INFICON MPG 400 Combined Pirani / Cold Cathode Vacuum Gauge
| Brand | INFICON |
|---|---|
| Origin | Germany |
| Model | MPG 400 |
| Measurement Principle | Pirani + Cold Cathode (Inverted Magnetron) |
| Range | 5 × 10⁻⁹ mbar to 1013 mbar (atmospheric pressure) |
| Vacuum Port | KF 25 (ISO-KF), CF 40 (ConFlat) |
| Output Signal | Logarithmic analog (0–10 V or 4–20 mA, configurable) |
| Sealing Options | FPM (Viton®) or metal (Cu gasket) feedthroughs |
| LED Indicator | High-voltage status indicator |
Overview
The INFICON MPG 400 is a compact, dual-sensor combined vacuum gauge engineered for continuous, reliable pressure measurement across an exceptionally wide dynamic range—from ultra-high vacuum (UHV) at 5 × 10⁻⁹ mbar up to atmospheric pressure (1013 mbar). It integrates two complementary physical measurement principles in a single, field-proven housing: a thermally compensated Pirani sensor for low-to-medium vacuum (10⁻³ to 10³ mbar) and an inverted magnetron cold cathode sensor for high and ultra-high vacuum (5 × 10⁻⁹ to 10⁻³ mbar). Unlike traditional hot-cathode gauges, the inverted magnetron design eliminates filament burnout risk, ensuring long-term operational stability without scheduled replacement of emissive elements. The gauge operates without internal heaters or consumable filaments—making it inherently suitable for processes involving reactive, corrosive, or condensable vapors where conventional gauges may degrade or fail. Its robust mechanical architecture, precision-calibrated sensors, and factory-traceable calibration support reproducible measurements under demanding industrial and research conditions.
Key Features
- Dual-sensor architecture: Pirani + inverted magnetron cold cathode enables seamless, gap-free coverage from UHV to atmosphere
- No filament—eliminates burnout, extends service life, and reduces maintenance intervals
- Configurable logarithmic analog output (0–10 V DC or 4–20 mA) with linearized pressure response across six decades
- Integrated LED status indicator signals high-voltage activation of the cold cathode stage
- Two standard vacuum port options: ISO-KF 25 (quick-release clamp) and CF 40 (all-metal, bakeable to 200 °C)
- Sealing compatibility with both fluorocarbon elastomer (FPM/Viton®) O-rings and oxygen-free copper gaskets for UHV applications
- Compact DIN-rail mountable housing (96 × 96 × 130 mm) with IP20-rated enclosure for panel integration
Sample Compatibility & Compliance
The MPG 400 is designed for direct installation into vacuum chambers, load locks, coating systems, and analytical instrumentation requiring stable, drift-resistant pressure feedback. Its cold cathode stage is insensitive to hydrocarbon contamination and tolerant of brief exposure to air during venting cycles—enabling use in sputtering, evaporation, and plasma etch tools without recalibration. The gauge meets CE marking requirements per EU Directive 2014/30/EU (EMC) and 2014/35/EU (LVD). While not certified for SIL or functional safety applications, its analog output and passive sensor design comply with general-purpose industrial control system architectures compliant with IEC 61000-6-2/6-4. Calibration data is traceable to PTB (Physikalisch-Technische Bundesanstalt) standards; optional NIST-traceable calibration certificates are available upon request.
Software & Data Management
The MPG 400 operates as a stand-alone analog transducer and requires no embedded firmware, USB interface, or proprietary software for basic operation. Its logarithmic output simplifies integration with PLCs, SCADA systems, and vacuum controllers (e.g., INFICON Transpector®, Leybold VacuGraph®, Pfeiffer HiCube controllers) via standard analog input modules. For centralized monitoring, the signal can be digitized using 16-bit ADC hardware and logged in compliance with 21 CFR Part 11–enabled platforms when paired with audit-trail-capable acquisition software. No internal memory or data storage is present—ensuring deterministic real-time response and eliminating firmware update dependencies.
Applications
- Process pressure monitoring in physical vapor deposition (PVD), electron-beam evaporation, and magnetron sputtering systems
- Base pressure verification and process gas regulation in semiconductor fabrication tools and R&D vacuum chambers
- Leak detection support via pressure rise rate analysis in sealed UHV systems
- Quality assurance in optical coating lines where consistent chamber conditioning is critical
- Education and training labs requiring rugged, multi-range vacuum instrumentation without filament handling hazards
FAQ
Does the MPG 400 require periodic filament replacement?
No—the inverted magnetron cold cathode and solid-state Pirani sensor contain no consumable filaments or heated wires.
Can the MPG 400 be baked out?
Yes, when equipped with the CF 40 metal-sealed version and Cu gasket, it supports bake-out temperatures up to 200 °C.
Is the analog output linear with pressure?
No—it delivers a logarithmic voltage or current signal, providing uniform resolution across the full 12-decade range.
What is the typical warm-up time before stable readings?
Less than 30 seconds for Pirani mode; cold cathode ignition occurs within 1–2 seconds after high-voltage enablement.
Does INFICON provide calibration documentation?
Yes—each unit ships with a factory calibration report; NIST-traceable certification is available as an optional add-on.
