Lumina
Filter
Showing all 2 results
| Brand | Lumina |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | AT Series (AT1, AT1-Auto, AT2, AT2-EFEM) |
| Pricing | Available Upon Request |
| Brand | LUMINA |
|---|---|
| Origin | USA |
| Model | AT1 |
| Type | Non-contact Profilometer / Surface Metrology System |
| Measurement Principle | Multi-modal Optical Scattering, Ellipsometry, Reflectometry, and Surface Slope Analysis |
| Sample Compatibility | Transparent (e.g., fused silica, sapphire, glass), semi-transparent (e.g., GaN, SiC), and opaque substrates (e.g., Si, GaAs, InP, metals) |
| Scan Area | Up to 300 × 300 mm |
| Wafer Handling | Supports 150 mm wafers (full-surface scan in ≤ 3 min), 50 × 50 mm samples in ≤ 30 s |
| Detection Sensitivity | Sub-nanometer vertical resolution for film thickness uniformity |
| Mechanical Architecture | Fixed-optics, non-rotating platform with high inertial damping |
| Regulatory Alignment | Designed for GLP/GMP-compliant environments |