Mask Inspection Equipment
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| Brand | HORIBA |
|---|---|
| Origin | Japan |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Imported |
| Model | PD-Xpadion |
| Pricing | Available Upon Request |
| Particle Detection Sensitivity | 0.5 µm (standard), 0.35 µm (optional), 0.1 µm (with RP-1 integration) |
| Throughput | 12 min per mask (front + back side scan) |
| Mask Size Compatibility | 5-inch to 9-inch |
| Uptime | ≥98% |
| MTBF | 1500 hours |
| Scan Surfaces | Glass substrate, thin-film layer, and patterned side (3-sided inspection) |
| Scan Time per Side | ≤4 minutes |
| Automation Interface | OHT, EFEM, SECS/GEM compliant |
| Optional Modules | Raman-based particle characterization, film thickness & uniformity mapping, film health monitoring, integrated particle removal (RP-1 system) |
| Brand | TZTEK |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | Spector |
| Pricing | Available Upon Request |
| Optical Modes | Reflective & Transmissive |
| Illumination Options | Visible Light & UV (365 nm) |
| CD Measurement Range | Down to 300 nm |
| 3σ Repeatability | Sub-1 nm (typical) |
| Maximum Mask Size Supported | 14-inch (355 mm) square or custom-shaped reticles |
| Interface Standard | SECS/GEM compliant |