Aitoly MFC350 Micro Gas Mass Flow Controller
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Type | Thermal Mass Flow Controller |
| Measurement Principle | Constant-Temperature Anemometry (CTA) |
| Accuracy | ±0.2% FS |
| Repeatability | ±0.05% FS |
| Linearity | ±0.1% FS |
| Response Time (90%) | ≤100 ms |
| Control Range | 1–100% FS (100:1 turndown) |
| Full-Scale Flow Ranges | 0–1, 5, 10, 20, 50, 100, 300, 500 sccm |
| Gas Compatibility | >130 pre-calibrated gases (including N₂, O₂, Ar, He, CO₂, CH₄, H₂, NH₃, SF₆, and custom blends) |
| Operating Pressure Drop | 0–1 MPa |
| Valve Type | Normally Closed Solenoid |
| Seal Options | FKM (leak rate ≤1×10⁻¹⁰ Pa·m³/s He) or All-Metal (leak rate ≤1×10⁻¹¹ Pa·m³/s He) |
| Resolution | 0.001 sccm |
| Warm-up Time | 0 s |
| Communication Interfaces | 0–5 V / 0–10 V / 4–20 mA analog |
| Compliance | CE, RoHS, ISO 9001-manufactured |
Overview
The Aitoly MFC350 Micro Gas Mass Flow Controller is an industrial-grade thermal mass flow instrument engineered for high-precision measurement and closed-loop control of low-flow-rate gases in analytical, semiconductor, vacuum, and process automation environments. Based on constant-temperature anemometry (CTA), the device measures mass flow directly—without dependence on pressure or temperature compensation—by detecting heat transfer from a heated sensor element to the flowing gas stream. This principle ensures intrinsic independence from gas density variations, enabling stable operation across dynamic process conditions. Unlike volumetric flowmeters, the MFC350 delivers true mass flow output in standardized cubic centimeters per minute (sccm) or standard liters per minute (slpm), referenced to 0 °C and 101.325 kPa (STP). Its zero-warm-up-time architecture eliminates stabilization delays, supporting immediate commissioning in time-critical applications such as atomic layer deposition (ALD), plasma etching, gas chromatography carrier gas regulation, and laboratory-scale reactor feed control.
Key Features
- Sub-millisecond dynamic response: <100 ms control loop settling time (90% step response), optimized for real-time feedback integration in fast-cycling processes.
- Ultra-high resolution: 0.001 sccm digital resolution across all calibrated ranges—critical for microfluidic dosing and trace gas calibration.
- Dual-seal valve configuration: Selectable FKM elastomer (for general-purpose inert/corrosive gases) or all-metal hermetic sealing (for ultra-high-purity, UHV, or hydrogen service), with helium leak rates certified to ≤1×10⁻¹¹ Pa·m³/s.
- Multi-gas flexibility: Factory-calibrated for over 130 gases—including reactive species (NH₃, Cl₂), corrosives (HCl, HF), and light molecules (H₂, He)—with user-selectable gas tables via communication interface.
- Multi-protocol digital connectivity: Native support for EtherCAT (for deterministic motion-synchronized control), CANopen (industrial fieldbus), RS485/Modbus RTU (SCADA integration), and legacy RS232—ensuring compatibility with PLCs, DAQ systems, and OEM equipment controllers.
- Zero-drift design: Patented thermal drift compensation algorithm maintains accuracy across ambient temperatures from 5 °C to 45 °C without recalibration.
Sample Compatibility & Compliance
The MFC350 is validated for use with clean, dry, non-condensing gases only. Particulate filtration (≤0.1 µm) and dew point control (<−20 °C) are mandatory upstream to prevent sensor fouling or thermal offset drift. It complies with IEC 61000-6-2 (immunity) and IEC 61000-6-4 (emissions), carries CE marking under the EMC and RoHS Directives, and is manufactured under an ISO 9001-certified quality management system. While not intrinsically safe, it may be deployed in Class I, Division 2 hazardous locations when installed with appropriate barrier systems. For regulated industries, audit-ready digital logs (via EtherCAT or Modbus) support GLP/GMP traceability requirements, including timestamped setpoint changes, flow readings, and diagnostic events.
Software & Data Management
Aitoly provides the MFC350 Configuration Suite—a Windows-based utility enabling full parameterization, gas selection, PID tuning, and firmware updates. The software supports export of time-stamped CSV data streams (up to 100 Hz sampling) and generates compliance reports compliant with FDA 21 CFR Part 11 (electronic signatures, audit trails, and user access controls optional with enterprise license). All communication protocols implement CRC error checking and command acknowledgment to ensure data integrity in noisy industrial environments. For embedded integration, Aitoly supplies C/C++ and Python SDKs with thread-safe API calls, EtherCAT XML configuration files (ENI), and CANopen EDS files.
Applications
- Semiconductor fabrication: Precise precursor gas delivery in ALD, CVD, and etch tools requiring sub-sccm repeatability and <100 ms valve actuation.
- Environmental monitoring: Calibration gas generation for portable VOC analyzers and multi-gas detectors.
- Medical device testing: Controlled airflow simulation in ventilator and nebulizer performance validation per ISO 80601-2-72.
- Research laboratories: Dual-MFC blending systems for gas mixture synthesis (e.g., synthetic air, breath simulants) with programmable ramp profiles.
- Hydrogen energy R&D: Leak-tight H₂ flow control in PEM electrolyzer test benches and fuel cell stack characterization rigs.
FAQ
Is the MFC350 suitable for use with hydrogen?
Yes—when equipped with the all-metal sealed valve option and calibrated for H₂, the MFC350 meets ISO 15848-1 leakage class A requirements for hydrogen service.
Can multiple MFC350 units be synchronized via EtherCAT?
Yes—EtherCAT distributed clocks enable sub-microsecond synchronization across up to 64 nodes, allowing coordinated multi-channel gas delivery with deterministic jitter <1 µs.
Does the device require periodic recalibration?
No scheduled recalibration is required under normal operating conditions; however, Aitoly recommends annual verification against NIST-traceable standards for GxP-regulated workflows.
What is the maximum allowable inlet pressure?
The MFC350 is rated for continuous operation at inlet pressures up to 1 MPa (10 bar) absolute, provided differential pressure across the sensor remains within specified limits per selected flow range.
Can custom gas calibrations be added post-purchase?
Yes—Aitoly offers custom calibration services for proprietary gas mixtures; certified calibration certificates and gas-specific coefficients are delivered as encrypted firmware patches.
