MicroXact
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| Brand | MicroXact |
|---|---|
| Model | MPS-C-300 |
| Category | RF Probe Station |
| Wafer Size Capacity | Up to 200 mm (standard 10–150 mm) |
| Magnetic Field Range | ±6 kOe (±0.6 T) in 3D vector configuration |
| Field Directional Accuracy | ±1.0° |
| Field Uniformity | ±2% over 10 mm diameter |
| Field Stability | <0.1% over 24 h |
| Minimum Field Resolution | 200 mG |
| Frequency Bandwidth | DC to ~67 GHz |
| Motion Range (X-Y) | 100 mm × 100 mm |
| Chuck Type | Isolated / Grounded / Coaxial configurable |
| Control Software | LabVIEW-based, open-source, modular API |