Atotech (AITOLY)
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| Brand | Atotech (AITOLY) |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300_RS485 |
| Type | Thermal Mass Flow Controller |
| Power Supply | 15–40 VDC |
| Communication Interfaces | RS232 / RS422 / RS485 / CAN (galvanically isolated) |
| Accuracy | ±0.5% FS |
| Linearity | ±1% FS |
| Repeatability | ±0.5% FS |
| Response Time | <1 s |
| Full-Scale Flow Ranges | 0–5, 10, 50, 100, 200, 300, 500 sccm |
| Display Resolution | 0.1 sccm |
| Operating Pressure Differential | 0–1 MPa |
| Burst Pressure | 1.1 MPa |
| Ambient Temperature Range | 0–65 °C |
| Gas Compatibility | Air, He, Ar, N₂, CO₂ |
| Electrical Interface | DB9 connector |
| Gas Port Options | M8×1 thread, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Zero Drift | Extremely low |
| Moving Parts | None |