Rayscience
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| Brand | Rayscience |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Semiconductor Instrument |
| Model | CDE ResMap |
| Automation Level | Fully Automated |
| Probe Tip Material | Tungsten Carbide |
| Typical Probe Load Force | 100–200 g |
| Compatible Wafer Sizes | 50 mm (2″) to 150 mm (6″) |
| Measurement Mode | Four-Point Collinear Probe (Van der Pauw geometry compatible) |
| Data Acquisition Rate | Up to 4,000 data points per measurement site |
| Interface | Windows-based GUI with recipe-driven operation |
| Calibration Interval | Extended (≥12 months under GLP-compliant usage) |
| Configurable Probe Heads | Dual–quadruple probe head options for 300 mm platform (not included in base model) |
| Brand | Rayscience |
|---|---|
| Origin | South Korea |
| Model | PL Mapping |
| Optical Range | 350–2200 nm (UV-VIS-NIR) |
| Spatial Resolution | 10 µm (1 µm optional) |
| XY Stage | Motorized, 1 µm step resolution, max speed 30 mm/s |
| Spectrometers | EPP2000-VIS (350–1150 nm, 2048-pixel CCD, 1.6 nm res.) & IG512-NIR (900–1700 nm, 512-pixel InGaAs array, 14-bit ADC, 2.5 MHz digitizer) |
| Excitation Flexibility | Interchangeable laser sources (355/405/450/532/635/785 nm typical) |
| Sample Compatibility | 2″ & 4″ epitaxial wafers |
| Film Thickness Measurement | Via white-light reflectance spectroscopy |
| Software | Windows-based acquisition & offline analysis suite with statistical mapping, outlier removal, edge masking, cross-section profiling, and spectral parameter extraction (integrated intensity, peak wavelength, dominant wavelength, FWHM, spectral centroid) |