INFICON
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| Brand | INFICON |
|---|---|
| Origin | Germany |
| Model | CDG045D (1 Torr and 100 Torr full-scale options) |
| Vacuum Flange | KF 16 |
| Measurement Principle | Ceramic Diaphragm Capacitance |
| Pressure Range | 5 × 10⁻² Torr to 1000 Torr (full-scale selectable: 1 Torr or 100 Torr) |
| Operating Temperature | 45 °C (thermally stabilized) |
| Output Signal | 0–10 V DC, gas-independent linear analog output |
| Compliance | CE, UL 61010-1, EN 61326-1, SEMI S2/S8, RoHS |
| Brand | INFICON |
|---|---|
| Origin | Germany |
| Model | IC6 Thin Film Deposition Controller |
| Measurement Principle | Quartz Crystal Microbalance (QCM) with ModeLock Frequency Detection |
| Resolution | 0.00433 Å/s @ 100 ms sampling |
| Frequency Stability | ±0.0035 Hz |
| Max Simultaneous Sources | 6 |
| Layer Capacity | 50 processes × 200 layers = 10,000 total layers |
| Sensor Inputs | Up to 8 QCM sensors (averaged or independent) |
| Display | Color TFT LCD |
| I/O | 28 digital inputs, 24 relay outputs, 14 TTL outputs, 6 standard DACs + 6 optional DACs |
| Logic Engine | 100 programmable logic statements |
| Data Storage | Internal logging, screenshot capture, recipe storage |
| Communication | RS-232/485, optional Ethernet |
| Compliance | RoHS-compliant |
| Software Support | IC6 Configuration Editor (LabVIEW®-based, Windows®) |
| Brand | INFICON |
|---|---|
| Origin | Germany |
| Model | MPG 400 |
| Measurement Principle | Pirani + Cold Cathode (Inverted Magnetron) |
| Range | 5 × 10⁻⁹ mbar to 1013 mbar (atmospheric pressure) |
| Vacuum Port | KF 25 (ISO-KF), CF 40 (ConFlat) |
| Output Signal | Logarithmic analog (0–10 V or 4–20 mA, configurable) |
| Sealing Options | FPM (Viton®) or metal (Cu gasket) feedthroughs |
| LED Indicator | High-voltage status indicator |