Step Height Measurement Instrument
Filter
Showing 1–30 of 34 results
| Brand | Atometrics |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM/ODM Producer |
| Country of Origin | China |
| Model | WM300R |
| Pricing | Upon Request |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Model | Dektak Pro |
| Measurement Repeatability | 4 Å |
| Accuracy | ±1% |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | 4 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 200 mm |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dektak Pro |
| Price | Upon Request |
| Maximum Scan Length | 55 mm |
| Step Height Repeatability | < 2% |
| Vertical Resolution | 0.1 nm |
| Maximum Sample Size | 200 mm |
| Measurement Principle | Contact Stylus Profilometry |
| Force Range (Standard LIS 3) | 1–15 mg |
| Optional Low-Force Mode (N-Lite+) | 0.03–15 mg |
| Stylus Tip Radius Options | 50 nm – 25 µm |
| HAR Tip Geometry | 200 µm × 20 µm |
| XY Stage Options | Manual 100 mm (4″), Motorized 150 mm (6″), Motorized Encoded 200 mm (8″) |
| R-Theta Stage | Manual or Motorized, Continuous 360° Rotation |
| Field of View (Vertical Digital Zoom) | 0.275–2.2 mm |
| Brand | Bruker |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dektak Pro |
| Measurement Principle | Contact Stylus Profilometry |
| Probe Normal Force | 0.03–15 mg (with N-Lite+ sensor) or 1–15 mg (standard LIS 3) |
| Scan Length | 55 mm (2") or 200 mm (8") with scan stitching capability |
| Step Height Repeatability | 4 Å, 1σ (on ≤1 μm certified step standard) |
| Vertical Resolution | 1 Å (at 6.55 μm vertical range) |
| Vertical Range | 1 mm |
| Maximum Data Points per Scan | 120,000 |
| Sample Thickness Capacity | up to 50 mm |
| Maximum Wafer Size | 200 mm (8") |
| XY Stage Options | Manual 100 mm (4"), Motorized 150 mm (6"), Encoder-equipped Motorized 200 mm (8") |
| Tip Radius Options | 50 nm – 25 μm |
| High-Aspect-Ratio (HAR) Tip | 200 μm × 20 μm |
| Field of View | 0.275–2.2 mm (via selectable optics) |
| Operating Temperature | 20–25°C |
| Relative Humidity | ≤80%, non-condensing |
| Input Voltage | 100–240 VAC, 50–60 Hz |
| Dimensions (Instrument) | 455 × 550 × 370 mm (W×D×H) |
| Weight | 34 kg |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dektak XT |
| Measurement Principle | Capacitive Transduction |
| Vertical Repeatability | ≤ 5 Å |
| Vertical Resolution | 1 Å |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force | 15 µN |
| Scan Length | 55 mm (2-inch) |
| Maximum Sample Size | 50 mm |
| Operating Temperature | 10–30 °C |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Model | DEKTAK XT |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Resolution | 1 Å |
| Step Height Repeatability | <4 Å |
| Vertical Measurement Range | Up to 1 mm |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force | 15 µN (adjustable) |
| Scan Length | 55 mm (2-inch stage travel) |
| Maximum Sample Size | 50 mm diameter |
| Accuracy | ±1% of measured value |
| Horizontal Positioning Resolution | 10 nm |
| Data Acquisition Speed | 40% faster than previous generation |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | Dektak XT |
| Measurement Principle | Capacitive Sensing |
| Measurement Capability | 2D Surface Topography Profiling |
| Vertical Accuracy | ±1 Å |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force | 15 µN |
| Scan Length | 55 mm (2 inch) |
| Step Height Repeatability | <5 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 50 mm |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Model | XT |
| Measurement Principle | Capacitive |
| Measurement Modes | 2D Surface Profiling (standard), Optional 3D Profiling & Advanced Data Analysis |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force Range | 1–15 mg (LIS3 sensor) |
| Scan Length | 55 mm (2 in) |
| Step Height Repeatability | <5 Å (1σ on 0.1 µm step) |
| Vertical Scan Range | 1 mm |
| Vertical Resolution | 1 Å (within 6.55 µm full-scale range) |
| Maximum Sample Thickness | 50 mm |
| Wafer Compatibility | Up to 200 mm (8 in) |
| X/Y Stage Options | Manual (100 × 100 mm, 4 in) or Motorized (150 × 150 mm, 6 in), both with manual leveling and 360° continuous rotation |
| Optical View | Integrated true-color HD camera, FOV 1–4 mm |
| Data Points per Scan | Up to 120,000 |
| Software Platform | Vision64 (64-bit parallel processing), includes stress measurement, cantilever deflection, stitching, and 3D analysis modules (optional) |
| Operating Environment | 20–25 °C, ≤80% RH (non-condensing) |
| Power | 100–240 VAC, 50–60 Hz |
| System Dimensions (W×D×H) | 455 × 550 × 370 mm |
| Weight | 34 kg (excl. isolation enclosure) |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | Dektak XT |
| Price Range | USD 55,000–68,000 (FOB Hamburg) |
| Vertical Measurement Repeatability | <5 Å |
| Vertical Resolution | 1 Å |
| Accuracy | ±1% of measured step height |
| Tip Radius | 50 nm – 25 µm |
| Normal Force Range | 0.3–15 mg (adjustable in 0.1 mg increments) |
| Maximum Scan Length | 55 mm (2-inch stage travel) |
| Maximum Sample Diameter | 50 mm |
| Vertical Measurement Range | Up to 1 mm |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | Dektak XT-10th |
| Measurement Principle | Capacitive Probe Sensing |
| Measurement Capability | 2D Surface Topography Profiling |
| Vertical Accuracy | ±1 Å |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force | 15 µN |
| Scan Length | 55 mm (2 in) |
| Step Height Repeatability | < 5 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 50 mm |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | Dektak XTL |
| Measurement Principle | Capacitive Sensing |
| Measurement Capability | 2D Surface Profilometry (Optional 3D) |
| Accuracy | ±0.5% |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force Range | 0.3–15 mg |
| Scan Length | 55 µm |
| Step Height Repeatability | 5 Å (1σ, on 1 µm step) |
| Vertical Resolution | Up to 1 Å (within 6.55 µm vertical range) |
| Maximum Sample Size | 300 mm diameter |
| Brand | Bruker |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dektak XTL |
| Price Range | USD 95,000 – 135,000 (FOB Hamburg) |
| Measurement Principle | Capacitive Transduction |
| Measurement Capability | 2D Surface Profiling (Optional 3D Reconstruction) |
| Accuracy | ±0.5% of measured step height |
| Probe Tip Radius | 50 nm – 25 µm (interchangeable stylus options) |
| Normal Force Range | 0.3 – 15 mg (motorized force control) |
| Maximum Scan Length | 55 µm (standard) |
| Step Height Repeatability | 5 Å (1σ) on 1 µm step |
| Vertical Resolution | ≤1 Å (at full 6.55 µm vertical range) |
| Maximum Sample Size | Ø300 mm (flat wafers or rectangular substrates up to 300 × 300 mm) |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dektak XTL |
| Pricing | Available Upon Request |
| Measurement Principle | Capacitive Transduction |
| Measurement Capability | 2D Surface Topography (Optional 3D Reconstruction) |
| Accuracy | ±0.5% of measured step height |
| Probe Tip Radius | 50 nm – 25 µm |
| Normal Force Range | 0.3–15 mg |
| Maximum Scan Length | 55 µm |
| Step Height Repeatability | 5 Å (1σ, on 1 µm step) |
| Vertical Resolution | Up to 1 Å (within 6.55 µm vertical range) |
| Maximum Sample Size | 300 mm diameter |
| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | NS200 |
| Price | USD 84,000 (FOB Shenzhen) |
| Measurement Principle | Linear Variable Differential Capacitance (LVDC) |
| Probe Tip Radius | 2 µm |
| Scan Length | 55 mm |
| Step Height Repeatability | 0.5 Å (at 330 µm range) |
| Vertical Resolution | Sub-Ångström |
| Force Range | 1–50 mg (adjustable, closed-loop micro-electromagnetic control) |
| XY Stage | Motorized, 150 mm × 150 mm |
| Rotation Stage | 360° motorized |
| Z-Axis Lift | Motorized |
| Optical Navigation | 5 MP color camera, FOV 2200 × 1700 µm |
| Max Sample Thickness | 50 mm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Operating Environment | 16–25 °C, ΔT < 2 °C/h, RH 30–40 % (non-condensing), Vibration ≤ 6.35 µm/s (1–100 Hz), Acoustic Noise ≤ 80 dB, Airflow ≤ 0.508 m/s downward |
| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | NS200 |
| Price | USD 84,000 (FOB) |
| Measurement Principle | Capacitive (LVDC) |
| XY Stage Travel | 150 mm × 150 mm |
| Maximum Scan Length | 55 mm |
| Step Height Repeatability | ±0.005 nm (5 Å) |
| Max Sample Size | 200 mm (8-inch wafer) |
| Sensor Resolution | 0.01 Å (sub-angstrom) at 13 µm range |
| Force Control | Adjustable from 1 µN to 10 mN |
| Vertical Range | 13 µm (standard), optional up to 1050 µm |
| Optical Navigation | 5 MP color camera (orthogonal or oblique view) |
| SPC Module | Yes |
| Environmental Requirements | 16–25 °C, ≤40% RH (non-condensing), vibration <6.35 µm/s (1–100 Hz) |
| Brand | Chotest |
|---|---|
| Origin | Guangdong, China |
| Model | NS391 |
| Measurement Principle | Capacitive (LVDC Sensor) |
| Measurement Area | 150 mm × 150 mm |
| Scan Length | 55 mm |
| Step Height Repeatability | 5 Å |
| Maximum Sample Size | 200 mm (8-inch wafer) |
| Sensor Resolution | ≤0.01 Å (at 13 µm range) |
| Force Control | Adjustable constant contact force, ultra-low inertia electromagnetic actuation |
| Structural Design | Single-arch龙门 (monolithic龙门) frame with vibration isolation |
| Optical Navigation | 5 MP color camera, coaxial & oblique viewing options |
| Software Modules | SPC analysis, multi-region auto-scan, 3D surface reconstruction, stress calculation, roughness/waviness parameter extraction (Ra, Rq, Rv, Rp, Rz, etc.) |
| Brand | Keysight |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | D.T |
| Measurement Range | 5 nm – 1200 µm |
| Accuracy | ±1% |
| Probe Tip Radius | 2 µm |
| Normal Force | 1–15 mg |
| Scan Length | 55 µm |
| Step Height Repeatability | <4 Å |
| Vertical Resolution | 1 Å |
| Maximum Sample Size | 200 mm |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-500 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 0.002 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional tips available |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Horizontal Sample Stage | 140 mm manual X-Y stage |
| Max Sample Size | 100 mm × 100 mm |
| Step Height Repeatability | < 0.1% of measured height (RMS) |
| Surface Roughness Parameters | Ra, Rq, Rz, Rt, Rsk, Rku, with ISO 4287/4288 and ASME B46.1 compliant filtering |
| Optical System | Integrated 5 MP color camera with trapezoidal distortion correction and arc error compensation |
| Software | Alpha-Step Analysis Suite with GLP-compliant audit trail, report generation, and 21 CFR Part 11 ready configuration options |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D-600 |
| Measurement Principle | Mechanical Stylus Profilometry (Optical Lever Sensor) |
| Vertical Measurement Range | 0.003 µm to 1200 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | 0.7 µm (standard), optional from 0.1 µm to 50 µm |
| Normal Force Range | 0.03–15 mg |
| Scan Length | 55 mm |
| Sample Max Diameter | 200 mm |
| Step Height Repeatability | < 0.1% RSD (at ≥100 nm steps) |
| Optical System | 5 MP color camera with trapezoidal distortion correction and arc compensation |
| Brand | KLA |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | D500 |
| Price Range | USD 42,000 – 56,000 (FOB) |
| Measurement Principle | Optical Lever-Based Contact Profilometry |
| Vertical Measurement Range | 10 nm – 1000 µm |
| Vertical Accuracy | ±0.01% of full-scale range |
| Probe Tip Radius | 2 µm |
| Adjustable Normal Force | 0.03–15 mg |
| Maximum Single-Scan Length | 30 mm |
| Step Height Repeatability | 0.5 nm (RMS, measured on 1 µm SiO₂ step standard over 15 repeated scans) |
| Vertical Resolution | 0.038 nm |
| Maximum Sample Size | 140 mm diameter circular stage |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Model | D600/P-7 |
| Measurement Principle | Mechanical Stylus Profiling with Optical Reflectance Height Detection |
| Vertical Measurement Range | 0.1 nm to 1200 µm |
| Vertical Accuracy | ±0.1 µm |
| Probe Normal Force | 0.03–15 mg |
| Maximum Scan Length | 55 mm (D600), 150 mm (P-7) |
| Step Height Repeatability | 0.10% (1σ) |
| Vertical Resolution | 0.38 Å |
| Maximum Sample Size | 200 mm diameter |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-170 |
| Pricing | Available Upon Request |
| Measurement Principle | Capacitive Sensing |
| Measurement Range | 0–1000 µm |
| Accuracy | ±0.5 nm |
| Probe Tip Radius | 2.0 µm |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | Up to 200 mm (Seamless, No Stitching Required) |
| Step Height Repeatability | 0.4 nm |
| Vertical Resolution | 0.001 nm |
| Maximum Sample Size | 200 mm Diameter |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Price | USD 75,000 (FOB) |
| Measurement Principle | Capacitive Probe-Based Profilometry |
| Vertical Measurement Range | 0–1000 µm |
| Vertical Accuracy | ±0.5 Å |
| Tip Radius | 2.0 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 150 mm (single-pass, no stitching required) |
| Step Height Repeatability | ≤4 Å |
| Vertical Resolution | ≤0.01 Å |
| Maximum Sample Diameter | 150 mm |
| Platform Positioning Repeatability | 2 µm |
| Max Sample Height | ≥30 mm |
| Optical Zoom | 4× (motorized) |
| Camera | 5 MP color CCD |
| Digital Magnification | 4× |
| Vibration Isolation Requirement | ≤250 µin/sec (1–100 Hz) |
| Ambient Noise Limit | ≤80 dB(A) |
| Airflow Limit | ≤100 ft/min |
| Dimensions (W×D×H) | 430 × 570 × 670 mm |
| Weight | 80 kg |
| Brand | KLA |
|---|---|
| Origin | Malaysia |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | P-7 |
| Measurement Principle | Contact Stylus Profilometry |
| Vertical Measurement Range | 1 nm to 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Lateral Resolution | Determined by stylus tip radius (0.1–50 µm selectable) |
| Stylus Tip Radius | 0.7 µm (standard), down to 100 nm optional |
| Normal Force Range | 0.03–50 mg (force-controlled feedback) |
| Scan Length | Up to 150 mm (single-pass, no stitching required) |
| Wafer/Specimen Max Size | 150 mm diameter |
| Step Height Repeatability | < 0.2% of measured height (1σ) |
| Surface Flatness Calibration | Arc correction algorithm integrated |
| Imaging System | 5 MP color CCD with motorized zoom and focus |
| Software Platform | Apex™ v6.x with ISO/ASME-compliant analysis modules |
| Compliance | SEMI E4, E5, E30, E37 |
| Brand | KLA |
|---|---|
| Origin | USA |
| Manufacturer | KLA Corporation |
| Product Type | Imported |
| Model | Tencor® P-170 |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 0.5 nm – 1000 µm |
| Vertical Resolution | Sub-nanometer (typical) |
| Probe Tip Radius | < 12 nm (standard diamond tip) |
| Normal Force Range | 0.03–15 mg (closed-loop force control) |
| Maximum Scan Length | 200 mm (single-pass, no stitching required) |
| Step Height Repeatability | ≤ 0.15 nm (1σ, over 24 h) |
| Maximum Sample Size | Ø200 mm × 25 mm thick |
| Optical System | 5 MP color camera with motorized zoom and dual-view (top + side) optics |
| Automation | Integrated robotic handler for opaque (e.g., Si) and transparent (e.g., sapphire) wafers (Ø75–200 mm) |
| Compliance | ASTM E1399, ISO 4287, ISO 25178-2, USP <1059>, FDA 21 CFR Part 11 (audit trail & electronic signature enabled) |
| Origin | Germany |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Kosaka SE-500-59 |
| Price Range | USD 42,000 – 56,000 |
| Measurement Principle | Contact Stylus Profilometry (ISO 3274, ISO 4287, ISO 11562 compliant) |
| Vertical Measurement Range | ±400 µm (800 µm total) |
| Vertical Resolution | 0.08 nm |
| Horizontal Measurement Length | 55 mm (extendable to 81 mm via multi-trace stitching) |
| Straightness Accuracy | ≤0.3 µm over 55 mm |
| Stylus Tip Radius | 2 µm diamond |
| Stylus Force | 0.75 mN |
| Scan Speeds | 0.05–2.0 mm/s (6 discrete speeds + high-speed positioning) |
| Filter Types | Gaussian, 2RC, Special Gaussian |
| Cutoff Wavelengths (Roughness) | λc = 0.08, 0.25, 0.8, 2.5, 8.0 mm |
| Cutoff Wavelengths (Waviness) | λf = 0.8, 2.5, 8.0, 25.0 mm |
| Evaluation Parameters | 120+ standardized parameters per ISO, JIS, ANSI/ASME B46.1, and DIN 4768 |
| Display | 640×480 RGB TFT color LCD with capacitive touchscreen |
| Data Storage | USB flash drive (up to 8 GB) |
| Interface | RS-232 serial output |
| Power Supply | AC 90–240 V, 50/60 Hz, 200 VA |
| Origin | Taiwan |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Regional Classification | China-sourced Instrument |
| Model | YT520 |
| Pricing | Available Upon Request |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS100B |
| Origin | Anhui, China |
| Probe Tip Radius | ≥2 µm (60° included angle, standard) |
| Probe Normal Force Range | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | ≤0.5 nm (1σ, 30 scans on 1 µm step standard) |
| Vertical Resolution | 0.05 nm (full scale) |
| Maximum Sample Dimensions | ≤150 mm × ≤200 mm × ≤300 mm |
| Measurement Accuracy | ±3 µm |
| Sampling Rate | 200 Hz |
| Scan Speed | 5–100 µm/s |
| XY Stage Travel | 150 mm × 200 mm (motorized) |
| XY Repeatability | ±3 µm |
| Z-Stage Travel | 10 mm |
| Rotary Stage | ±360°, 0.01° resolution |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | JS100C |
| Pricing | Available upon Request |
| Measurement Principle | Inductive (LVDT-based) |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm × 150 mm |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS10B |
| Origin | Anhui, China |
| Measurement Range | 80 µm |
| Probe Normal Force | 0.5–50 mg |
| Step Height Repeatability | ≤0.5 nm (1σ, 30 scans on 1 µm Si standard) |
| Vertical Resolution | 0.05 nm (full scale) |
| Maximum Sample Size | ≤150 mm |
| Probe Tip Radius | ≥2 µm (standard, 60° included angle) |
| Optional Probe | ≤1 µm radius, 60° |
| Scan Speed | 5–100 µm/s |
| Sampling Rate | 200 Hz |
| Max Data Points per Scan | 2×10⁶ |
| XY Stage Travel | 150 mm (manual coarse/fine adjustment) |
| Z-Stage Travel | 10 mm |
| Rotary Stage | ±360° |
| Sample Thickness Limit | ≤10 mm |
| Compatible Substrates | Si, LiTaO₃, glass (opaque or semi-transparent) |