Angstrom
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| Brand | Angstrom |
|---|---|
| Model | customized-23 |
| Chamber Diameter | 200 mm (quartz) |
| Maximum Substrate Diameter | 150 mm |
| Furnace | Triple-zone resistive heating |
| Uniform Temperature Zone | 150 mm |
| Max Temperature | 1000 °C |
| Pressure Control Range | 50–500 mTorr (downstream, VAT throttle butterfly valve) |
| Vacuum Pump | Ebara ESA25-D dry pump (8 CFM) |
| Application Domain | Semiconductor thin-film fabrication, MEMS, optoelectronics, graphene & CNT research |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Model | ELS5000 |
| Energy Resolution | 0.7 meV |
| Angular Resolution | 0.08° (momentum resolution ≈ 0.002 Å⁻¹ at 7.4 eV incident energy) |
| Optical Architecture | 4-grid tungsten electron optics, UHV-compatible, no polymer-coated or fiberglass-insulated wiring |
| Field of View | 103° |
| Electron Gun Diameter | 1.59 cm |
| Retractable Optics | Standard 2-inch to optional 4-inch retraction |
| Compatibility | AES-compatible, ARPES-integrated capable |
| Detection Modes | pA–nA current range with integrated lock-in amplifier and MCP detector |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported Instrument |
| Model | ELS5000 |
| Pricing | Upon Request |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | ELS5000 |
| Pricing | Upon Request |
| Brand | Angstrom |
|---|---|
| Origin | Canada |
| Model | EvoVac |
| Chamber Dimensions | 500 mm × 700 mm substrate stage |
| Vacuum capability | UHV-compatible (≤1×10⁻⁹ Torr base pressure) |
| Source options | RF sputtering, DC sputtering, Pulsed DC sputtering, HIPIMS, reactive sputtering |
| Cathode configurations | circular, linear, and cylindrical |
| Application domain | microelectronics |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Model | Angstrom-dep Powder ALD |
| Base Heating Range | 25–450 °C (optional up to 650 °C) |
| Substrate Uniformity | <1% (Al₂O₃ on 4″ wafer) |
| Precursor Lines | 4 / 6 / 8 configurable |
| Precursor Bottle Capacity & Temp | 100 mL, ambient to 250 °C |
| ALD Valves | Swagelok high-temp valves (150 / 200 / 250 °C options) |
| Carrier Gases | N₂ or Ar |
| Vacuum System | Alcatel mechanical pump (optional Pfeiffer turbomolecular or dry scroll pump) |
| Optional Modules | Load-lock chamber, glovebox integration, cryo-trap, ozone generator, plasma source, in-situ monitoring (QCM, ellipsometry, RGA), exhaust abatement |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | LEED 800 |
| Pricing | Upon Request |
| Brand | Angstrom |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | LEED 800 |
| Pricing | Available Upon Request |