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| Brand | Alicona |
|---|---|
| Origin | Austria |
| Model | Infinite Focus SL |
| Working Distance | 33 mm |
| Measurement Field | 50 × 50 mm |
| Imaging | True-color high-DOF surface imaging |
| Automation | Fully automated interface for inline integration |
| Measurement Speed | Sub-second to several seconds per scan (depending on resolution and area) |
| Optical Principle | Focus-Variation (patented confocal-like axial scanning with white-light LED illumination) |
| Brand | Alicona |
|---|---|
| Origin | Austria |
| Model | FocusX |
| Measurement Principle | Focus-Variation Technology |
| ISO Compliance | ISO 25178 (areal surface texture), ISO 4287/4288 (profile roughness), ISO 1101 (geometrical tolerancing) |
| Typical Vertical Resolution | <10 nm |
| Lateral Resolution | Down to 0.4 µm |
| Maximum Field of View | Up to 12 mm × 9 mm (configurable) |
| Z-Range | Up to 20 mm |
| Measurement Speed | Up to 5 million points/sec (typical full-field acquisition in <5 s) |
| Surface Reflectivity Range | 0.1%–100% (including mirror-polished, matte, and structured surfaces) |
| Steep Angle Capability | Up to 87° sidewall measurement |
| Traceability | NIST-traceable calibration kits available |
| Brand | Mahr |
|---|---|
| Origin | Germany |
| Model | MarSurf LD 130 Series |
| Measurement Principle | Stylus-based profilometry |
| Probe Type | Contact stylus |
| Max. Measuring Length | 130 mm (with 100 mm stylus) / 260 mm (with 200 mm stylus) |
| Vertical Travel | 13 mm / 26 mm |
| Vertical Resolution | Sub-nanometer |
| Residual Noise | <20 nm Rz |
| Probe Exchange | Magnetic quick-lock system |
| Structural Design | Modular architecture |
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