ECOPIA
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| Brand | ECOPIA |
|---|---|
| Origin | South Korea |
| Model | EPS-300 / EPS-500 / EPS-1000 |
| Type | Manual probe station |
| Category | Temperature-controlled probe station |
| Compliance | Designed for ISO/IEC 17025-compliant lab environments, compatible with ASTM F1768 and SEMI S2/S8 safety standards |
| Software Interface | Analog signal output (BNC), optional digital I/O for external controller integration |
| Stage Travel | X/Y fine adjustment via micrometer drives (10 µm resolution), Z-axis manual lift with locking mechanism |
| Maximum Wafer Size | EPS-300: up to 4″ |
| EPS-500 | up to 6″ |
| EPS-1000 | up to 8″ |
| Thermal Options | Optional heated chuck (−40 °C to +200 °C) available on EPS-500 and EPS-1000 |
| Vacuum Compatibility | Standard vacuum-compatible baseplate (10⁻³ mbar) for glovebox or controlled-atmosphere integration |
| Brand | ECOPIA |
|---|---|
| Origin | South Korea |
| Model | HMS-3000 / HMS-5000 |
| Current Source Range | 1 nA – 20 mA |
| Resistivity Range | 10⁻⁵ – 10⁷ Ω·cm |
| Carrier Concentration Range | 1×10⁷ – 1×10²¹ cm⁻³ |
| Mobility Range | 1 – 1×10⁷ cm²/V·s |
| Magnetic Field Options | 0.37 T, 0.55 T, 1 T fixed |
| Sample Temperature | Ambient or 77 K (liquid nitrogen) |
| Sample Size Compatibility | 5×5 mm to 20×20 mm (optional 30 mm or 2-inch wafers) |
| Software Platform | Windows XP–10 compatible |
| Compliance | CE certified (July 2004) |
| Brand | ECOPIA |
|---|---|
| Origin | South Korea |
| Model | RTP-1300 |
| Sample Size | 150 mm (6-inch compatible) |
| Max Temperature | 1200 °C |
| Max Ramp Rate | 150 K/s |
| Cool-down Rate | 200 K/s |
| Temp Accuracy | ±1% of setpoint |
| Temp Uniformity | ±1.5% across wafer |
| Atmosphere Options | Vacuum (10⁻³ Torr, optional mechanical pump), N₂, O₂, H₂, Ar, or ambient air |
| Heating Source | 12 or 18 halogen infrared lamps (1.2 kW each) |
| Control Software | Integrated RTP-specific GUI with recipe management, real-time profiling, and data logging |
| Power Supply | 220 V AC, single- or three-phase |
| Dimensions (W×D×H) | 500 × 400 × 500 mm |
| Net Weight | 60 kg |