Kaufman & Robinson (KRi)
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| Brand | Kaufman & Robinson (KRi) |
|---|---|
| Origin | USA |
| Model | eH Series |
| Type | Ungridded End-Hall Ion Source |
| Operating Principle | Magnetron-sustained plasma discharge with axial magnetic field and radial electric field |
| Typical Ion Energy Range | 20–150 eV |
| Max. Beam Current | Up to 2.5 A (dependent on gas, pressure, and geometry) |
| Gas Compatibility | Ar, Xe, O₂, N₂, CF₄, and other process gases |
| Cooling | Water-cooled anode and cathode assembly |
| Mounting Flange | Conflat (CF) 63 or CF 100 standard |
| Compliance | Designed for integration into UHV and HV vacuum systems per ISO 3529-2, ASTM F1875, and SEMI S2/S8 safety guidelines |
| Brand | Kaufman & Robinson (KRI) |
|---|---|
| Origin | USA |
| Model | RFICP Series |
| Discharge Type | RF Inductive Coupling |
| Beam Current Range | 100–1500 mA |
| Beam Energy Range | 100–1200 V |
| Grid Aperture Diameter | 4–30 cm |
| Operating Gases | Ar, Kr, Xe, O₂, N₂, H₂ |
| Chamber Pressure | < 0.5 mTorr |
| System Components | Ion Source Body, RF Power Supply, Neutralizer (LFN-2000), Automated Control Unit |
| Compliance | Designed for integration into UHV and HV vacuum systems per ASTM F1716 and ISO 20000-1 standards |