INFICON SKY® CDG100D Capacitance Manometer Vacuum Gauge
| Origin | Switzerland |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CDG100D |
| Pricing | Upon Request |
Overview
The INFICON SKY® CDG100D is a high-stability, temperature-controlled capacitance manometer designed for precise total pressure measurement and closed-loop process control in demanding vacuum environments. Operating on the fundamental principle of capacitive displacement sensing—where pressure-induced deflection of a metallized ceramic diaphragm alters the capacitance between fixed and movable electrodes—the CDG100D delivers inherently linear, gas-independent output across its full operating range. Engineered specifically for semiconductor fabrication, plasma processing, and high-temperature reactive environments, the sensor incorporates active thermal regulation at a stabilized 100 °C to eliminate thermal drift and ensure metrological consistency under dynamic thermal loads. Its all-ceramic (alumina, Al₂O₃) sensing element exhibits exceptional chemical inertness, mechanical resilience, and long-term zero stability—critical attributes when exposed to aggressive process chemistries such as Cl₂, NF₃, CF₄, or O₂ plasmas.
Key Features
- Temperature-stabilized ceramic diaphragm sensor maintained at 100 °C for minimal thermal hysteresis and drift
- Full-scale pressure range: 100 mTorr to 1000 Torr (13.3 Pa to 133.3 kPa), with inherent linearity and gas-type independence
- Standard analog output: 0–10 VDC, directly proportional to absolute pressure, calibrated traceable to NIST standards
- Integrated dual setpoint relays for local process interlock and alarm triggering without external controllers
- Fieldbus compatibility including RS-485 Modbus RTU and optional Profibus DP for seamless integration into industrial automation architectures
- Low power consumption (<3 W typical) and rapid warm-up time (≤50% faster than conventional heated gauges)
- Diagnostic port supporting real-time sensor health monitoring, internal temperature logging, and firmware diagnostics
- Robust mechanical architecture featuring ISO-KF, CF, and ANSI flange options; compatible with standard vacuum system configurations
Sample Compatibility & Compliance
The CDG100D is fully compatible with corrosive, condensable, and high-temperature process gases—including halogen-based etchants, silane derivatives, and oxidizing plasmas—without performance degradation or membrane fatigue. Its alumina ceramic diaphragm resists chemical attack from acids, bases, and halogens up to 200 °C surface temperature. The instrument conforms to multiple international regulatory and industry-specific requirements: CE marking per EU Machinery and EMC Directives; UL 61010-1 certification for electrical safety; RoHS 2011/65/EU compliance; and SEMI F20-0218 specification for vacuum measurement devices used in semiconductor manufacturing. It supports GLP/GMP-aligned operation through configurable audit trails (when paired with INFICON’s VGC series controllers) and meets foundational requirements for FDA 21 CFR Part 11 data integrity when integrated with validated SCADA systems.
Software & Data Management
While the CDG100D operates autonomously via analog or digital fieldbus interfaces, it is fully supported by INFICON’s VGC Series controller firmware and PC-based Vacuum Manager™ software suite. This ecosystem enables remote configuration, real-time pressure trending, historical data export (CSV/Excel), and automated calibration verification logs. All communication protocols support timestamped event logging—including zero-adjust commands, relay state changes, and diagnostic alerts—facilitating compliance with quality management systems requiring documented evidence of instrument performance history. Firmware updates are delivered via secure USB or network interface, with version control and rollback capability embedded in the controller stack.
Applications
- Plasma-enhanced chemical vapor deposition (PECVD) and atomic layer deposition (ALD) chamber pressure monitoring and feedback control
- Reactive ion etching (RIE) and deep reactive ion etching (DRIE) processes requiring stable reference pressure during high-power RF modulation
- Physical vapor deposition (PVD) sputtering and evaporation systems where rapid pressure transients must be captured with high fidelity
- High-temperature vacuum furnaces and diffusion bonding applications involving corrosive atmospheres
- Research-grade vacuum systems in physics, materials science, and fusion technology laboratories requiring long-term zero stability and low noise floor
FAQ
Is the CDG100D suitable for use with aggressive halogen-based process gases?
Yes. Its monolithic alumina ceramic diaphragm provides outstanding resistance to corrosion from Cl₂, F₂, NF₃, and other reactive species commonly used in semiconductor etch and clean processes.
Does the gauge require periodic recalibration in situ?
No. Due to its thermally stabilized design and inherent zero stability, the CDG100D maintains calibration over extended intervals—typically exceeding 12 months in controlled production environments—per ASTM E2497 and ISO 20487 guidelines.
Can the zero point be adjusted remotely?
Yes. A dedicated zero command signal (TTL or dry contact) allows for one-button zeroing either locally or via PLC-triggered instruction, accommodating system-level maintenance protocols.
What is the warranty coverage and expected service life?
INFICON provides a two-year limited warranty. With proper installation and avoidance of mechanical shock or thermal cycling beyond specifications, operational lifespan exceeds 10 years under continuous duty in semiconductor fab environments.
