| Temperature Range | 1 K to 800 K |
| Sensor Compatibility | Cernox®, Platinum RTDs, DT-670/DT-470 Diodes, Germanium, Carbon-Glass, RhFe, Rox™, GaAlAs |
| Excitation | 4-wire differential, constant current (10 µA) with polarity reversal |
| Isolation | Opto-isolated sensor inputs (channel-to-ground), non-isolated channel-to-channel |
| Communication | PROFIBUS-DP v1, USB 2.0 |
| Display | 128×32-pixel OLED, dual-parameter real-time readout (K/°C/°F/V/Ω), update rate: 2 Hz |
| Calibration | User-loadable 200-point curves per channel |
| Mounting | DIN-rail compatible, rear busbar for shared power & fieldbus |
| Compliance | CE, RoHS, PROFIBUS Nutzerorganisation (PNO) certified |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | Cernox® |
| Temperature Range | 0.1 K to 420 K |
| Magnetic Field Error | Negligible above 30 K |
| Radiation Hardness | High |
| Thermal Response Time | As low as 1.5 ms @ 4.2 K (BC/BR/BG) |
| Encapsulation Options | SD (hermetic, sapphire-based), AA, BC, BG, BR, CD, ET, LR, MT, CO, CU, HT variants |
| Excitation Recommendation | 20 µV (0.1–0.5 K), 63 µV (0.5–1 K), ≤10 mV above 1.2 K |
| Power Dissipation | ~10⁻⁵ W @ 300 K, ~10⁻⁷ W @ 4.2 K, ~10⁻¹³ W @ 0.3 K |
| Long-Term Stability | ±3 mK @ 4.2 K |
| Compliance | Suitable for UHV, GLP/GMP-adjacent cryogenic metrology, ASTM E220, ISO/IEC 17025 traceable calibration workflows |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | CS Series |
| Pricing | Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model Series | DT-670, Cernox® CX-1050/CX-1070, Rox™ RX-102B-RS/RX-102A, DT-621-HR, GR-100, CT-400, TC-E/K, Pt-100/200 |
| Temperature Range | 0.005 K to 1543 K (model-dependent) |
| Calibration | NIST-traceable, standard curves per IEC 60751 (Pt), ASTM E1137 (RTD), MIL-STD-883 (radiation) |
| Vacuum Compatibility | Up to 1×10⁻¹⁰ Pa (ultra-high vacuum) |
| Magnetic Field Tolerance | < ±0.1% reading up to 20 T (Cernox®, Rox™) |
| Radiation Hardness | Qualified to 1×10⁸ rad(Si) (Cernox®, GR-100, HR series) |
| Interchangeability | DT-670, Rox™, and Pt-series sensors comply with standardized resistance-vs-temperature curves (e.g., DT-670 curve, Rox™ Curve #1, Pt-100 DIN 43760) |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | DT-670 |
| Temperature Range | 1.4 K to 500 K |
| Packaging Options | SD (hermetically sealed, sapphire-mounted), bare die (DT-670E-BR), non-magnetic (DT-621-HR) |
| Calibration Options | standard curve compliance (DT-670), full-range calibrated (DT-670-SD), low-temperature calibrated down to 1.4 K |
| Tolerance Bands | A, B, C, D (for 1.4–500 K), E (30–300 K), plus B/E bare-die variants |
| Forward Bias Current | 10 µA |
| Output Signal | monotonic voltage drop (0.1–6 V) |
| Mounting Compatibility | indium solderable, UHV-compatible, thermal-cycle robust |