ALIO Industries
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| Brand | ALIO Industries |
|---|---|
| Origin | USA |
| Model | Precision XY/Z/θ Air Bearing Translation Stage Series |
| Travel Range | X/Y up to 3+ m (custom), Z up to 200+ mm |
| Repeatability | ±100 nm bidirectional |
| Flatness | ≤1 µm over 300 mm |
| Nanopositioning Accuracy | ≤±450 nm |
| Drive | Linear Motor with Direct Drive Architecture |
| Bearing Type | Aerostatic Air Bearings |
| Compliance | ISO 230-2, ISO 10360-2, NIST-traceable calibration documentation available |
| Software Interface | EtherCAT, RS-232, USB, and analog I/O support for third-party motion controllers |