Probe Station
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| Brand | Abner |
|---|---|
| Origin | Jiangsu, China |
| Model | ABN-MPS-001 |
| Type | Temperature-Controlled Manual Probe Station |
| Operation | Manual |
| XY Travel Range | 70 mm × 70 mm (with 360° rotation) |
| Z-Axis Stroke | 65 mm |
| Sample Stage Dimensions | 600 mm × 600 mm × 200 mm |
| Max Load Capacity | 10 kg |
| Microscope Compatibility | Stereo or Metallurgical Microscope with C-mount interface |
| Eyepiece Magnification | 20× |
| Working Distance | 18.9–33.61 mm |
| Optical Magnification Options | 5×/10×/20×/50×/100× |
| Imaging Resolution | ≤1.2 µm |
| CCD Camera | 640×480 resolution |
| Vertical Lift Range | 0–50 mm (motorized, speed 0.02–4 mm/s) |
| Electrical Rating | 220 V AC, max 1 A |
| Max Bias Voltage Support | ±1500 V |
| Control PC | Intel i7-7500T, 16 GB DDR4, 256 GB SSD, Windows 10 OS |
| Display | 1920×1080 Full HD |
| Brand | Abner |
|---|---|
| Origin | Jiangsu, China |
| Model | ABN-PRO-001 |
| Operation Type | Fully Automatic |
| Platform Size | 60 cm × 60 cm |
| XY Travel Range | 50 mm × 50 mm |
| Z Travel | 200 mm |
| Max Sample Size | 65 mm × 65 mm |
| Max Sample Weight | 4 kg |
| CCD Magnification Options | 5×, 10×, 20×, 50× (long-working-distance objective) |
| Vertical Speed Range | 0.02–4 mm/s |
| Rotation | 360° motorized |
| Illumination | Coaxial ring + transmitted backlight |
| Control Interface | Integrated touchscreen (780 mm × 600 mm display), software-driven with manual override capability |
| Environmental Operating Range | 0–40 °C, ≤80% RH |
| Brand | Abner |
|---|---|
| Origin | Jiangsu, China |
| Model | ABN-PRO-002 |
| Operation Type | Fully Automatic |
| Probe Positioning Resolution | 1 µm |
| Integrated Vacuum Pump | Yes |
| Display | 27-inch 2K Full HD Monitor |
| Motorized Axes | X-Y-Z with Sample Stage Heating & Vacuum Chuck Control |
| Optical Imaging | Nikon CCD Camera (Visible to Near-IR) |
| RF Connectivity | Supported with Multiple RF Connector Types (SMA, K, V) |
| Probe Compatibility | GGB (USA), Korean OEM, and Domestic Probes |
| External Instrument Integration | Picosecond/Femtosecond Lasers, Raman, SHG, Photoconductivity Systems |
| Brand | Abner |
|---|---|
| Model | ABN-VPS-001 |
| Temperature Range | −190 °C to +300 °C |
| Environment Options | Ambient, Vacuum, Inert Gas (N₂/Ar) |
| Operation Mode | Fully Automatic |
| Probe Station Type | Vacuum-Compatible Thermal Probe Station |
| Motion System | Precision XYZ Motorized Stage with Thermal Drift Compensation |
| Microscope Compatibility | Stereo and Metallurgical Microscope Mounting Interface |
| Safety Features | Dual-Stage Over-Temperature Protection, Interlocked Vacuum & Cooling System |
| Compliance | Designed for GLP-compliant lab environments |
| Brand | Accretech (Tokyo Seimitsu) |
|---|---|
| Origin | Japan |
| Model | AP3000 / AP3000e |
| Operation Type | Fully Automatic |
| Maximum Wafer Size | 300 mm (12-inch) |
| Compliance | ISO Class 4 Cleanroom-Compatible Design |
| Structural Rigidity | High-stiffness granite base with active/passive vibration isolation |
| Alignment System | Integrated ITV (Image Tile Vision) for sub-micron probe-to-pad registration |
| Probe Capacity | Multi-site parallel probing capability |
| Brand | Accretech (ACCRETECH) |
|---|---|
| Origin | Japan |
| Model | FP-2000 |
| Operation Type | Fully Automatic |
| Maximum Wafer Size | 300 mm (12-inch) |
| Sample Types | Bare Wafers, Thin Wafers, Singulated Dies, CSP Substrates on Dicing Frames |
| Alignment Capability | Auto-Wafer Alignment, Auto-Probe-to-Pad Alignment, Die-Level Position Correction Software |
| Brand | Accretech (ACCRETECH) |
|---|---|
| Origin | Japan |
| Model | UF200R |
| Wafer Size Capacity | 200 mm (8-inch) |
| Automation Level | Fully Automatic |
| Probe Station Type | RF Probe Station |
| Compliance | Designed for ISO Class 5 cleanroom environments |
| Structural Rigidity | High-stiffness chuck with ITV fine alignment system |
| Thermal Operation Range | Up to +150 °C |
| Key Software Capabilities | Inkless wafer mapping, multisite parallel probing, OTS optical auto-alignment |
| Motion Control | Upgraded servo-driven XYZθ stage with sub-micron repeatability |
| Application Domain | LSI/VLSI wafer-level parametric testing, RF device characterization, high-reliability IC qualification |
| Brand | ACCRETECH (Tokyo Seimitsu) |
|---|---|
| Origin | Japan |
| Model | UF190R / UF200R |
| Automation Level | Fully Automatic |
| Wafer Size Compatibility | 200 mm (8″) and 300 mm (12″) |
| Control Interface | Full-color TFT touchscreen HMI |
| Alignment System | Motorized auto-probe alignment with sub-micron repeatability |
| Compliance | Designed for Class 100–1000 cleanroom environments |
| Brand | ARS |
|---|---|
| Origin | USA |
| Model | PS-L |
| Product Category | Temperature-Controlled Probe Station |
| Operation Type | Semi-Automatic |
| Cooling Method | Open-Cycle Cryostat (Liquid He / Liquid N₂) |
| Base Temperature | ~4 K (with LHe) or ~77 K (with LN₂) |
| Temperature Range | 4–400 K (extendable to 500 K or 800 K) |
| Temperature Stability | < ±50 mK |
| Vacuum Chamber | 10-inch welded stainless steel |
| Radiation Shield | 8-inch nickel-plated oxygen-free copper (OFHC) |
| Sample Stage | 2.25-inch gold-plated OFHC, grounded (optional insulated or biased) |
| Microscope | 7:1 zoom, ≤3 µm resolution, coaxial/ring illumination, 24″ HD monitor |
| Vibration Isolation | Triple-stage, sample stage vibration < 100 nm |
| Probe Arms | Up to 8 manually driven 3D micropositioners (X: 2″, Y: 1–2″, Z: 0.5″, 5 µm sensitivity) |
| Temperature Monitoring | Four calibrated DT-670 sensors (including DT-670-CU-4M at sample proximity) and two heaters (50 W on stage, 100 W on shield) |
| Controller | Lake Shore LS336 4-channel temperature controller with cryostat interface cables |
| Optional Upgrades | 16:1 microscope, 4″ sample stage, RF/microwave probes (up to 67 GHz), fiber-optic probe arms, motorized positioning |
| Brand | ARS |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | PSF-10-4 |
| Price Range | USD $65,000 – $130,000 |
| Product Category | Temperature-Controlled Probe Station |
| Operation Mode | Semi-Automatic |
| Temperature Range | 7 K – 400 K (configurable down to <4 K with DE215 cold head) |
| Vacuum Chamber | 10-inch welded stainless steel |
| Radiation Shield | 8-inch nickel-plated OFHC copper |
| Sample Stage | 2.25-inch gold-plated OFHC copper, thermally anchored to cold head |
| Optical Viewports | High-purity quartz window + sapphire cold shield window |
| Microscope | Standard 7:1 zoom optics (3 µm resolution, 89 mm working distance) |
| Probe Arms | Up to six 3-axis micromanipulators (manual drive, 2″ X / 1″ Y / 0.5″ Z travel, 5 µm sensitivity) |
| Cooling Method | Closed-cycle helium refrigeration (no liquid cryogens) |
| Vibration Performance | <1 µm total stage motion |
| Temperature Control | Four-channel precision controller with calibrated DT-670 series sensors (±12 mK accuracy), dual heating zones (50 W stage heater + 100 W radiation shield heater) |
| Compliance | Designed for ASTM F1788, ISO/IEC 17025-compliant lab environments |
| Brand | ARS |
|---|---|
| Origin | USA |
| Model | PSG-SM |
| Product Category | Cryogenic Temperature-Controlled Probe Station |
| Operation Mode | Semi-Automatic |
| Cooling Method | Dual-Cryocooler Closed-Cycle Refrigeration (DE210/DE215) |
| Base Temperature | <4 K |
| Temperature Range | 5 K–350 K (optional high-temp stage up to 800 K) |
| Magnetic Field | ±3 T vertical (optional ±6 T or vector magnet) |
| Vacuum Chamber | 11″ stainless steel |
| Sample Stage Diameter | 1.75″ (supports 2″ wafers) |
| Vibration Level | <1 µm RMS |
| Microscopy | Standard 7:1 zoom lens (3 µm resolution), optional 16:1 (2 µm resolution) |
| Probe Arm Configurations | DC/LF, RF (up to 67 GHz), optical fiber (UV–Vis–IR) |
| Temperature Stability | <50 mK |
| Pump-Down Time | ~120 min |
| Cool-Down Time to 10 K | ~5 h (DE210S) |
| Origin | USA |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | EPS Series |
| Price Range | USD $65,000 – $130,000 (FOB USA) |
| Product Category | RF-Compatible Manual Probe Station |
| Operation Mode | Manual |
| Base Platform | 150 mm Wafer-Capable |
| Max XY Travel | 155 mm × 155 mm |
| Minimum Positioning Resolution | 5 µm |
| Theta Rotation | 360° Continuous |
| Z-Axis Vertical Travel | 10 mm |
| Standard Base Dimensions | 490 mm × 490 mm × 480 mm (W × D × H) |
| Brand | ECOPIA |
|---|---|
| Origin | South Korea |
| Model | EPS-300 / EPS-500 / EPS-1000 |
| Type | Manual probe station |
| Category | Temperature-controlled probe station |
| Compliance | Designed for ISO/IEC 17025-compliant lab environments, compatible with ASTM F1768 and SEMI S2/S8 safety standards |
| Software Interface | Analog signal output (BNC), optional digital I/O for external controller integration |
| Stage Travel | X/Y fine adjustment via micrometer drives (10 µm resolution), Z-axis manual lift with locking mechanism |
| Maximum Wafer Size | EPS-300: up to 4″ |
| EPS-500 | up to 6″ |
| EPS-1000 | up to 8″ |
| Thermal Options | Optional heated chuck (−40 °C to +200 °C) available on EPS-500 and EPS-1000 |
| Vacuum Compatibility | Standard vacuum-compatible baseplate (10⁻³ mbar) for glovebox or controlled-atmosphere integration |
| Brand | FSM |
|---|---|
| Origin | USA |
| Model | FSM Inline & Dimensional Metrology |
| Temperature Range | Up to 900 °C (for 200 mm and 300 mm wafers) |
| Vacuum/Inert Gas Operation | Yes |
| TDS Capability | Yes |
| Wafer Size Support | 200 mm, 300 mm, 450 mm |
| Non-contact Optical Measurement | Yes |
| Laser Optical Lever (OptiLever®) Technology | Yes |
| Spatial Resolution (XY) | ±0.5 µm |
| Spectral Resolution (Raman option) | 0.1 cm⁻¹ |
| Brand | GBITEST |
|---|---|
| Model | GCP-CPX |
| Cooling Options | Liquid Nitrogen (LN₂) or Liquid Helium (LHe) |
| Base Temperature | <5 K (with LHe) |
| Sample Stage Diameter | Standard 2-inch, Optional up to 4-inch |
| Cooling Method | Direct cryogen immersion with multi-layer radiation shields |
| Temperature Monitoring | Multiple calibrated Pt sensors with ±10 mK stability |
| Operation Mode | Manual probe positioning |
| Construction | Stainless steel vacuum chamber with optical access windows |
| Vacuum Compatibility | <1×10⁻⁶ Torr typical base pressure |
| Radiation Shield Configuration | Dual-layer (LN₂ and LHe optimized) |
| Visual Access | Integrated quartz viewport on radiation shield |
| Mounting Interface | Standard SM1 (1.035"-40) and kinematic optical breadboard compatibility |
| Electrical Feedthroughs | 24-channel low-noise coaxial + 4-channel triaxial (optional) |
| Compliance | Designed per ISO 14644-1 Class 5 cleanroom handling guidelines for semiconductor lab use |
| Origin | Switzerland |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported Instrument |
| Model | miBot-01 |
| Price Range | USD 13,500 – 40,500 (FOB) |
| Product Category | Ultra-High-Vacuum Compatible Probe Station |
| Operation Mode | Fully Automated |
| Core Function | In-Situ Nanoscale Electrical Characterization Inside SEM Chambers |
| Actuation System | Four Integrated Piezo-Driven miBot™ Micro-Robots |
| Positioning Resolution | <10 nm (Open-Loop), <2 nm (Closed-Loop with Optional Sensors) |
| Leakage Current | ≤100 fA/V at 1 V bias |
| Signal Interface | Triaxial Shielded Cabling (75 Ω/50 Ω configurable), IEEE-488 & USB 3.0 Control Bus |
| Vacuum Compatibility | 1×10⁻⁷ mbar (UHV-ready with bake-out option) |
| Brand | Instec |
|---|---|
| Origin | USA |
| Model | HCP621G-PM |
| Temperature Range | -190 °C to 600 °C (LN₂ required for sub-ambient operation) |
| Heating/Cooling Rate | +80 °C/min (heating at 100 °C), -50 °C/min (cooling at 100 °C) |
| Temperature Stability | ±0.05 °C (>25 °C), ±0.1 °C (<25 °C) |
| Temperature Resolution | 0.01 °C |
| Control Sensor | 100 Ω Pt RTD |
| Control Method | PID with LVDC low-noise power supply |
| Heating Area | 28 mm × 30 mm |
| Sealing | Hermetic chamber (N₂ or inert gas compatible) |
| Optical Access | Removable φ38 mm viewport, ±60.7° viewing angle, 8.5 mm objective working distance |
| Electrical Interface | Standard BNC, optional triaxial for pA-level measurements |
| Probe Type | Manual lever-actuated Re-W bent probes |
| Sample Stage Grounding | Default grounded, optional floating or triaxial back-electrode configuration |
| Optional Modifications | Non-magnetic construction, internal feedthroughs, transmission-mode optical port, in-chamber wiring posts |
| Operation Mode | Manual probe positioning |
| Compliance | Designed for ASTM F1528, ISO/IEC 17025-aligned lab environments, supports GLP/GMP traceability via software SDK |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | CPX |
| Pricing | Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | CPX-VF |
| Temperature Range | 1.9 K to 400 K |
| Magnetic Field | ±2.5 T (vertical, superconducting solenoid) |
| Sample Diameter | Up to 51 mm (2") |
| Vacuum Base Pressure | <5×10⁻⁷ Torr (with PS-HV-CPX) |
| Probe Capacity | Up to 6 arms |
| Microwave Frequency Range | DC–67 GHz |
| Positional Stability | <30 nm (with PS-PVIS option) |
| Hall Effect Measurement Capability | Yes |
| UHV & Transfer-Compatible Vacuum Chamber Options | Available |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | CRX-4K |
| Temperature Range | 4.5 K to 350 K (optional up to 675 K) |
| Base Temperature | 4.5 K (2-probe configuration) |
| Vacuum Base Pressure | <1×10⁻⁵ Torr |
| Pumping System | TPS-FRG turbomolecular pump set |
| Sample Diameter | Standard 51 mm (2"), optional 102 mm (4") |
| Max Probe Count | 6 |
| DC/RF Probe Insulation | >100 GΩ |
| Microwave Frequency Range | DC to 67 GHz |
| Fiber-Optic Integration | Supported |
| Vibration Level | <1 µm |
| Landing Area | 25.4 mm diameter circle |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | CRX-6.5K |
| Cooling Method | Two-Stage Closed-Cycle Refrigerator |
| Base Temperature | 8 K (2-probe configuration) to 10 K (6-probe configuration) |
| Temperature Control Range | 8.5–350 K (standard), extendable to 20–675 K with PS-HTSTAGE option |
| Vacuum Level | <5×10⁻⁴ Torr at room temperature, <1×10⁻⁵ Torr at base temperature, <5×10⁻⁵ Torr at max temperature |
| Sample Diameter Capacity | Up to 51 mm (2 in) |
| Probe Arm Capacity | Up to 6 arms |
| DC/RF Probe Insulation Resistance | >100 GΩ |
| Microwave Probe Frequency Range | DC to 67 GHz |
| Optical Fiber Probe Compatibility | Yes (for electro-optic measurements) |
| Landing Area | 25.4 mm diameter circle |
| Vibration Level | <2 µm RMS |
| Thermal Stability | ±25 mK (<10 K), ±10 mK (11–350 K), ±50 mK (351–675 K) |
| Total Cool-down Time | 6.25 h (including 0.5 h pump-down, 3.5 h cooling, 2.25 h warm-up) |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Origin Category | Imported |
| Model | CRX-EM-HF |
| Price | Upon Request |
| Temperature Range | 8 K to 400 K |
| Magnetic Field | ±0.6 T (horizontal, in-plane) |
| Max Sample Diameter | 25.4 mm (1 inch) |
| Vacuum Base Pressure | <1 × 10⁻⁵ Torr (at base temperature) |
| Probe Arms | Up to 4 |
| Sample Rotation | 360° optional |
| Probe Positioning Accuracy | <5 µm over full field sweep |
| DC/RF Insulation | >100 GΩ |
| Microwave Frequency Range | DC to 67 GHz |
| Optical Access | Fiber-coupled electro-optic probing supported |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CRX-VF |
| Pricing | Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | Custom |
| Pricing | Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | EMPX-H2 |
| Temperature Range | 3.2 K to 400 K |
| Magnetic Field | ±0.6 T (horizontal, in-plane) |
| Maximum Sample Diameter | 25.4 mm (1") |
| Magnetic Uniformity | 0.6% over Ø10 mm, 2.6% over Ø25 mm |
| Probe Position Stability | <5 µm across full field sweep |
| Vacuum Base Pressure | <1 × 10⁻⁵ Torr |
| Cooling Method | Continuous-flow cryogen (liquid He or N₂) |
| Sample Rotation | Optional 360° (PS-360-EMPX) |
| Probe Arms | Up to 4 |
| Microwave Frequency Support | DC–67 GHz |
| Electrical Isolation | >100 GΩ |
| Optical Integration | Fiber-coupled electro-optic measurement capability |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | FWPX |
| Pricing | Upon Request |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Model | PS-100 |
| Temperature Range | 4.2 K to 475 K (standard), down to 3.2 K with PS-LT option |
| Sample Diameter | up to 32 mm (1.25 in) |
| Vacuum Base Pressure | <1 × 10⁻⁵ Torr |
| Vibration | <300 nm (standard), <30 nm with PS-PVIS option |
| Probe Arms | up to 4 |
| Cooling Method | Continuous-flow liquid helium or liquid nitrogen |
| Thermal Stability | ±15 mK typical at 4.4–100 K (liquid helium) |
| Electrical Isolation | >100 GΩ |
| RF/Microwave Capability | DC–67 GHz (with optional microwave probes) |
| Optical Access | Fiber-optic probe compatibility for electro-optical measurements |
| Drop-in Area | 25.4 mm diameter circular zone |
| Thermal Sinking | Probe arms actively cooled to <35 K at base temperature |
| Control System | Compatible with Lake Shore Model 336 Temperature Controller |
| Brand | Lake Shore |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | TTPX |
| Pricing | Upon Request |
| Brand | MicroXact |
|---|---|
| Model | MPS-C-300 |
| Category | RF Probe Station |
| Wafer Size Capacity | Up to 200 mm (standard 10–150 mm) |
| Magnetic Field Range | ±6 kOe (±0.6 T) in 3D vector configuration |
| Field Directional Accuracy | ±1.0° |
| Field Uniformity | ±2% over 10 mm diameter |
| Field Stability | <0.1% over 24 h |
| Minimum Field Resolution | 200 mG |
| Frequency Bandwidth | DC to ~67 GHz |
| Motion Range (X-Y) | 100 mm × 100 mm |
| Chuck Type | Isolated / Grounded / Coaxial configurable |
| Control Software | LabVIEW-based, open-source, modular API |
| Brand | MPI |
|---|---|
| Origin | Taiwan |
| Model | TS150 & TS200 & TS300 |
| Probe Station Type | Manual RF Probe Station |
| Wafer Compatibility | 150 mm (6″), 200 mm (8″), 300 mm (12″) |
| Platen Lift Range | 0–300 µm / 3 mm (3-stage) |
| Positioning Repeatability | ±1 µm |
| XY-θ Motion Stage | 25 × 25 mm with micrometer adjustment |
| Z-Axis Fine Adjustment | 25 mm travel with 1 mm engraved scale |
| RF MicroPositioner Capacity | up to 4 four-port RF probes or 10 DC probes |
| Thermal Chuck Compatibility | ERS-series temperature-controlled chucks (–60 °C to +300 °C) |
| Optical Options | MPI SZ10 stereo zoom, MZ12 monocular zoom, 90° tilt standard |
| Vibration Isolation | Integrated damping base |
| EMI Shielding | Optional light-tight, EMI-shielded enclosure |