INFICON PSG500 / PSG502-S / PSG510-S / PSG512-S Digital Pirani Vacuum Gauges
| Origin | Switzerland |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model Series | PSG500, PSG502-S, PSG510-S, PSG512-S |
| Pricing | Available Upon Request |
Overview
The INFICON PSG500, PSG502-S, PSG510-S, and PSG512-S are digitally enhanced Pirani vacuum gauges engineered for high-reliability pressure measurement in the rough to medium vacuum range (typically 1 × 10−4 mbar to 1000 mbar, absolute). Based on thermally conductive heat-loss principles—where gas thermal conductivity modulates the temperature-dependent resistance of a heated filament—the PSG series delivers stable, repeatable readings across varying gas compositions. Unlike analog predecessors, these gauges integrate embedded digital signal processing, enabling real-time compensation for ambient drift, filament aging, and gas-species-dependent sensitivity deviations. Their stainless-steel sensor chamber, compact footprint, and bakeable construction (up to 250 °C for PSG510-S and PSG512-S) make them suitable for integration into semiconductor process tools, vacuum coating systems, analytical instrumentation, and industrial vacuum handling platforms where space constraints, cleanliness, and long-term calibration stability are critical.
Key Features
- Digital Pirani sensing architecture with onboard microcontroller for linearized output and auto-compensation
- Robust 316L stainless-steel measurement chamber with metal-sealed electrical feedthroughs (standard)
- Space-efficient design compatible with tight-mounting configurations; operable in any orientation without performance degradation
- Aluminum housing (PSG500/PSG502-S) or optional ceramic feedthroughs (PSG510-S/PSG512-S) for aggressive chemical environments
- High-temperature bakeout capability up to 250 °C (PSG510-S and PSG512-S models only), supporting UHV-compatible system conditioning
- Nickel filament option available for enhanced corrosion resistance in halogen- or acid-vapor-rich processes
- Logarithmic analog voltage output (0–10 V) proportional to pressure over five decades—designed for seamless interfacing with PLCs, DAQ systems, and vacuum controllers
- Front-panel push-button calibration: one-touch atmospheric (ATM) and high-vacuum (HV) zero/reference adjustment
- Configurable setpoint outputs for local interlock triggering or pump sequencing control
- RoHS-compliant construction and CE-marked per EN 61326-1 (EMC) and EN 61010-1 (safety)
Sample Compatibility & Compliance
The PSG series is calibrated for nitrogen-equivalent pressure but provides acceptable accuracy for common process gases including Ar, He, O2, N2, H2, and CO2. Gas-specific correction factors are accessible via INFICON’s technical documentation and supported by optional software utilities. All models comply with ISO 3567 (vacuum metrology terminology) and meet the mechanical and environmental requirements outlined in ISO 2862 (vacuum equipment—general requirements). For regulated industries—including pharmaceutical manufacturing and medical device sterilization—the PSG502-S and PSG512-S variants support audit-ready operation when integrated into systems validated under FDA 21 CFR Part 11 and EU Annex 11 guidelines, particularly when paired with INFICON’s VACUSAFE™ data logging platform featuring electronic signatures and change-tracking logs.
Software & Data Management
While the PSG gauges operate autonomously as standalone analog transducers, they are fully interoperable with INFICON’s VACUUBRAND® VACUSAFE™ and INFICON V-SENSE™ software suites. These applications enable remote configuration, real-time trend visualization, multi-channel synchronization, and export of time-stamped pressure logs in CSV or XML formats. The logarithmic 0–10 V output is compatible with standard 16-bit ADC modules used in industrial SCADA and MES environments. Optional firmware updates—distributed via INFICON’s secure customer portal—introduce enhanced diagnostics, extended temperature compensation tables, and improved noise rejection algorithms. No proprietary drivers are required; communication relies solely on industry-standard analog I/O protocols.
Applications
- Pre-vacuum monitoring and interlock signaling for turbo-molecular and cryogenic high-vacuum pumps
- Process pressure supervision in PVD/CVD chambers, etch tools, and ion implanters
- Safety-critical vacuum verification in gloveboxes, lyophilizers, and electron microscopy sample prep stations
- Chamber leak-check sequencing and roughing cycle validation
- Environmental test chamber pressure regulation and fault detection
- Research-grade vacuum system commissioning and maintenance diagnostics
FAQ
What pressure range do the PSG500-series gauges cover?
The nominal operating range spans 1 × 10−4 mbar to 1000 mbar (absolute), with optimal linearity and repeatability between 1 × 10−3 mbar and 100 mbar.
Can the PSG gauges be installed in inverted or horizontal positions?
Yes—mechanical orientation has no effect on measurement performance due to symmetrical thermal design and absence of fluidic elements.
Is bakeout capability standard across all models?
No—only the PSG510-S and PSG512-S models are rated for continuous operation at 250 °C; the PSG500 and PSG502-S are limited to 80 °C ambient.
How is gas composition compensated?
Built-in N2-reference calibration is applied by default; user-adjustable gas correction factors may be loaded via external configuration tools or hardwired jumpers per INFICON Application Note AN-PSG-01.
Are digital communication interfaces (e.g., RS-485, EtherCAT) available?
Not natively—the PSG series provides analog output only; digital connectivity requires external analog-to-digital conversion or use of INFICON’s VACUUBRIDGE™ interface modules.
