Process Mass Spectrometry Online Mass Spectrometry
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| Brand | Altamira Instruments (USA) |
|---|---|
| Origin | USA |
| Model | AMI-Master 400 Quadrupole Mass Spectrometer |
| Configuration | Benchtop Process Mass Spectrometry System |
| Ion Source | Electron Impact (EI), 70 eV standard |
| Mass Range | 1–300 amu |
| Detection Modes | Faraday Cup & Electron Multiplier (dual-mode) |
| Scan Speed | <10 ms per decade |
| Response Time | <100 ms (full-spectrum acquisition) |
| Operating Pressure (Ion Source) | 1×10⁻⁶ to 5×10⁻⁵ Torr |
| Vacuum System | Turbo-molecular pump (200 L/s) + Oil-free diaphragm backing pump |
| Inlet Temperature Control | Ambient to 200 °C (capillary + filter assembly, independently regulated) |
| Chamber Bake-out Capability | Up to 200 °C |
| Software Platform | Windows 7/10-compatible multi-channel gas analysis suite with real-time quantitation, spectral library matching, and audit-trail-enabled data logging |
| Brand | Altamira Instruments (USA) |
|---|---|
| Origin | USA |
| Model | AMI-Master400 |
| Vacuum System | Turbo-molecular pump + oil-free diaphragm dry pump with full-range vacuum gauge |
| Inlet System | Heated stainless-steel or quartz capillary (ambient–200 °C), dual-stage pressure reduction |
| Mass Analyzer | Quadrupole mass filter with electron impact (EI) ion source |
| Detectors | Dual-mode detection — Faraday cup and electron multiplier |
| Detection Range | 100% to sub-ppb (v/v) |
| Response Time | <100 ms |
| Scan Speed | Millisecond-scale mass scanning |
| Mass Range | 1–300 u (standard), upgradable to 500 u |
| Operating Software | Multi-channel gas analysis suite for Windows 7/10, compliant with GLP/GMP data integrity requirements |
| Bake-out Capability | Mass spectrometer chamber heatable to 200 °C for in-situ outgassing |
| Compliance | Designed to support ASTM D7622, ISO 10156, USP <1251>, and FDA 21 CFR Part 11 audit-trail functionality |
| Brand | Anyeep |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | RGA 6500 |
| Pricing | Upon Request |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | AST3007 |
| Mass Range | 2–285 amu |
| Resolution | 0.8 ± 0.2 (FWHM) |
| Detection Limit | 0.1 ppm |
| Sampling Speed | High-speed dynamic acquisition |
| Sensitivity | Sub-ppb for key process gases |
| Vacuum System | Turbomolecular pump |
| Detector | Faraday Cup / Secondary Electron Multiplier (FC/SEM) |
| Operating Temperature | 15–35 °C |
| Power Consumption | 350 W |
| Dimensions (L×W×H) | 299 × 218 × 331 mm |
| Weight | 15 kg |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Aston™ Process Mass Spectrometer |
| Pricing | Available Upon Request |
| Brand | Atonarp |
|---|---|
| Origin | Japan |
| Model | Aston™ |
| Application Domain | In-line Process Mass Spectrometry for Semiconductor Vacuum System Integrity Monitoring |
| Compliance Context | Designed for ISO 9001-certified semiconductor fabs |
| Environmental Rating | IP65-rated enclosure |
| Brand | Dongxi Analytical |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | PTR-QMS3500 |
| Pricing | Upon Request |
| Mass Range | 1.5–600 amu |
| Resolution | Unit Mass Resolution |
| Response Time | 100 ms |
| Detection Limit | 100 pptv (for benzene) |
| Linear Dynamic Range | 50 pptv – 10 ppmv |
| Adjustable Inlet Flow Rate | 80–800 sccm |
| Heated Capillary Inlet Length | 1.0 m (inert, temperature-controlled up to 150 °C) |
| Drift Tube/Reaction Chamber Temperature Range | 40–150 °C |
| Primary Reagent Ion | H₃O⁺ |
| Optional Reagent Ions | NH₄⁺, O₂⁺, NO⁺ |
| Power Supply | 220 V AC |
| Dimensions (W × H × D) | 48 × 54.5 × 63 cm |
| Weight | ~100 kg |
| Remote Interface | 4–20 mA output & MODBUS RTU protocol support |
| Brand | EWIN-TECH |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Regional Classification | Domestic (China) |
| Model | AION 1000 |
| Pricing | Upon Request |
| Brand | FPI |
|---|---|
| Origin | Zhejiang, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | LGA Series |
| Pricing | Available Upon Request |
| Brand | FPI |
|---|---|
| Origin | Zhejiang, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic (China) |
| Model | Mars-550 |
| Pricing | Available Upon Request |
| Brand | Hiden |
|---|---|
| Origin | Austria |
| Model | HPR20 QIC TMS |
| Mass Range | 1–50 / 100 / 200 / 300 / 500 / 1000 amu |
| Sampling Pressure | 100 mbar–2 bar (standard) |
| Response Time | <150 ms |
| Dynamic Range | 7 decades (pulse-counting detector) |
| Detection Limit | 5 ppb |
| Quantification Range | ppm to 100% |
| Stability | ±0.5% peak height over 24 h |
| Scan Speed | 100 amu/s |
| Measurement Rate | 500 data points/sec |
| Capillary | 0.9 m heated quartz inert capillary (up to 200 °C) |
| Ionization | APSI-MS soft ionization |
| External Analog Outputs | 2 standard, up to 16 optional |
| Brand | In-situ High-tech |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | OEM Manufacturer |
| Country of Origin | China |
| Model | CIS-DEMS-DM |
| Quotation | Upon Request |
| Mass Range | 1–100 / 200 / 300 amu |
| Inlet Pressure Range | 1×10⁻⁷ mbar to 10 bar (customizable) |
| Inlet Reduction Stages | 1/2/3-stage selectable |
| Inlet Flow Rate | 0.1–100 sccm |
| Max Inlet Pressure | ≤1.5 bar |
| Inlet Tubing Material | Stainless steel / Quartz / PEEK |
| Heated Inlet Temperature | 120 / 200 / 300 °C |
| Quadrupole Rods | Stainless steel, Ø6 mm × 125 mm |
| Detector | C-SEM / Faraday cup |
| LOD (C-SEM) | <100 ppb |
| Peak Width | 0.5–2.5 amu |
| Ion Source Bake-out Temp | Up to 150 °C |
| Scan Speed | 1 ms–16 s per amu (programmable, min. 1 ms/amu) |
| Vacuum System | Pfeiffer HiPace 80 molecular pump (90,000 rpm) + ACP 20 dry scroll pump |
| I/O Interface | Digital & analog outputs |
| Compliance | Fully compatible with ASTM E1947, ISO/IEC 17025 workflows, and supports GLP/GMP audit trails via optional software modules |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Model | OmniStar / ThermoStar |
| Principle | Quadrupole Mass Filter |
| Response Time | ≤2 s |
| Mass Range Options | 1–100 amu, 1–200 amu, 1–300 amu |
| Inlet Capillary Temperature | Up to 350 °C |
| Inlet Material | Stainless Steel (OmniStar) or Fused Silica (ThermoStar) |
| Pumping System | MVP dry diaphragm pump + HiPace turbomolecular pump |
| Software | PV MassSpec (qualitative & quantitative analysis) |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Imported Instrument |
| Model | HPA 220 / SPM 220 |
| Pricing | Upon Request |
| Brand | Pfeiffer Vacuum |
|---|---|
| Origin | Germany |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Import Status | Imported |
| Model | OMNISTAR™ / THERMOSTAR™ |
| Pricing | Upon Request |
| Brand | East & West Analytical Instruments |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | OEM Manufacturer |
| Model | PRO-MS 3600 |
| Detection Range | ppb to 100% (v/v) |
| Detection Principle | Quadrupole Mass Spectrometry |
| Response Time | < 1.5 s (typical for single-point analysis) |
| Ion Source | High-efficiency inertized electron ionization source |
| Quadrupole Material | Passivated stainless steel |
| Inlet System | Multi-stage differential pumping with low-dead-volume valving |
| Software | Real-time spectral acquisition and quantitative analysis suite compliant with GLP data integrity requirements |
| Brand | SRS/Stanford Research Systems |
|---|---|
| Origin | USA |
| Model | RGA1-100amu, RGA1-200amu, RGA1-300amu |
| Mass Range | 1–100 amu / 1–200 amu / 1–300 amu |
| Resolution | <0.5 amu (FWHM) |
| Detection Limit | 5 × 10⁻¹⁴ Torr (with EM detector) |
| Sensitivity | 2 × 10⁻⁴ A/Torr (Faraday cup) |
| Dynamic Range | 6 decades |
| Response Time | 1–2 s |
| Detector Options | Faraday Cup (standard), Electron Multiplier (optional) |
| Operating Pressure Range | 10⁻⁴ Torr to UHV (FC) |
| Max. Probe Temperature | 70 °C |
| Max. Bakeout Temperature | 300 °C (probe only, ECU excluded) |
| Interface | RS-232 |
| Brand | Thermo Fisher |
|---|---|
| Origin | USA |
| Manufacturer | Thermo Fisher Scientific |
| Type | SOLA II |
| Measurement Principle | Pulsed Ultraviolet Fluorescence (PUVF) |
| Detection Range | SOLA II: 0–5 ppmS to 0–5000 ppmS |
| SOLA Trace | 0–2 ppmS to 0–5 ppmS |
| SOLA Flare DI | 10 ppmS to 95% S |
| Repeatability | ±2% FS (1 injection/min), ±1% FS (2 injections/min) |
| Response Time (T90) | 3–5 min |
| Communication | 4–20 mA, Modbus RTU/ASCII/TCP, RS-232/RS-485, Ethernet (TCP/IP) |
| Certifications | ATEX Zone 1/2, IECEx, CSA Class I Div 1/2, NEC Class I Div 1/2, CE Mark |
| Environmental Operating Range | 12–40 °C |
| Power | 110/220 VAC, 50/60 Hz, 2000 W |
| Sample Requirements | Liquid or gas (ASTM D5453/D6667 compliant) |
| Auto-Diagnostics | Valve leak detection, flow monitoring, lamp/PMT health tracking, density compensation interface |