k-Space Associates

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kSA MOS In-Situ Thin Film Stress Measurement System

2026-01-20 Process Measurement & Detection Equipment, Semiconductor Instruments, Thin Film Stress Tester

Brand	k-Space Associates
Origin	USA
Model	kSA MOS
Stress Measurement Range	0.32 MPa – 7.8 GPa
Measurement Technology	Multi-Beam Optical Sensor (MOS)
Operating Temperature	Ambient to system process temperature (vacuum chamber compatible)
Compliance	Designed for UHV/MBE/MOCVD integration, vacuum-rated optical interface, ISO 9001-manufactured instrumentation

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