Atotech
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| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 |
| Flow Principle | Thermal Mass Flow Measurement |
| Flow Ranges | 0–5/10/20/50/100/200/300/500 SCCM |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Flow Rangeability | 2–100% FS |
| Operating Temperature | −20 to +65 °C |
| Humidity | 0–98% RH (non-condensing) |
| Max Working Pressure | 3 MPa |
| Response Time | <1 s |
| Supply Voltage | 15–40 VDC |
| Power Consumption | <5 W |
| Communication Interfaces | RS232, RS485, CAN, 0–5 VDC analog output, 4–20 mA analog output |
| Gas Path Materials | SUS304 / SUS316L |
| Seals | FKM (Viton®) |
| Connection Types | Push-to-connect, Quick-fit, Swagelok®-style ferrule, VCR |
| Electrical Interface | DB9 male |
| Display & Control | Integrated LCD with membrane keypad |
| Built-in Sensors | Temperature and pressure compensation sensors |
| Gas Compatibility | Multi-gas (N₂, O₂, Ar, He, CO₂, H₂, Air, N₂O, CH₄, etc., with gas-specific calibration) |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | MFC330 |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min recommended for optimal stability |
| Valve Type | Normally Closed |
| Gas Compatibility | Clean, dry gases |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | Atotech MFC330 Micro-Flow Gas Mass Flow Controller |
| Flow Range Options | 0–2, 10, 20, 50, 100, 300, 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min optimal |
| Valve Type | Normally Closed |
| Brand | Atotech |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | MFC330 |
| Product Category | Thermal Mass Flow Controller |
| Full Scale Ranges (N₂ equivalent) | 0–2, 10, 20, 50, 100, 300, 500 sccm |
| Measurement Range | 0.5% FS (1:200) |
| Control Range | 1–100% FS (1:100) |
| Accuracy (Standard) | ±1% FS |
| Accuracy (High Performance) | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Settling Time (Control Mode) | <3 s |
| Warm-up Time (T95) | 5 min |
| Optimal Stability | 30 min |
| Valve Function | Normally Closed |
| Leak Integrity | ≤1×10⁻⁸ Pa·m³/s (He) |
| Max Operating Pressure | 3 MPa (30 bar) |
| Operating Differential Pressure | 0–1 MPa |
| Operating Temperature Range | −20 to +65 °C (ambient & gas) |
| Relative Humidity | 0–98% RH (non-condensing) |
| Process Connections | Push-in, Push-on, Compression, VCR (optional) |
| Wetted Materials | FKM elastomers, 304/316 stainless steel |
| Housing IP Rating | IP40 |
| Mounting Orientation | Horizontal only (factory calibrated) |
| Mounting Holes | M4 × 5 mm |
| Weight | 0.96 kg |
| Electrical Interface | DB9 male |
| Analog I/O | 0–5 VDC, 4–20 mA (configurable) |
| Input Impedance | >10 MΩ |
| Output Impedance | <1 kΩ |
| Analog Data Update Rate | 200 Hz |
| Digital Interface | Modbus RTU (RS232/RS485), CAN |
| Baud Rates | 9600–115200 bps (user-selectable) |
| Power Supply | 15–40 VDC, <200 mA |
| Display Update Rate | 50 Hz |
| Analog Signal Accuracy | ±0.05% FS |
| STP Reference | 20 °C, 1 atm |
| Gas Selection | Software-configurable for >98 gas types |
| Software | Aitoly Stepwise Flow Control Suite |