Flowmeter
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| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | ESMFM-650 Soap Film Gas Flow Standard Calibrator |
| Flow Measurement Principle | Soap film displacement timing (volumetric flow standard) |
| Measurement Channels | 3 independent volumetric channels |
| MFC Integration | 4-channel integrated mass flow controllers (MFCs) |
| Flow Range (Volumetric) | Channel 1: 0.05–50 mL/min |
| Channel 2 | 20–1000 mL/min |
| Channel 3 | 500–5000 mL/min |
| Accuracy Class | ±0.5% of reading |
| MFC Ranges & Resolution | MFC1: 0–50 sccm (±0.01 sccm) |
| MFC2 | 0–300 sccm (±0.1 sccm) |
| MFC3 | 0–1000 sccm (±0.1 sccm) |
| MFC4 | 0–6000 sccm (±1 sccm) |
| Environmental Operating Conditions | 5–45 °C, ≤85% RH |
| Power Supply | 220 VAC |
| Compliance | Designed for ISO/IEC 17025-compliant calibration workflows |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | ESMFM-650 |
| Product Category | Thermal Mass Flowmeter-Based Calibration Standard |
| Key Features | Multi-channel soap film calibration |
| Flow range | 1–10,000 mL/min (standard conditions) |
| Accuracy | ±0.5% of reading (typical, per ISO 4064 Class B) |
| Operating temperature | 15–35 °C |
| Ambient pressure range | 80–106 kPa |
| Display | 7-inch capacitive touchscreen |
| Compliance | Designed to support ISO/IEC 17025-compliant calibration workflows |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor (OEM/ODM Support Available) |
| Product Type | Thermal Mass Flow Controller |
| Flow Sensing Principle | Constant-Temperature Anemometry (CTA) |
| Control Actuation | Proportional Solenoid Valve |
| Operating Gas Range | Air, N₂, O₂, CO₂, Ar, He, H₂ (with gas-specific calibration) |
| Accuracy | ±1% FS (typical, per ISO 14034) |
| Repeatability | ±0.2% FS |
| Response Time | <1 s (t₉₀) |
| Full-Scale Flow Ranges | 0–5 sccm to 0–1000 slm (model-dependent) |
| Output Signal | 0–5 VDC / 0–10 VDC / 4–20 mA (isolated) |
| Communication Interface | RS-485 (Modbus RTU), optional analog/digital I/O |
| Power Supply | 24 VDC ±10% |
| Enclosure Rating | IP65 |
| Compliance | CE, RoHS, ISO 9001-certified manufacturing |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC |
| Flow Measurement Principle | Thermal Mass Flow |
| Type | Thermal Mass Flow Controller |
| Compliance | Designed for industrial and laboratory process control environments |
| Manufacturer Status | OEM/ODM-capable manufacturer with proprietary sensor and proportional valve technology |
| Regulatory Context | Supports GLP/GMP-aligned operation via traceable calibration records and stable zero-point repeatability |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Technology | Constant Temperature Anemometry (CTA) |
| Communication Protocols | RS-232, RS-485 (Modbus RTU), 0–5 V / 0–10 V analog output, optional CAN bus |
| Gas Compatibility | Air, N₂, O₂, CO₂, Ar, He, H₂, CH₄, and custom gas calibrations (up to 10 pre-loaded gases) |
| Accuracy | ±(0.8% of reading + 0.2% of full scale) |
| Repeatability | ≤ ±0.2% FS |
| Response Time | < 100 ms (t₉₀) |
| Operating Pressure Range | 0.1–1.0 MPa (absolute) |
| Ambient Temperature | 5–50 °C |
| Enclosure Rating | IP65 |
| Certifications | ISO 9001 certified manufacturing |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Response Time (Measurement) | 5 ms |
| Response Time (Control) | 300 ms |
| Flow Sensing Technology | MEMS-based Thermal Sensor |
| Built-in Compensation | Temperature & Pressure |
| Pressure Drop | Low |
| Mounting | Flexible (Panel/Tube/Board-mount Compatible) |
| Warm-up Time | None Required |
| Flow Range Ratio | Wide (Typical 100:1) |
| Output Signal | Analog (0–5 V / 4–20 mA) & Digital (RS485/Modbus RTU) |
| Enclosure Rating | IP65 |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Type | Thermal Mass Flowmeter |
| Flow Range | 0.2–100% FS (1:500) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm), 1 sccm (1–5 slpm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed |
| Compatible Gases | Air, N₂, O₂, Ar, CH₄, CO₂ |
| Gas Requirements | Clean, dry, non-corrosive |
| Brand | AITOLY |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Technology | MEMS Thermal Anemometry |
| Flow Range | 0.2–100% of Full Scale (1:500 turndown) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm), 1 sccm (1–5 slpm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed |
| Gas Compatibility | Clean, dry, non-corrosive gases (Air, N₂, O₂, Ar, CH₄, CO₂) |
| Pressure & Temperature Compensation | Integrated |
| Pressure Drop | Low |
| Mounting | Flexible (panel, inline, or manifold-compatible) |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Flow Principle | Thermal Mass Flow (MEMS-based) |
| Medium | Clean, dry, non-corrosive gases (Air, N₂, O₂, Ar, CH₄, CO₂) |
| Full-Scale Range | 0.2–100% FS (1:500 turndown ratio) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed (NC) |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller (MFC) |
| Sensor Technology | MEMS-based with integrated temperature and pressure compensation |
| Flow Range | 0.2–100% F.S. (1:500 turndown ratio) |
| Accuracy | ±0.5% F.S. |
| Repeatability | ±0.5% F.S. |
| Linearity | ±0.2% F.S. |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed (NC) |
| Compatible Gases | Clean, dry, non-corrosive gases including Air, N₂, O₂, Ar, CH₄, CO₂ |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Technology | MEMS-based |
| Response Time (Measurement) | 5 ms |
| Response Time (Control) | 300 ms |
| Flow Range Ratio | Up to 100:1 |
| Pressure Drop | Low |
| Installation | Flexible (Inline/Panel Mount) |
| Power Supply | 24 VDC |
| Output Signal | 0–5 V / 0–10 V / 4–20 mA |
| Communication Interface | RS-485 (Modbus RTU) |
| Temperature & Pressure Compensation | Integrated |
| Warm-up Time | None Required |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Power Supply | 15–40 VDC |
| Communication Interfaces | CAN, RS232, RS422, RS485 (galvanically isolated) |
| Flow Ranges | 0–5 to 0–5 L/min (standard ranges: 0–5, 10, 50, 100, 200, 300, 500 sccm |
| Accuracy | ±0.5 % FS |
| Linearity | ±1 % FS |
| Repeatability | ±0.5 % FS |
| Response Time | <1 s |
| Operating Pressure Drop | 0–1 MPa |
| Maximum Working Pressure | 1.1 MPa |
| Ambient Temperature Range | 0–65 °C |
| Gas Compatibility | Air, He, Ar, N₂, O₂, H₂, NO, CO, CH₄, NH₃, N₂O, NO₂, CO₂ |
| Display Resolution | 0.1 sccm |
| Electrical Connector | DB9 |
| Fluid Connection Options | M8×1 thread, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Zero Drift | Extremely low |
| Moving Parts | None |
| Compatible Controller | AITOLY MCL300 (supports up to 16 units) |
| Brand | AITOLY |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Flow Range | 0–5 / 10 / 50 / 100 / 200 / 300 / 500 SCCM |
| Accuracy | ±0.5% F.S. |
| Linearity | ±1% F.S. |
| Repeatability | ±0.5% F.S. |
| Response Time | <1 s |
| Operating Pressure Drop | 0–1 MPa |
| Ambient Temperature | 0–65 °C |
| Power Supply | 15–40 VDC |
| Output Interfaces | Analog (0–5 V / 4–20 mA), RS232, RS485, RS422, CAN (galvanically isolated) |
| Gas Compatibility | Air, Ar, N₂, O₂, CO₂, CH₄ |
| Gas Path Connection | 3–3.2 mm, 4 mm, or 6 mm tubing |
| Standard Fittings | M8×1, 4 mm push-to-connect, 6 mm push-to-connect |
| Housing Dimensions (L×W×H) | 62.5 × 40 × 62.5 mm (base variant), 51 × 39.9 × 73 mm (compact variant) |
| Zero Drift | Extremely low |
| Moving Parts | None |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Measurement Principle | Constant-Temperature Anemometry (CTA) with MEMS Sensor |
| Gas Compatibility | Clean, dry, non-corrosive gases (Air, N₂, O₂, Ar, CH₄, CO₂) |
| Flow Range | 0.2–100% of Full Scale (1:500 turndown ratio) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | ≤5 ms |
| Control Response Time | ≤300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed (NC) |
| Pressure Drop | <1 kPa at full scale |
| Operating Temperature | 0–50 °C |
| Compensations | Integrated temperature and pressure compensation |
| Electrical Interface | Analog (0–5 V / 0–10 V / 4–20 mA) and digital (RS-485 Modbus RTU) |
| Power Supply | 24 VDC ±10% |
| Brand | Aitoly |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Principle | MEMS-based Thermal Anemometry |
| Origin | Jiangsu, China |
| Flow Measurement Technology | Constant-Temperature Anemometric (CTA) |
| Control Actuation | Proportional Solenoid Valve |
| Operating Gas Types | Air, N₂, O₂, CO₂, Ar, He, H₂, and other non-corrosive gases (calibration-specific) |
| Accuracy | ±1% FS (typical, gas-dependent) |
| Repeatability | ≤±0.2% FS |
| Response Time | <100 ms (t₉₀) |
| Zero Stability | <±0.05% FS/°C |
| Power Supply | 24 VDC ±10% |
| Output Signal | 0–5 VDC / 0–10 VDC / 4–20 mA (configurable) |
| Communication Interface | RS-485 (Modbus RTU) |
| Operating Temperature | 0–50 °C |
| Pressure Rating | Up to 1 MPa (gauge) |
| Connection | G1/4" or 1/4" NPT internal threads |
| Enclosure Rating | IP65 |
| Compliance | CE-marked, RoHS-compliant |
| Brand | AITOLY |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Technology | MEMS-based thermal dispersion |
| Flow Range | 0.2–100% of Full Scale (1:500 turndown ratio) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed (NC) |
| Gas Compatibility | Clean, dry, non-corrosive gases (Air, N₂, O₂, Ar, CH₄, CO₂) |
| Pressure & Temperature Compensation | Integrated |
| Pressure Drop | Low |
| Installation Flexibility | Compact design with multiple mounting options |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | AITOLY MFC300 |
| Type | Thermal Mass Flow Controller |
| Power Supply | 15–40 VDC |
| Output Options | Analog (0–5 V / 0–10 V / 4–20 mA) and Digital (RS232 / RS485 / CAN) |
| Flow Range | 0.2–100% FS (Turndown Ratio 1:500) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed |
| Compatible Gases | Air, N₂, O₂, Ar, CH₄, CO₂ |
| Gas Requirements | Clean, dry, non-corrosive |
| Brand | AITOLY |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Meter |
| Gas Compatibility | Argon (calibrated) |
| Response Time | 5 ms (measurement), 300 ms (control) |
| Flow Range | Standard range 0–100 sccm to 0–20 SLM (configurable per calibration) |
| Accuracy | ±1% FS (typical, argon-calibrated) |
| Repeatability | ±0.2% FS |
| Pressure Drop | <1 kPa at full scale |
| Operating Temperature | 0–50 °C |
| Compensated | Integrated temperature & pressure compensation |
| Output Signals | Analog (0–5 V / 4–20 mA), RS-485 (Modbus RTU), optional USB/DeviceNet |
| Communication Protocols | Modbus RTU, optional custom protocol support |
| Certifications | ISO 9001 certified manufacturing |
| Compliance | Designed for industrial process control environments |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Flow Range Options | 0–5 sccm to 0–5 L/min |
| Accuracy | ±0.5% FS |
| Linearity | ±1% FS |
| Repeatability | ±0.5% FS |
| Response Time | <1 s |
| Operating Pressure Differential | 0–1 MPa |
| Max Burst Pressure | 1.1 MPa |
| Ambient Temperature | 0–65 °C |
| Power Supply | 15–40 VDC |
| Electrical Interface | DB9 connector |
| Output Signals | 0–5 V / 0–10 V / 4–20 mA analog + isolated digital protocols (CAN, RS232, RS422, RS485) |
| Gas Compatibility | Air, He, Ar, N₂, O₂, H₂, NO, CO, CH₄, NH₃, N₂O, NO₂, CO₂ |
| Gas Path Fittings | M8×1, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Zero Drift | Extremely low |
| Moving Parts | None |
| Compliance | Designed for industrial process control environments |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Model | MFC300_CAN |
| Power Supply | 15–40 VDC |
| Flow Ranges | 0–5, 10, 50, 100, 200, 300, 500 sccm |
| Accuracy | ±0.5 % FS |
| Linearity | ±1 % FS |
| Repeatability | ±0.5 % FS |
| Response Time | <1 s |
| Pressure Drop Range | 0–1 MPa |
| Burst Pressure | 1.1 MPa |
| Operating Temperature | 0–65 °C |
| Gas Compatibility | Air, He, Ar, N₂, O₂, H₂, NO, CO, CH₄, NH₃, N₂O, NO₂, CO₂ |
| Electrical Interface | DB9 connector |
| Output Signals | Analog (0–5 V / 0–10 V / 4–20 mA), RS232, RS422, RS485, CAN (galvanically isolated) |
| Gas Connection Options | M8×1 thread, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Zero Drift | Extremely low |
| Moving Parts | None |
| Compliance | Designed for industrial process control environments requiring stable, repeatable gas flow regulation in continuous operation |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300_RS232 |
| Flow Principle | Thermal Mass Flow Measurement |
| Power Supply | 15–40 VDC |
| Accuracy | ±0.5 % FS |
| Linearity | ±1 % FS |
| Repeatability | ±0.5 % FS |
| Response Time | <1 s |
| Full-Scale Range Options | 0–5 to 0–5 L/min (sccm/LPM) |
| Operating Pressure Differential | 0–1 MPa |
| Max Burst Pressure | 1.1 MPa |
| Ambient Temperature | 0–65 °C |
| Gas Compatibility | Air, He, Ar, N₂, O₂, H₂, NO, CO, CH₄, NH₃, N₂O, NO₂, CO₂ |
| Electrical Interface | DB9 connector |
| Output Signals | Analog (0–5 V / 0–10 V / 4–20 mA), RS232, RS485, RS422, CAN (galvanically isolated) |
| Gas Port Options | M8×1, 4 mm push-to-connect, 6 mm push-to-connect |
| Tubing ID | 3–3.2 mm, 4 mm, 6 mm |
| Display Resolution | 0.1 sccm (for low-range models) |
| Zero Drift | Extremely low (typ. <0.02 % FS/°C) |
| Moving Parts | None |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Sensor Technology | MEMS with Integrated Temperature & Pressure Compensation |
| Flow Range | 0.2–100% of Full Scale (1:500 turndown) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed |
| Max Operating Pressure | 1.1 MPa (11 bar) |
| Operating ΔP Range | 0–1 MPa |
| Ambient & Gas Temp Range | 0–65 °C |
| Humidity Range | 0–98% RH (non-condensing) |
| Wetted Materials | FKM fluoroelastomer, brass, 300-series stainless steel, silicon seals |
| Enclosure Rating | IP40 |
| Mounting | Omnidirectional |
| Weight | 0.38 kg |
| Connection Options | Push-to-connect, quick-thread, compression, VCR |
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Gas Compatibility | Methane (CH₄), ≥98% purity |
| Flow Ranges | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min optimal |
| Operating Pressure Drop | 0–1 MPa |
| Valve Type | Normally Closed Proportional Solenoid Valve |
| Sensor Principle | Capillary-Tube Thermal Mass Flow Sensing with Bypass Shunt Architecture |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | MFC330 |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min for optimal stability |
| Valve Type | Normally Closed Proportional Solenoid Valve |
| Operating Pressure Drop | 0–1 MPa |
| Pressure Drop | Low |
| Gas Compatibility | Clean, dry gases |
| Optional Features | All-metal proportional valve, integrated digital display |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 (Domestic Alternative to Alicat) |
| Flow Principle | Thermal Mass Flow Measurement |
| Sensor Type | Capillary-tube-based with Bypass Shunt |
| Valve Type | Normally Closed Proportional Control Valve (Optional All-Metal) |
| Display | Optional Integrated LCD |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Flow Range | 0–500 sccm / 0–500 slpm (Configurable) |
| Control Range | 1–100% FS (1:100) |
| Measurement Resolution | 0.5% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min for Optimal Stability |
| Operating Pressure Drop | 0–1 MPa |
| Gas Compatibility | >98 gases (clean, dry) |
| Power Supply | 24 VDC |
| Output Signals | Analog (0–5 V / 4–20 mA), RS-232/RS-485 (Modbus RTU) |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Type | Thermal Mass Flow Controller |
| Model | MFC330 |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min for optimal stability |
| Valve Type | Normally Closed |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Model | MFC330 |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min optimal |
| Operating Pressure Drop | 0–1 MPa |
| Valve Type | Normally Closed Proportional Solenoid Valve |
| Optional | Full-metal valve, integrated LCD display |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 |
| Type | Thermal Mass Flow Controller |
| Compliance | ISO 9001 Certified |
| Communication Protocols | RS-485 (Modbus RTU), 0–5 V / 0–10 V analog output, optional CAN bus |
| Gas Compatibility | Air, N₂, O₂, Ar, CO₂, H₂, He, CH₄, and custom gas calibrations |
| Accuracy | ±(0.8% of reading + 0.2% of full scale) |
| Repeatability | ≤ ±0.2% FS |
| Response Time | < 100 ms (t₉₀) |
| Operating Pressure | 0.1–1.0 MPa (absolute) |
| Operating Temperature | –10°C to +60°C |
| Power Supply | 24 VDC ±10%, 1.5 A max |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 |
| Flow Principle | Thermal Mass Flow Measurement |
| Sensor Type | Capillary Tube with Bypass Shunt |
| Valve Type | Normally Closed Proportional Control Valve |
| Flow Range Options | 0–2 / 10 / 20 / 50 / 100 / 300 / 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Flow Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s (t₉₀) |
| Warm-up Time | 5 min to 95% stability, 30 min for optimal performance |
| Gas Compatibility | Clean, dry gases |
| Brand | AITOLY |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC330 |
| Type | Thermal Mass Flow Controller |
| Flow Range Options | 0–2, 10, 20, 50, 100, 300, 500 sccm |
| Accuracy | ±1% FS |
| Repeatability | ±0.2% FS |
| Linearity | ±0.2% FS |
| Control Range | 1–100% FS (1:100) |
| Measurement Range | 0.5–100% FS (1:200) |
| Response Time | <3 s |
| Warm-up Time | 5 min (T95), 30 min recommended for optimal stability |
| Valve Type | Normally Closed |