Other Wafer Defect Detection Instruments
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| Brand | Endress+Hauser Metrology |
|---|---|
| Country of Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | MX 203 |
| Pricing | Upon Request |
| Wafer Diameter Range | 50 mm – 450 mm (2″ – 18″) |
| Thickness Accuracy | ±0.5 µm |
| Thickness Resolution | 50 nm |
| Thickness Measurement Range | 100 µm – 1000 µm |
| Measurement Principle | Dual-Sided Capacitive Sensing |
| Automation Level | Manual Operation |
| Compatible Substrates | Si, SiC, GaN, GaAs, InP |
| Brand | k-Space |
|---|---|
| Origin | USA |
| Manufacturer Status | Authorized Distributor |
| Product Origin | Imported |
| Model | kSA 400 |
| Pricing | Upon Request |
| Brand | Photonic Lattice |
|---|---|
| Origin | Japan |
| Model | PA-300-XL |
| Measurement Wavelength | 520 nm |
| Birefringence Range | 0–130 nm |
| Minimum Resolution | 0.001 nm |
| Repeatability | <0.1 nm |
| Field of View (Standard) | 40×48 mm to 240×320 mm |
| Polarization Camera | 2056×2464 pixels |
| Output Parameters | Retardance [nm], Fast-Axis Orientation [°], Stress-Converted Value [MPa] (optional) |
| Optional Modules | Real-time Analysis Software, Lens Aberration Analysis Software, External Control Interface, Interchangeable Lens Kits |
| Brand | ZENO |
|---|---|
| Origin | Shanghai, China |
| Model | PULSAR L-Series & PULSAR H-Series |
| Category | Semiconductor Wafer Defect Detection Instrument |
| Manufacturer Type | Authorized Distributor |
| Regional Classification | Domestic (China) |
| Pricing | Upon Request |
| Brand | YXLON International GmbH |
|---|---|
| Origin | Germany |
| Model | CC Series |
| Cooling Option | Optional Water-Cooled FXT 160.51 X-ray Tube |
| Detector Modes | Standard & Low-Dose Mode |
| Software Suite | micro3Dslice, FF CT, VoidInspect, eHDR Dynamic Enhancement Filters |
| Load Capacity (Optional) | < 20 kg |
| Voltage Range | Optimized for Low-Voltage High-Resolution Imaging (≤ 160 kV) |
| Compliance | Designed for ISO/IEC 17025-aligned QA workflows, supports GLP/GMP audit trails via software logging |
| Brand | YXLON International GmbH |
|---|---|
| Origin | Germany |
| Model | FF Series |
| Operating Voltage | Up to 600 kV |
| Detector | 3-Line Detector Array (LDA) with 254 µm pixel pitch |
| Dynamic Range | High |
| Signal-to-Noise Ratio | Exceptional |
| Scan Modes | 2D, 3D, Helical (HeliExtend), Field-of-View Extension (Horizontal/Vertical), Virtual Rotation Axis |
| Image Enhancement | ScatterFix 2.0, Beam Hardening Correction (BHC), Metal Artifact Reduction (MAR) |
| Applications | R&D material analysis, dimensional metrology, failure analysis, assembly verification, digital dissection |
| Sample Compatibility | Aluminum, steel, superalloys, AM parts, Li-ion battery cells/modules/systems, CFRP, injection-molded plastics, cultural heritage objects, geological/paleontological/biological specimens, mechatronic assemblies |