NOY NLD200 Modular Helium Mass Spectrometer Leak Detector
| Brand | NOY |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Benchtop |
| Detection Method | Vacuum Mode |
| Minimum Detectable Leak Rate | 3×10⁻¹³ Pa·m³/s |
| Warm-up Time | ≤90 s |
| Response Time | ≤0.5 s |
| Maximum Inlet Pressure | ≤2000 Pa |
| Ion Source | Dual Iridium Filament |
Overview
The NOY NLD200 Modular Helium Mass Spectrometer Leak Detector is a precision-engineered benchtop instrument designed for high-sensitivity vacuum-mode leak detection in research laboratories, semiconductor fabrication facilities, vacuum coating systems, and aerospace component manufacturing environments. Operating on the principle of quadrupole mass spectrometry, the NLD200 selectively ionizes helium atoms introduced into the test system and separates them by mass-to-charge ratio (m/z = 4) using a stable RF/DC quadrupole filter. This enables quantitative identification and localization of minute leaks with exceptional specificity—free from interference by background gases such as H₂, H₂O, or N₂. Its modular architecture allows seamless integration into custom vacuum manifolds, gloveboxes, or automated production lines without requiring dedicated footprint or extensive reconfiguration. The detector’s core performance metrics—including a minimum detectable leak rate of 3×10⁻¹³ Pa·m³/s and sub-500 ms response time—are achieved through optimized ion optics, low-noise electron multiplier detection, and real-time signal processing firmware calibrated per ISO 20485:2017 (Leak Detection — Vocabulary and Performance Characteristics).
Key Features
- Modular mechanical design enabling plug-and-play integration with existing vacuum systems (KF-16, CF-35, or ISO-KF flanged interfaces compatible)
- Dual iridium filament ion source providing enhanced oxidation resistance and extended operational lifetime (>10,000 hours under standard duty cycles)
- Rapid thermal stabilization: full sensitivity achieved within ≤90 seconds after power-on, minimizing downtime during shift transitions or batch testing
- High-speed analog signal processing architecture supporting real-time leak quantification with ≤0.5 s system response latency
- Integrated helium purge management with active clean-down cycle to suppress residual helium background (<1×10⁻¹⁴ Pa·m³/s baseline drift over 8-hour operation)
- Robust electromagnetic shielding and vibration-damped baseplate compliant with IEC 61326-1 for reliable operation in industrial laboratory settings
Sample Compatibility & Compliance
The NLD200 is validated for use with evacuated components operating at pressures ≤2000 Pa at the detector inlet—compatible with both rough-vacuum and high-vacuum test configurations (e.g., connected downstream of turbomolecular or cryogenic pumps). It supports standardized leak calibration using certified permeation standards traceable to NIST SRM 2100 series. The instrument meets electromagnetic compatibility requirements per EN 61326-1:2013 and safety specifications per EN 61010-1:2010. Its firmware architecture supports audit trail logging and user-access control levels aligned with GLP and GMP documentation practices. While not FDA 21 CFR Part 11–certified out-of-the-box, its data export protocols (CSV, XML via USB or RS-232) facilitate integration into validated QA/QC workflows requiring electronic record integrity.
Software & Data Management
The NLD200 operates with embedded firmware v3.2+ and optional PC-based control software (NOY LeakView™), offering real-time spectral monitoring, multi-point leak mapping, and time-stamped event logging. All measurement data—including leak rate, ion current intensity, background helium level, and system pressure—are timestamped with microsecond resolution and stored locally on removable SD card (up to 32 GB). Export formats include CSV (for Excel/Python analysis) and XML (for LIMS ingestion). The software supports configurable alarm thresholds, pass/fail criteria per test step, and report generation compliant with ISO 9001:2015 clause 8.5.2 (Identification and traceability). Remote diagnostics and firmware updates are supported via secure HTTPS endpoint (TLS 1.2+), with no cloud dependency.
Applications
- Hermeticity validation of MEMS sensors, medical implant housings, and lithium-ion battery enclosures
- In-line leak verification of vacuum chambers used in thin-film deposition (PVD/CVD) and electron beam welding
- Qualification testing of ultra-high vacuum (UHV) components including feedthroughs, valves, and viewports
- R&D-stage evaluation of seal integrity in cryogenic systems and superconducting magnet assemblies
- Root cause analysis of vacuum degradation in accelerator beamlines and synchrotron instrumentation
FAQ
What vacuum pumping configuration is required to achieve the specified 3×10⁻¹³ Pa·m³/s sensitivity?
A turbomolecular pump with ≥300 L/s nitrogen speed and ultimate pressure ≤5×10⁻⁸ Pa is recommended; backing with a dry scroll pump ensures hydrocarbon-free operation.
Can the NLD200 be operated continuously for 24/7 production monitoring?
Yes—the dual iridium filament design and thermally stabilized quadrupole assembly support unattended operation up to 16,000 hours MTBF when maintained per NOY Service Bulletin LB-2023-04.
Is helium recovery or recycling supported?
No built-in helium recovery; however, the instrument’s low helium consumption (<15 mL/min during sniffing mode) and rapid clean-down enable efficient use with standard 50-L helium cylinders.
Does the system support external trigger inputs for synchronized testing?
Yes—TTL-compatible digital input (0–5 V) allows hardware-triggered start/stop and data capture synchronization with motion controllers or PLCs.
How is calibration verified between scheduled service intervals?
Built-in self-test routines validate filament emission stability, quadrupole tuning accuracy, and electron multiplier gain against internal reference signals—results logged automatically in the audit trail.





