Filmetrics
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| Brand | Filmetrics |
|---|---|
| Origin | USA |
| Model(s) | F50, F40 |
| Optical Measurement Principle | Spectral Reflectance Analysis (Visible–NIR) |
| Supported Substrates | Si, glass, Al, GaAs, stainless steel, polycarbonate, polymer films |
| Film Types | Transparent, semi-transparent, absorbing thin films (e.g., SiO₂, SiNₓ, DLC, photoresist, a-Si, poly-Si) |
| Interface | USB 2.0 |
| Software Platform | Filmetrics F20 Suite (Windows-compatible) |
| Preloaded Material Library | >100 optical constants (n, k) |
| Multilayer Capability | Yes, up to 10 layers (with user-defined or fitted optical models) |
| Minimum Measurable Thickness | ~1 nm (dependent on material dispersion and substrate reflectivity) |
| Maximum Measurable Thickness | ~50 µm (for low-absorption dielectrics on reflective substrates) |
| Measurement Speed | <2 seconds per spot |
| Calibration | Factory-calibrated |
| Brand | Filmetrics |
|---|---|
| Origin | USA |
| Model | R50 |
| Measurement Principle | Contact Four-Point Probe (4PP) & Non-Contact Eddy Current (EC) |
| Max Sample Diameter | 300 mm |
| Max Mapping Area | 200 mm × 200 mm |
| XY Stage Travel Options | 100 mm × 100 mm or 200 mm × 200 mm (R50-200) |
| Z-Travel | 100 mm |
| Tilt Stage Range | ±5° |
| Mapping Speed | Up to 1 point/sec |
| Software | RsMapper™ with Pattern Generator, GLP-Compliant Data Logging |