TMC
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| Brand | TMC |
|---|---|
| Origin | USA |
| Model | STACIS Floor Platform 65 |
| Compliance | ASTM E1492, ISO 20486, SEMI S2 |
| Load Capacity | Up to 2,500 kg (configurable) |
| Active Isolation Bandwidth | 0.6–150 Hz |
| Residual Vibration | < 10 nm RMS (1–100 Hz) |
| Platform Material | 304 Stainless Steel |
| Footprint Customization | Yes, full dimensional and cutout flexibility |
| Controller | STACIS II Digital Feedback System with Ethernet/RS-232 Interface |
| Power Requirement | 100–240 VAC, 50/60 Hz |
| Environmental Operating Range | 15–30 °C, < 70% RH non-condensing |
| Brand | TMC |
|---|---|
| Origin | USA |
| Model | STACIS III |
| Active DOF | 6 |
| Active Bandwidth | 0.6–150 Hz |
| Passive Natural Frequency | 18 Hz (vertical & horizontal) |
| Effective Active Resonant Frequency | 0.5 Hz |
| Isolation at 1 Hz | 40–70% |
| Isolation ≥2 Hz | ≥90% |
| Settling Time (10 lb step, 10 | 1): 0.3 sec |
| Internal Noise | <0.1 nm RMS |
| Load Range per Isolator | Low (181–499 kg), Med (408–953 kg), Hi (862–2041 kg) |
| Static Lift Capacity | 4090 kg |
| Stiffness (Med isolator, 454 kg) | 73 × 10⁵ N/m |
| Magnetic Emission (<102 mm) | <0.02 µG broadband RMS |
| Environmental Compliance | CE, RoHS |
| Operating Temp | 10–32 °C |
| Humidity | 30–60% RH |
| Power | 100–240 VAC, 50/60 Hz, <600 W |
| Isolator Dimensions | 300 × 320 × 275 mm |
| Isolator Weight | 34 kg |
| DC-2020 Controller | Dual-core 150/75 MHz, 10 kHz sampling, 16 AI/AO channels, Ethernet + USB + RS-232, embedded GUI |