KYKY CXF-2300 Series Magnetic Levitation Turbo Molecular Pump

Overview

The KYKY CXF-2300 Series Magnetic Levitation Turbo Molecular Pump is a high-performance, oil-free vacuum pumping solution engineered for ultra-high vacuum (UHV) and extreme high vacuum (XHV) applications. Based on active magnetic bearing (AMB) technology, it eliminates mechanical contact between the rotor and stator, enabling frictionless rotation at up to 27,000 rpm. This design fundamentally suppresses vibration, thermal drift, and particle generation—critical advantages in contamination-sensitive environments such as semiconductor fabrication, thin-film deposition, and synchrotron beamline instrumentation. Unlike conventional ball-bearing or hybrid turbo pumps, the CXF-2300 achieves stable operation across arbitrary mounting orientations without performance degradation, making it suitable for compact, multi-axis vacuum systems where space and geometry constraints are stringent. Its operational pressure envelope spans from rough vacuum (20 Pa) down to 2×10⁻⁷ Pa with elastomeric sealing, and further to ≤1×10⁻⁸ Pa when equipped with all-metal sealing and bake-out compatibility—meeting baseline requirements for UHV systems per ISO 27893 and ASTM E1447.

Key Features

• Magnetic levitation rotor system with real-time position feedback control, ensuring sub-micron dynamic stability and eliminating wear-related maintenance cycles
• Oil-free, hydrocarbon-free pumping mechanism compliant with ISO 10101-2 and SEMI F36 standards for clean process environments
• Compact monoblock architecture (58 kg total mass) optimized for integration into modular vacuum chambers and inline sputtering systems
• Wide inlet flange compatibility: ISO-F 250 (standard), ISO-CF 250 (optional), ISO-LF 250 (customizable), supporting seamless interface with existing UHV infrastructure
• Energy-efficient operation: 30% lower power consumption versus equivalent ball-bearing turbo pumps due to near-zero mechanical loss and optimized motor winding design
• Integrated digital controller with RS-485 and optional Ethernet/IP interface for remote monitoring, fault logging, and interlock coordination with PLC-based vacuum management systems

Sample Compatibility & Compliance

The CXF-2300 is designed for continuous-duty operation with inert, reactive, and corrosive gas loads typical in PVD/CVD processes—including Ar, N₂, O₂, SiH₄, and CF₄ mixtures—provided compatible forevacuum staging is implemented. It meets electromagnetic compatibility (EMC) requirements per EN 61326-1 and safety standards under IEC 61000-6-2/6-4. For regulated industries, the pump supports audit-ready operation when paired with validated forepumps and vacuum gauges: full traceability of runtime, temperature history, and rotational anomalies aligns with GLP documentation workflows. While not intrinsically certified for hazardous areas, its non-sparking AMB architecture and absence of lubricants render it suitable for Class 1 Div 2 environments when installed within appropriately rated enclosures.

Software & Data Management

KYKY provides the PumpLink™ Control Suite (v3.2+), a Windows-based configuration and diagnostics platform supporting firmware updates, parameter calibration, and event-driven alarm scripting. All operational data—including rotor displacement profiles, bearing coil currents, bearing temperature gradients, and pumping speed derating curves—are timestamped and exportable in CSV/JSON format. The system logs retain ≥30 days of continuous telemetry by default and support external database ingestion via OPC UA (IEC 62541). For FDA-regulated facilities, optional 21 CFR Part 11 compliance packages include electronic signatures, audit trail encryption, and role-based access control—validated against IQ/OQ protocols upon installation.

Applications

• Semiconductor front-end processing: ion implantation beamlines, etch chamber load locks, and ALD reactor evacuation
• Flat-panel display manufacturing: large-area sputtering lines requiring uniform pumping across multi-port chambers
• Photovoltaic R&D: perovskite thin-film deposition systems demanding low particulate and zero hydrocarbon background
• Accelerator physics: beam pipe vacuum maintenance in electron storage rings and free-electron laser undulator sections
• Quantum computing infrastructure: dilution refrigerator shielding vacuum jackets and superconducting qubit test cryostats
• Advanced materials synthesis: molecular beam epitaxy (MBE) systems and high-pressure gas-phase reaction chambers

FAQ

What forepump is required to achieve the specified ultimate pressure?
A two-stage rotary vane or dry scroll forepump with ≥22 L/s pumping speed and ultimate pressure ≤1×10⁻¹ Pa is mandatory. Oil-sealed pumps require cold traps; dry pumps must be rated for condensable vapors if used with organic precursors.
Can the CXF-2300 operate continuously at full speed under 1×10⁻⁴ Pa?
Yes—its magnetic bearing control loop maintains stability across the entire operating range. Continuous duty at rated speed is qualified for ≥10,000 hours MTBF under ISO 281-compliant thermal management conditions.
Is metal-sealed version available for bake-out to 150°C?
Yes. The CXF-2300-M variant features all-metal seals (Cu gaskets), ceramic-coated shaft components, and extended-range temperature sensors, certified for repeated 150°C bake-outs per ISO 14040.
Does the pump support analog setpoint control via 0–10 V input?
Standard configuration includes 4–20 mA speed control and status output. 0–10 V analog interface is available as an OEM option with custom firmware mapping.
How is vibration isolation addressed during horizontal mounting?
The AMB system dynamically compensates for gravitational torque asymmetry; no external dampers or leveling hardware are required. Vibration emission remains below 0.5 µm peak-to-peak at 1 kHz bandwidth per ISO 10816-3 Class A limits.