AITOLY MFM Series Thermal Mass Gas Flowmeter

Overview

The AITOLY MFM Series Thermal Mass Gas Flowmeter is an industrial-grade inline flow measurement instrument engineered for high-reliability mass flow monitoring of gases in process-critical environments. Based on constant-temperature anemometry (CTA), the device measures gas mass flow rate directly—without requiring pressure or temperature compensation calculations—by detecting convective heat transfer from a heated sensor element to the flowing gas stream. This principle ensures true mass flow output independent of upstream pressure fluctuations or ambient temperature drift, making it especially suitable for applications demanding stable, repeatable quantification under dynamic process conditions. Unlike volumetric flowmeters, the MFM Series delivers standardized flow values referenced to defined standard conditions (e.g., 0 °C, 101.325 kPa), eliminating the need for external transducers or post-processing correction algorithms.

Key Features

• No moving parts: Eliminates mechanical wear, reduces maintenance frequency, and enhances long-term calibration stability.
• Integrated dual-sensor architecture: Combines precision thermal mass sensing with built-in temperature and absolute pressure transducers for real-time density compensation.
• Multi-output flexibility: Simultaneous analog (0–5 VDC, 4–20 mA) and digital (RS232, RS485, CAN) outputs support seamless integration into PLC-based automation systems, SCADA networks, and OEM equipment interfaces.
• Local human-machine interface: Backlit LCD display with membrane keypad enables field configuration, zero calibration, unit selection (SCCM, SLPM, g/min), and real-time visualization of both instantaneous and totalized flow data.
• Wide turndown ratio: Operates linearly across 0.5–100% of full scale, enabling accurate measurement from trace-level purge flows to high-throughput process streams.
• Rugged wetted path construction: Stainless steel (SUS304/SUS316L) flow body and FKM-sealed joints ensure compatibility with aggressive and ultra-pure process gases—including corrosive, inert, and reactive species—while meeting semiconductor-grade cleanliness requirements.

Sample Compatibility & Compliance

The MFM Series supports calibration for over 20 common industrial and specialty gases—including N₂, O₂, Ar, He, CO₂, H₂, synthetic air, and custom binary/multi-component mixtures—via factory-set or user-defined gas coefficients. Its design adheres to fundamental metrological principles outlined in ISO 14040 (environmental management) and aligns with installation practices recommended in ISO 5167 for flowmeter positioning. While not certified to IEC 61508 (SIL) or ATEX/IECEx by default, the device meets general-purpose industrial safety requirements for non-hazardous area use (IP65 enclosure rating optional). For regulated industries, audit trails generated via serial communication can be archived to support GLP/GMP documentation protocols when integrated with compliant data acquisition software.

Software & Data Management

Configuration and diagnostics are performed using AITOLY’s proprietary PC-based utility (Windows-compatible, USB-to-serial adapter required), supporting firmware updates, zero-point verification, gas type selection, and linearization table editing. All communication channels transmit ASCII-formatted telemetry packets containing timestamped flow, temperature, pressure, and diagnostic status codes. When deployed in FDA-regulated environments (e.g., bioreactor sparging control), the device may be validated as part of a larger system under 21 CFR Part 11—provided electronic records are captured through validated third-party SCADA or MES platforms that enforce user authentication, audit logging, and electronic signature controls.

Applications

• Semiconductor manufacturing: Precise gas delivery control in reactive ion etching (RIE), deep reactive ion etching (DRIE), and plasma-enhanced chemical vapor deposition (PECVD) tools.
• Analytical instrumentation: Carrier and make-up gas metering in gas chromatography (GC), mass spectrometry (MS), and Fourier-transform infrared (FTIR) systems.
• Energy and fuel cell R&D: Stoichiometric air/fuel ratio monitoring, cathode/anode gas feed regulation, and hydrogen purity verification in PEM and SOFC test stations.
• Medical device manufacturing: Controlled atmosphere purging during sterilization cycles and leak testing of implantable components.
• Laser welding and cutting: Assist gas flow optimization (O₂, N₂, Ar) to maximize beam coupling efficiency and minimize oxidation in high-power fiber laser processes.
• Vacuum coating systems: Real-time monitoring of sputtering gas (Ar), reactive gas (O₂, N₂), and chamber backfill flows in PVD and CVD reactors.

FAQ

Does the MFM Series require periodic recalibration?
Yes—annual calibration is recommended for applications requiring traceable metrological compliance; factory calibration certificates (NIST-traceable) are available upon request.
Can the flowmeter measure humidified or saturated gas streams?
It is rated for operation up to 98% relative humidity without condensation; however, prolonged exposure to liquid water or aerosol-laden gas may affect sensor accuracy and longevity.
Is custom gas calibration supported?
Yes—AITOLY provides gas-specific calibration services for non-standard mixtures; users must supply certified composition data and reference flow standards.
What is the minimum measurable flow rate at full-scale range?
The lower limit is 0.5% of full scale (e.g., 0.025 SLPM on a 5 SLPM range), subject to signal-to-noise constraints and gas thermal properties.
How is zero calibration performed in-field?
With zero-flow conditions established, users initiate auto-zero via the front-panel keypad or remote command; the procedure compensates for thermal drift and offset voltage variations.