Alpha Plasma
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| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL8 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Volume | 18 L (250 × 250 × 290 mm, aluminum) |
| External Dimensions | 530 × 600 × 550 mm |
| Gas Delivery | 1 standard mass flow-controlled line (MKS digital controller) |
| Vacuum Door | Hinged with UV- and microwave-shielded viewport |
| Control Interface | 7" GUI touchscreen, Windows CE OS |
| Optional | Dry pump system, tri-color status tower light, up to 4 gas lines, ECR-enhanced plasma source, motorized rotating stage (Ø200 mm, variable speed) |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL8 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Volume | 18 L (250 × 250 × 290 mm, aluminum) |
| External Dimensions | 530 × 600 × 550 mm |
| Gas Delivery | 1 standard mass flow-controlled line (MKS digital controller) |
| Vacuum Door | Hinged with UV- and microwave-shielded viewport |
| Control Interface | 7" GUI touchscreen, Windows CE OS |
| Optional | Dry pump system, tri-color status tower light, up to 4 gas lines, motorized φ200 mm rotating stage, ECR enhancement module |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL76 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber Volume | 76 L (400 × 400 × 490 mm, aluminum) |
| External Dimensions | 1050 × 800 × 2020 mm (incl. signal tower) |
| Gas Inlets | 3 standard mass flow-controlled lines (MKS digital controllers) |
| Door Type | Dual-mode hinged/drawer with UV- and microwave-shielded viewport |
| Control Interface | 10.4" resistive touchscreen, Windows CE OS |
| Optional | Dry pump package, tri-color signal tower, up to 4 gas lines, φ350 mm motorized rotating stage, ECR enhancement module |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL76 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber Volume | 76 L (400 × 400 × 490 mm, aluminum) |
| External Dimensions | 1050 × 800 × 2020 mm (incl. tri-color status tower) |
| Gas Inlets | 3 standard mass flow-controlled lines (MKS digital controllers) |
| Optional | 4th gas line, ECR enhancement, φ350 mm adjustable-speed rotating stage, dry pump package, UV/microwave-shielded viewport, hinged + drawer-type vacuum door |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150, Q235, Q240, Q310 |
| Type | Microwave-excited Capacitively Coupled Plasma (CCP) Resist Stripping System |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & Back-End-of-Line (BEOL) Process Cleaning |
| Compliance | CE-marked, SEMI S2-0216 Certified, ISO 9001:2015 Manufactured |
| Footprint Options | Benchtop (Q150), Semi-automated Loadlock (Q235/Q240), Full-automated Cluster Tool Integration Capable (Q310) |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150, Q235, Q240, Q310 |
| Type | Microwave-excited Capacitively Coupled Plasma (CCP) Resist Stripping System |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & Back-End-of-Line (BEOL) Processing, MEMS Fabrication, Advanced Packaging |
| Compliance | CE Marked, SEMI S2-0216 Certified, ISO 9001:2015 Quality Management System |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150 |
| Instrument Type | Imported Microwave Plasma Surface Treater |
| Category | Plasma-Based Sample Preparation Equipment |
| Distribution Status | Authorized Distributor (Non-Manufacturer) |
| Import Classification | Imported Equipment |
| Pricing | Available Upon Request |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235 (Q-Series) |
| Type | Benchtop Microwave Plasma Asher/Stripper |
| Application Domain | Semiconductor Fabrication, MEMS Processing, R&D Cleanroom Environments |
| Compliance | CE-marked, ISO 14644-1 Class 5 compatible installation, ESD-safe chamber design |
| Power Supply | 230 V AC, 50/60 Hz, 16 A |
| Microwave Frequency | 2.45 GHz |
| Max Chamber Volume | 12 L |
| Process Gas Compatibility | O₂, CF₄, SF₆, Ar/O₂ mixtures |
| Vacuum System | Integrated dry scroll pump (base pressure < 5 × 10⁻² mbar) |
| RF/Plasma Monitoring | Real-time forward/reflected power metering with auto-tuning impedance matching network |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235/Q240 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Material | Quartz |
| Chamber Dimensions | Ø235 mm × 260 mm L |
| Maximum Wafer Size | 200 mm (8") |
| Footprint | 460 mm × 590 mm × 550 mm H |
| Gas Inlets | Standard 2-channel with digital MKS mass flow controllers |
| Chamber Door | Drawer-type with UV- and microwave-shielded viewport |
| Human-Machine Interface | 7" resistive touchscreen GUI running Windows CE |
| Optional | Dry pump package (with foreline trap & vibration isolation), Faraday cage, quartz boat, tri-color status beacon, up to 4 gas lines, export-grade crating and freight logistics |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235/Q240 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber | Quartz, Ø235 mm × 260 mm L |
| Max Wafer Size | 200 mm (8″) |
| Dimensions (L×W×H) | 460 × 590 × 550 mm |
| Gas Inlets | 2 standard + optional up to 4 |
| Mass Flow Controllers | Digital MKS type |
| Chamber Door | Drawer-type with UV/microwave-shielded viewport |
| Substrate Holder | Temperature-controlled wafer chuck |
| Control Interface | 7″ GUI touchscreen, Windows CE OS |
| Optional | Dry vacuum pump system, Faraday cage, quartz boat, tri-color status beacon |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q240 |
| Plasma Source | 2.45 GHz, 1200 W |
| Chamber | Quartz, Ø240 mm × 460 mm (21 L), accommodates up to 200 mm wafers |
| Dimensions (L×W×H) | 760 × 775 × 775 mm |
| Gas Lines | 3 standard + optional 4th line |
| Mass Flow Controllers | Digital MKS |
| Vacuum Door | Drawer-type with UV/microwave-shielded viewport |
| Wafer Chuck | Temperature-controlled |
| HMI | 10.4" touchscreen, Windows CE OS |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q240 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber | Quartz, Ø240 mm × 460 mm (21 L), max. 200 mm wafer capacity |
| Dimensions (L×W×H) | 760 × 775 × 775 mm |
| Gas Control | 3-channel digital MKS mass flow controllers |
| Vacuum Door | Drawer-type with UV/microwave-shielded viewport |
| Human-Machine Interface | 10.4" touchscreen GUI, Windows CE OS |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235 (Q-Series) |
| Type | Benchtop Microwave Plasma Asher/Stripper |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & MEMS Fabrication |
| Compliance | CE-marked, ISO 9001–certified manufacturing, compatible with cleanroom Class 100/ISO 5 environments |