KJG (Hefei Kejing Materials Technology Co., Ltd.)
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| Brand | KJG (Hefei Kejing Materials Technology Co., Ltd.) |
|---|---|
| Origin | Anhui, China |
| Model | OTF-1200X-II-4CV-PE-SL-UL |
| Furnace Type | Horizontal Tube Furnace |
| Maximum Operating Temperature | 1100 °C |
| Plasma Source Power | 5–500 W ±1% |
| RF Frequency | 13.56 MHz ±0.005% |
| Matching | Automatic RF Matching Network |
| Vacuum Level | ≤1×10⁻² Torr (with optional corrosion-resistant digital vacuum gauge: 3.8×10⁻⁵–1125 Torr) |
| Gas Delivery | Four-channel Mass Flow Controller (MFC) system (0–100 sccm, 0–200 sccm ×2, 0–500 sccm) |
| MFC Accuracy | ±0.02% FS |
| Tube Dimensions (standard) | 80 mm OD × 71.5 mm ID × 1800 mm L |
| Dual Heating Zones | Independent PID control, max ΔT = 200 °C |
| Cooling Method | Forced air cooling for plasma source |
| Electrical Supply | AC 208–240 V, 50/60 Hz |
| Compliance | CE certified |
| Warranty | 12 months (excludes consumables: quartz tube, high-temp O-rings, heating elements) |