Klocke Nanotechnik
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| Brand | Klocke Nanotechnik |
|---|---|
| Origin | Germany |
| Product Type | Contact-Mode 3D Profilometer / Surface Topography & Roughness Measuring System |
| Measurement Range (X/Y/Z) | 10–50 mm / 10–50 mm / 10–20 mm |
| Extended XY Travel | 100 × 100 mm² or 350 × 350 mm² |
| Motion Resolution | 1 nm |
| Tip Resolution | 0.5 nm |
| Probe Types | Metallic wire tip (radius < 100 nm), hook-type wire tip (radius < 100 nm), spherical tip (Ø 0.12–0.3 mm), diamond tip (for indentation) |
| Sensor Configuration | Dual-axis (horizontal & vertical) capacitive displacement sensors |
| Software Features | Automated tip calibration & approach, 2D/3D visualization, quantitative surface analysis, optional sequence generator for automated measurement routines |
| Brand | Klocke Nanotechnik |
|---|---|
| Origin | Germany |
| Model | Micro Production |
| Type | Precision Nanomanipulation & 3D Coordinate Metrology Platform |
| Application Domain | Semiconductor Process Development, In-situ SEM/TEM Nanomanipulation, MEMS/NEMS Characterization, Nanofabrication Integration |
| Compliance | Designed for ISO 14644-1 Class 5 cleanroom environments |
| Positioning Resolution | Sub-nanometer (≤1 nm) in X/Y/Z |
| Force Sensing Capability | Integrated piezoresistive microforce feedback (mN range) |
| Vacuum Compatibility | Fully compatible with high-vacuum SEM/TEM chambers (10⁻⁷ mbar and below) |
| Interface | Standardized flange mounts (CF, KF, or custom) for JEOL, Zeiss, Thermo Fisher (FEI), Hitachi, TESCAN, and Raith systems |
| Brand | Klocke Nanotechnik |
|---|---|
| Origin | Germany |
| Type | Precision Piezo-Based Nanopositioning Platform |
| Model | Klocke Nano Positioning |
| Compliance | Designed for UHV, Cryogenic, and High-Magnetic-Field Environments |
| Max Load Capacity | 2 kg |
| Travel Range | 5–70 mm |
| Velocity | < 2 mm/s |
| Open-Loop Motion Resolution | 2 nm |
| Sensor Resolution (Closed-Loop) | < 10 nm |
| Degrees of Freedom | XYZ linear, Θ/Φ rotation, XY/Z scanning, hybrid coarse/fine modes |
| Customization | Fully configurable mechanical design, material options (Invar, titanium, ceramics), vacuum-compatible variants, integrated metrology interfaces |