Acoulab
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| Brand | Acoulab |
|---|---|
| Origin | South Korea |
| Model | SAM-CYGNUS |
| Instrument Type | Digital |
| Wafer Compatibility | 4" and 6" |
| Ultrasonic Transducer Frequency Range | 1–500 MHz |
| A/D Sampling Rate | 2 GHz |
| Bandwidth | 1 GHz |
| XY Repeatability | ±2 µm |
| Z-Scan Range | 70 mm |
| Z-Resolution | 2.5 µm |
| Scan Modes | A-scan, C-scan, T-scan, X-scan (multi-layer C-scan) |
| Integrated Systems | Wafer Map module, BCR reader, Pre-aligner, Spin Coater, Water Jet Scanning, Safety Interlock & Alarm System |
| Motor Drive | High-precision linear servo motors |
| Acoustic Coupling | Water jet coupling |
| Brand | Acoulab |
|---|---|
| Origin | South Korea |
| Model | SAM-DENEB |
| Instrument Type | Digital Scanning Acoustic Microscope |
| Scan Range (X-Y) | 350 mm × 350 mm |
| Spatial Resolution (X-Y) | 0.5 µm |
| Ultrasonic Transducer Frequency Range | 1–500 MHz |
| A/D Sampling Rate | 2 GHz |
| Analog Bandwidth | 1 GHz |
| X-Y Scan Speed | 1000 mm/s |
| X-Y Repeatability | ±0.5 µm |
| Z-Axis Scan Range | 70 mm |
| Z-Axis Resolution | 2.5 µm |
| Brand | Acoulab |
|---|---|
| Origin | South Korea |
| Model | SAM-SPICA |
| Instrument Type | Digital Scanning Acoustic Microscope |
| Transducer Frequency Range | 1–500 MHz |
| A/D Sampling Rate | 500 MHz |
| Signal Bandwidth | 1 GHz |
| XY Scan Speed | 1000 mm/s |
| XY Repeatability | ±0.5 µm |
| Scan Modes | A-scan, B-scan, C-scan, X-scan (multi-layer C-scan) |
| Sample Handling | Motorized tilt/rotation/translation stage with liquid coupling tank compatibility |