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| Brand | ZKCY |
|---|---|
| Origin | Beijing, China |
| Model | SC600T |
| Vacuum Chamber Dimensions | 170(L)×150(H)×163.5(D) mm |
| External Dimensions | 278(L)×494(H)×467(D) mm |
| Ultimate Vacuum | ≤5×10⁻³ Pa |
| Main Pump | 90 L/s Turbo-Molecular Pump + Rotary Vane Pump (dry pump optional) |
| Sputtering Target | Φ50 mm, thickness 0.1–2 mm |
| Sputtering Current | 1–200 mA (1 mA step) |
| Coating Time | 1–9999 s (1 s step) |
| Evaporation Source | High-Purity Carbon Fiber |
| Evaporation Modes | Continuous & Pulsed |
| Sample Stage | Φ80 mm, motorized tilt, lift, and rotation |
| Pre-Sputtering | Fully Automated |
| Real-Time Monitoring | Vacuum Pressure & Current Curve Display |
| Power Supply | AC 220 V / 50 Hz, <1000 W |
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