INFICON Transpector® RGA Series Residual Gas Analyzer
| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Transpector® RGA Series |
| Pricing | Available Upon Request |
Overview
The INFICON Transpector® RGA Series Residual Gas Analyzer is a quadrupole mass spectrometer engineered for real-time, in-situ analysis of residual and process gases in high-vacuum and ultra-high-vacuum (UHV) environments. Operating on the principle of mass-selective ion filtering via radiofrequency (RF) and direct-current (DC) voltage scanning across a quadrupole rod assembly, the instrument detects and quantifies gaseous species by their mass-to-charge ratio (m/z) with unit-mass resolution from 1 to 100 amu (extendable to 200 amu in optional configurations). Designed specifically for integration into semiconductor fabrication tools, thin-film deposition chambers, vacuum coating systems, and particle accelerator beamlines, the Transpector® RGA delivers stable, low-drift performance under continuous duty cycles—enabling precise identification of trace contaminants (e.g., H2O, CO, CO2, hydrocarbons, O2, N2) and verification of process gas composition (e.g., Ar, He, SiH4, NH3, Cl2). Its compact, conflat-flanged design supports direct mounting to vacuum vessels, minimizing conductance loss and ensuring rapid response time (<500 ms typical for full-scan acquisition).
Key Features
- Quadrupole mass analyzer with electromagnetically shielded, temperature-stabilized rods for long-term mass calibration stability (±0.1 amu over 12 months)
- Dual-mode operation: full-spectrum scanning (1–100 amu) and dedicated peak monitoring (up to 32 user-defined masses) with sub-second dwell times
- Integrated Bayard-Alpert hot cathode ion gauge for simultaneous total pressure measurement (1×10−10 to 1×10−3 mbar)
- High-sensitivity electron multiplier detector (EMD) with >107 gain and <1×10−14 A detection limit for partial pressures
- Robust architecture compliant with CE, UL 61010-1, and RoHS directives; designed for 24/7 operation in Class 100 cleanroom environments
- Modular controller with Ethernet (TCP/IP), RS-232, and analog I/O interfaces for seamless PLC and SCADA integration
Sample Compatibility & Compliance
The Transpector® RGA is compatible with inert, reactive, and corrosive gases commonly encountered in vacuum-based manufacturing—including halogenated compounds, silanes, ammonia, and oxygen plasmas—provided appropriate inlet conditioning (e.g., heated capillary, cold trap) is applied per application requirements. It meets critical regulatory expectations for process analytical technology (PAT) deployment: data integrity is ensured through audit-trail-enabled firmware supporting ALCOA+ principles; raw spectral data files are stored in vendor-neutral .CSV and .RAW formats compliant with FDA 21 CFR Part 11 when used with INFICON’s optional IQ/OQ validation packages. The system adheres to ISO 14644-1 (cleanroom classification), ASTM E1988 (mass spectrometric residual gas analysis), and SEMI F20 (semiconductor equipment environmental standards).
Software & Data Management
Control and analysis are performed via INFICON’s proprietary Transpector® Control Software (v5.x), a Windows-based application supporting real-time spectral visualization, time-series trending, alarm configuration (threshold-based or rate-of-change), and automated report generation (PDF/Excel). All acquired spectra include embedded metadata: timestamp, instrument ID, calibration status, and operator logon credentials. Raw data files retain full digital resolution (16-bit ADC) and support post-acquisition reprocessing—including background subtraction, isotopic pattern deconvolution, and relative sensitivity factor (RSF)-based semi-quantitative analysis. For enterprise-level deployment, the software integrates with PI System, Ignition SCADA, and LabArchives ELN via OPC UA and RESTful API protocols.
Applications
- Real-time leak detection and localization using helium tracer gas (detection limit <5×10−12 mbar·L/s)
- Chamber conditioning verification prior to wafer processing (e.g., water desorption kinetics, hydrocarbon outgassing profiles)
- In-line monitoring of reactive sputtering and PECVD processes to detect precursor decomposition byproducts
- UHV system qualification and certification per ISO 20484 and ESA SCC-EN-1001-002
- Fundamental surface science studies involving adsorption/desorption kinetics and catalytic reaction intermediates
FAQ
What vacuum range is required for optimal RGA operation?
The Transpector® RGA achieves best signal-to-noise performance at pressures between 1×10−7 and 1×10−4 mbar. Operation down to 1×10−10 mbar is supported with extended integration times.
Can the RGA be calibrated for quantitative analysis?
Yes—factory-installed relative sensitivity factors (RSFs) are provided for >40 common gases; users may perform custom calibration using certified standard gas mixtures traceable to NIST SRMs.
Is remote diagnostics supported?
All Transpector® RGA controllers include embedded web server functionality and support secure remote access via HTTPS and SSH for firmware updates and troubleshooting.
How often does the filament require replacement?
Under typical semiconductor tool monitoring conditions, the dual-filament assembly provides >12,000 hours of operational life; automatic filament switching extends uptime during scheduled maintenance windows.
Does the system comply with cybersecurity standards for industrial networks?
Firmware v5.3+ includes TLS 1.2 encryption, role-based access control (RBAC), and configurable password policies aligned with IEC 62443-3-3 SL2 requirements.
