MKS
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| Brand | MKS |
|---|---|
| Origin | USA |
| Model | MG6030 |
| Instrument Type | Online FTIR Spectrometer |
| Wavenumber Range | 10 ppb to 100% (gas-phase concentration) |
| Spectral Resolution | 0.5–128 cm⁻¹ |
| Scan Speed | 5 scans/sec at 0.5 cm⁻¹ |
| Detector | Liquid-nitrogen-cooled or thermoelectrically cooled MCT (HgCdTe) |
| Optical Path Length | 5.11 m |
| Purge Gas | Dry N₂ or CO₂-free air (dew point < −70 °C), flow rate 0.2 L/min |
| Pressure Sensor | MKS Baratron® capacitance manometer |
| Sample Temperature Range | Ambient to 200 °C |
| Sample Flow Rate | 0.2–10 L/min |
| Sample Pressure Range | 0.01–4 atm |
| Enclosure Material | Nickel-plated aluminum or 316 stainless steel |
| Weight | 50 kg |
| Dimensions | 445 mm (W) × 318 mm (H) × 648 mm (D) |
| Power | 110/220 VAC, 50/60 Hz, 3 A |