AITOLY MFC-100 Series Thermal Mass Flow Controller

Overview

The AITOLY MFC-100 Series Thermal Mass Flow Controller is an engineered solution for precise, real-time measurement and closed-loop control of gas mass flow rates in demanding industrial and laboratory applications. Utilizing constant temperature anemometry (CTA), this controller directly measures mass flow—without dependence on pressure or temperature compensation—by detecting heat transfer between a heated sensor element and the flowing gas stream. Unlike volumetric flow devices, thermal mass flow controllers inherently deliver true mass-based readings (standard liters per minute, sL/min), making them ideal for processes where stoichiometric gas ratios, repeatability across ambient fluctuations, or trace-level delivery are critical—such as semiconductor ALD/CVD tool gas boxes, fuel cell test benches, and analytical instrument carrier gas regulation.

Key Features

• Integrated high-stability proportional control valve: Patented micro-servo valve architecture enables sub-second dynamic response and long-term zero drift stability (< ±0.1% FS/year), minimizing recalibration frequency in continuous operation.
• Multi-gas calibration capability: Factory-calibrated for up to 10 user-selectable gases—including reactive (H₂, NH₃), inert (Ar, He), and corrosive (CO₂, O₂)—with built-in gas selection logic and automatic scaling compensation.
• Dual-mode operation: Supports both analog setpoint input (0–5 V / 0–10 V) and digital command via Modbus RTU over RS-485, enabling seamless integration into PLC-driven automation systems and SCADA architectures.
• Ruggedized industrial design: IP65-rated aluminum alloy housing with stainless steel wetted parts (316L SS flow body and sensor tube); qualified for continuous operation at ambient temperatures from 5 °C to 50 °C and pressures up to 1.0 MPa (abs).
• Traceable metrology foundation: Each unit undergoes individual flow verification against NIST-traceable primary standards at three points across its range; calibration certificates include uncertainty budgets per ISO/IEC 17025 guidelines.

Sample Compatibility & Compliance

The MFC-100 is compatible with non-aggressive, non-condensing gases within its specified pressure and temperature envelope. It supports dry, clean gas streams typical of analytical, process, and research environments—excluding particulates > 1 µm, aerosols, or vapors that may coat the sensor surface. While not intrinsically safe certified, the device meets IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emissions) for industrial electromagnetic compatibility. Its design aligns with functional safety principles relevant to ISO 13849-1 (PL c) for auxiliary control functions. Though not FDA 21 CFR Part 11–validated out-of-the-box, audit-ready data logs (via optional software) support GxP-aligned workflows when deployed under documented SOPs.

Software & Data Management

AITOLY provides the free PC-based MFC Control Suite, a Windows application supporting real-time flow monitoring, setpoint ramping, batch logging (CSV/TXT), and firmware updates. The suite records timestamped flow, temperature, pressure (if external sensor connected), and valve position at user-defined intervals (100 ms to 10 s). All logged data includes device serial number, calibration date, and active gas ID—enabling full traceability. For enterprise integration, the Modbus RTU register map is fully documented, allowing direct mapping into Siemens TIA Portal, Rockwell Studio 5000, or LabVIEW DAQ systems. Audit trail functionality (user login, parameter changes, calibration events) is implemented in accordance with ALCOA+ data integrity principles.

Applications

• Semiconductor fabrication: Precise dopant and purge gas delivery in etch, deposition, and cleaning tools.
• Fuel cell R&D: Stoichiometric air and hydrogen feed control during polarization curve testing and durability cycling.
• Medical gas mixing: Proportional blending of O₂/N₂/He for respiratory therapy and anesthesia equipment validation.
• Environmental monitoring: Calibration gas generation for NOₓ, SO₂, and VOC analyzers requiring stable, certified flow rates.
• Photovoltaic manufacturing: Silane and ammonia flow regulation in PECVD reactors.
• Bioreactor sparging: Dissolved oxygen control via mass-based air/O₂ blending independent of barometric variation.

FAQ

Does the MFC-100 require upstream/downstream straight pipe runs?
No—thermal mass flow controllers are insensitive to flow profile disturbances; no straight-run conditioning is needed. A simple 10 mm particle filter upstream is recommended for clean gas operation.

Can I recalibrate the unit in-house?
Field recalibration is not supported; however, AITOLY offers certified recalibration services at its Jiangsu facility with turnaround under 5 business days and full ISO/IEC 17025-compliant documentation.

Is helium correction factor applied automatically?
Yes—when “He” is selected as the active gas, the controller applies factory-determined thermal conductivity and specific heat ratio corrections to maintain accuracy across the full flow range.

What is the maximum allowable pressure drop across the device?
The pressure drop is typically < 15 kPa at full-scale flow for the 10 sL/min model; detailed ΔP curves are provided in the technical datasheet for each range.

How does the device handle gas mixtures not in the preloaded list?
Users may define custom gas properties (Cp, λ, MW) via the Control Suite and generate a one-time calibration offset; AITOLY also offers custom multi-point mixture calibration as a service.