VPI Brooyuan
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| Brand | VPI Brooyuan |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | Domestic (China) |
| Model | SD-650MHT |
| Target Configuration | Dual Magnetron Sputtering Heads (2× 2-inch) |
| Ultimate Vacuum | ≤5×10⁻⁵ Pa |
| Vacuum System | 300 L/s Turbo Molecular Pump + 4 L/s Scroll Mechanical Pump with Anti-Backstreaming Valve & Oil Filter |
| Vacuum Gauge | Dual-Range Composite Gauge (1×10⁵–1×10⁻⁵ Pa) |
| Power Supply | DC Constant-Current Source (0–600 V / 0–1.6 A), Optional RF Generator (500 W, 13.56 MHz with Auto-Matching Network) |
| Chamber Dimensions (ID) | Ø210 mm × H250 mm |
| Chamber Material | Electropolished 304 Stainless Steel (Ra ≤ 0.8 µm) |
| Substrate Holder | Ø200 mm Rotating Stage (0–20 rpm, ±0.1 rpm precision), Optional Heating (±1 °C) |
| Cooling | Closed-Loop Chiller (±1 °C temperature control) |
| Gas Control | Electromagnetic Mass Flow Valve + Manual Valve (Ar, N₂ compatible) |
| Thickness Monitoring | Integrated Quartz Crystal Monitor (0–6000 nm range, 0.001 nm/s resolution, 257 preloaded materials + user-defined library) |
| Control Interface | VPI-Customized Dual-Touchscreen HMI with Real-Time Parameter Synchronization |