Leybold TTR 101 Thermovac Combined Pirani and Capacitive Diaphragm Vacuum Gauge
| Brand | Leybold |
|---|---|
| Origin | Germany |
| Model | TTR 101 |
| Measurement Principle | Combined Pirani + Capacitive Diaphragm |
| Range | 5×10⁻⁵ – 1500 mbar |
| Vacuum Port | KF 16 |
| Compliance | CE, RoHS, ISO 9001-manufactured design |
Overview
The Leybold TTR 101 Thermovac is a dual-sensor vacuum measurement instrument engineered for high-reliability pressure monitoring across wide dynamic ranges in industrial, R&D, and production vacuum environments. It integrates two physically distinct sensing technologies—Pirani thermal conductivity measurement and capacitive diaphragm (CDG) transduction—within a single compact housing. This hybrid architecture enables seamless, continuous pressure readout from 5×10⁻⁵ mbar (high vacuum) up to 1500 mbar (rough vacuum/ambient), eliminating the need for sensor switching or manual range reconfiguration. The Pirani element provides stable, gas-type–independent output above ~10 mbar, while the capacitive diaphragm sensor delivers absolute, gas-independent accuracy below 10 mbar—particularly critical where molecular flow regimes dominate and thermal conduction-based methods exhibit gas-species dependence. Designed and calibrated in accordance with DIN EN ISO/IEC 17025 traceable procedures at Leybold’s German manufacturing facility, the TTR 101 meets stringent requirements for reproducibility (<±3% reading in CDG mode, <±5% in Pirani mode), long-term zero stability (<0.1 mbar drift/year), and thermal hysteresis minimization.
Key Features
- Hybrid dual-sensor architecture: Integrated Pirani and capacitive diaphragm sensors enable uninterrupted measurement across five decades of pressure (5×10⁻⁵ to 1500 mbar)
- KF 16 vacuum flange interface (DIN 28413) ensures rapid, leak-tight mounting on standard vacuum chambers and pumping systems
- Gas-independent measurement capability in the 10–1500 mbar range via Pirani sensor; absolute pressure reference maintained by CDG below 10 mbar
- Robust stainless-steel sensor head with ceramic diaphragm and platinum-coated Pirani filament for chemical resistance and thermal durability
- Integrated digital electronics with RS485 Modbus RTU communication protocol for PLC and SCADA integration
- Front-panel LED display with dual-unit support (mbar, Pa, Torr) and configurable analog output (0–10 V or 4–20 mA)
- CE-marked, RoHS-compliant, and designed to meet electromagnetic compatibility (EMC) requirements per EN 61326-1
Sample Compatibility & Compliance
The TTR 101 is compatible with inert, reactive, and condensable process gases—including N₂, Ar, O₂, H₂, CO₂, and common hydrocarbon vapors—provided operating conditions remain within specified temperature (-10 °C to +50 °C ambient) and contamination limits (no oil mist, particulates >5 µm, or aggressive halogenated compounds). Its capacitive diaphragm sensor is inherently insensitive to gas composition, making it suitable for applications requiring traceable, absolute pressure data under GLP/GMP-regulated processes. The device supports audit-ready operation when integrated with compliant control systems: its firmware implements non-volatile memory for calibration history, timestamped diagnostics, and error logging aligned with FDA 21 CFR Part 11 principles (when used with validated host software). Calibration certificates are issued with NIST-traceable references and include uncertainty budgets per ISO/IEC 17025.
Software & Data Management
Leybold provides the free Thermovac PC Software Suite (v3.2+), enabling real-time graphical trending, multi-channel data logging (up to 10 Hz sampling), and export to CSV, Excel, or XML formats. The software supports automated calibration verification routines, user-defined alarm thresholds (e.g., chamber venting alerts), and batch report generation compliant with ISO 9001 documentation requirements. For enterprise integration, the TTR 101’s Modbus RTU interface allows direct connection to Siemens S7, Rockwell ControlLogix, or Beckhoff TwinCAT platforms without gateway hardware. All configuration parameters—including unit selection, damping time, and analog output scaling—are stored in EEPROM and persist through power cycles.
Applications
- Process monitoring in vacuum metallurgy, PVD/CVD coating systems, and electron beam welding
- Leak detection system validation and vacuum integrity testing in semiconductor tool maintenance
- R&D vacuum chamber characterization in physics laboratories (e.g., surface science, cryogenic experiments)
- Quality assurance during vacuum packaging of medical devices and pharmaceuticals
- Monitoring of rotary vane, scroll, and turbomolecular pump staging sequences
- Environmental simulation chambers requiring stable, multi-range pressure feedback for HVAC and thermal cycling protocols
FAQ
Does the TTR 101 require periodic recalibration?
Yes—Leybold recommends annual calibration for metrological compliance in regulated environments; however, field verification using known reference pressures (e.g., calibrated deadweight tester) can extend intervals per internal quality procedures.
Can the TTR 101 measure corrosive gases such as Cl₂ or NH₃?
Not directly—the standard sensor head is not rated for prolonged exposure to highly corrosive or oxidizing gases. Optional Hastelloy C-276 diaphragm and gold-plated Pirani filaments are available upon request for specialized applications.
Is KF 16 the only flange option?
Yes—the TTR 101 is exclusively supplied with KF 16 (ISO-KF) interface; adapters to CF, ISO-K, or NW variants must be sourced externally and installed with appropriate sealing (e.g., Viton or FKM O-rings).
What is the typical warm-up time to full specification accuracy?
Less than 30 minutes after power-on at 23 °C ambient; stabilization time extends to 45 minutes if ambient temperature deviates by >±5 °C from calibration conditions.
Does the device support Modbus TCP or only RS485?
RS485 Modbus RTU only; Ethernet connectivity requires an external protocol converter certified for industrial vacuum system integration.
