Anric
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| Brand | Anric |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT |
| Substrate Size | 4–6 inch |
| Process Temperature Range | RT to 350 °C |
| Precursor Channels | 5 |
| Weight | 50–70 kg |
| Dimensions (W × H × D) | 50 cm × 75 cm × 75 cm |
| Thickness Uniformity | ±1% |
| Brand | Anric |
|---|---|
| Model | AT |
| Type | Desktop Atomic Layer Deposition (ALD) System |
| Origin | USA |
| Chamber Temperature Range | RT–350 °C |
| Precursor Source Temperature Range | RT–150 °C |
| Process Pressure Range | 0.1–1.5 Torr |
| Maximum Precursor Sources | 5 |
| Substrate Compatibility | Up to 4″ wafers (expandable to 6″) |
| Cycle Time | 6–10 cycles per minute |
| Control Interface | Touchscreen PLC |
| Chamber Architecture | Compact, R&D-Optimized |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | AT |
| Pricing | Upon Request |
| Ozone Output Range | 12% w/w at 250 sccm, 6% w/w at 2500 sccm |
| Oxygen Flow Control | 25–2500 sccm (panel-integrated mass flow control) |
| O₂ Regulator Range | 3–29 psi |
| Corona Cell | Aluminum electrode with ceramic dielectric |
| Operating Frequency | 5–30 kHz |
| Input Power | 110–220 VAC, 50/60 Hz, 2 A |
| Dimensions | 10.3" W × 7.5" H × 20" D |
| Weight | 15 lbs |
| Cooling | Forced-air (integrated high-speed fan) |
| Control Interface | 3–24 VDC analog input for automated ozone modulation |
| Manual Override | Front-panel O₃/O₂ toggle switch + rear-panel mechanical override switch |
| Output Port | 1/4" Swagelok compression fitting (ozone delivery) |
| Inlet Port | 1/4" Swagelok compression fitting (O₂ supply, ≥90% purity recommended) |
| Exhaust Port | 1/4" Swagelok compression fitting (0.5 SCFH O₂-rated venting capacity) |
| Optional Safety Monitor | Real-time ambient O₃ detection (0–5000 ppb), LED status indicators (green/yellow/red), temperature & humidity sensing, LCD display, wall-mount bracket, dry-contact relay output for interlocked shutdown |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT200M |
| Pricing | Upon Request |
| Footprint | 14 in × 15 in × 14.5 in (35.5 cm × 38.1 cm × 36.5 cm) |
| Chamber Volume | ~15 in³ (38.1 cm³) |
| Substrate Capacity | Up to four 2-inch wafers (square or circular) |
| Precursor Ports | Standard 2-port (1 precursor + 1 reactant) |
| Precursor Temp Range | RT to 180 °C ±2 °C (heated jacket) |
| Chamber Temp Range | RT to 300 °C ±1 °C (optional chuck heating to 450 °C+) |
| Plasma Source Option | 13.56 MHz, 80 W hollow cathode plasma (AT200M Plus) |
| Control Interface | 5-inch PLC-driven touchscreen HMI (Windows Ethernet remote access enabled) |
| Materials | Semiconductor-grade stainless steel chamber with metal-sealed fittings, heated manifolds, ultra-fast ALD valves with integrated inert gas purge (UHP N₂ >99.9995%) |
| Compliance | Cleanroom-compatible design |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT410 |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT610 |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT650/850P |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT650/850T |
| Pricing | Upon Request |
| Brand | ANRIC |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT810 |
| Pricing | Upon Request |