ADT
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| Brand | ADT |
|---|---|
| Origin | Shanghai, China |
| Model | 6110 |
| Spindle Power | 2.2 kW |
| Max Spindle Speed | 60,000 rpm |
| Spindle Torque | 0.42 N·m |
| θ-Axis Drive | Direct-Drive (DD) Motor |
| Machine Width | 490 mm |
| Control Interface | 17-inch LCD Touchscreen GUI |
| Standard Features | Auto-Calibration, Auto-Cutting, Blade-Trace Inspection |
| Optional Features | Fragment Shape Recognition, One-Touch Position Verification |
| Sample Compatibility | Si, SiC, GaAs, Glass, Ceramic, Solar Wafers |
| Brand | ADT |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Authorized Distributor |
| Region of Manufacture | Domestic (China) |
| Model | 7234 |
| Pricing | Upon Request |
| Brand | ADT |
|---|---|
| Origin | Shanghai, China |
| Model | 7920 |
| Blade Diameter Range | 2"–3" |
| Maximum Spindle Speed | 60,000 rpm |
| Spindle Power | 1.2 kW per axis |
| Workpiece Capacity | Ø12" or 12" × 10" |
| X-Axis | Pneumatic Linear Slide |
| Y-Axis Resolution | 0.1 µm |
| Z1/Z2-Axis Resolution | 0.2 µm |
| Z1/Z2 Travel | 30 mm |
| Z1/Z2 Repeatability | ±1.0 µm |
| θ-Axis Repeatability | ±4 arc-sec |
| θ-Axis Travel | 350° |
| Cumulative Positioning Accuracy | ±1.5 µm |
| Step Positioning Accuracy | ±1.0 µm |
| Electrical Supply | 200–240 VAC, 50–60 Hz, Single-Phase |
| Dimensions (W×D×H) | 875 × 975 × 1450 mm |
| Weight | 900 kg |
| Brand | ADT |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Authorized Distributor |
| Regional Classification | Domestic (China) |
| Model | 8230 |
| Pricing | Available Upon Request |
| Brand | ADT |
|---|---|
| Model | WCS-977 |
| Type | Wet Process Wafer Cleaning Equipment |
| Chamber Capacity | 6-inch and 8-inch wafers |
| Dimensions (W×D×H) | 410 × 625 × 980 mm |
| Power Supply | 230 VAC, 50 Hz, 5 A |
| CDA Pressure | 0.5–0.6 MPa |
| CDA Consumption | ≤3 m³/h |
| DI Water Pressure | 0.2–0.3 MPa |
| DI Water Consumption | ≤100 L/h |
| Rotation Speed Range | 500–3000 rpm |
| Vacuum Source | Integrated vacuum generator |
| CO₂ Injection | Membrane contactor-based ultra-pure CO₂ dissolution into DI water |
| Control System | Programmable Logic Controller (PLC) with recipe storage and real-time process monitoring |
| Safety | Interlocked access door, status indicator lights, emergency stop circuit |
| Construction | Internal 316L stainless steel chamber, exterior powder-coated steel housing |
| Compliance | Designed for Class 100 cleanroom integration, compatible with SEMI S2/S8 safety guidelines |