Thermic Edge
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| Brand | Thermic Edge |
|---|---|
| Origin | United Kingdom |
| Model | TE2000, TE3000 |
| Instrument Type | High-Vacuum Rapid Thermal Annealing Furnace |
| Maximum Operating Temperature | 2100 °C (vacuum), 2600 °C (inert atmosphere with tungsten heating zone), 3000 °C (graphite heating zone) |
| Vacuum Level | Down to 5 × 10⁻⁸ mbar (with Edwards EXT75DX turbomolecular pump) |
| Sample Capacity | Up to 200 mm (8-inch) wafers |
| Temperature Uniformity | < ±1% across heating zone |
| Temperature Accuracy | Better than ±1% of setpoint |
| Ramp Rate | ≥100 °C/min (heating), up to 200 °C/s (controlled cooling) |
| Pressure Control Precision | < ±0.5 bar |
| Heating Zone Materials | Graphite or tungsten |
| Vacuum Interface Standard | ISO-KF63 or KF25 |
| Cooling System | Integrated water-cooling circuit |
| Safety Systems | Interlocked electronic door lock, real-time O₂ purge logic, over-temperature and over-pressure alarms, LED status indicators |