Resist Stripper
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| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL8 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Volume | 18 L (250 × 250 × 290 mm, aluminum) |
| External Dimensions | 530 × 600 × 550 mm |
| Gas Delivery | 1 standard mass flow-controlled line (MKS digital controller) |
| Vacuum Door | Hinged with UV- and microwave-shielded viewport |
| Control Interface | 7" GUI touchscreen, Windows CE OS |
| Optional | Dry pump system, tri-color status tower light, up to 4 gas lines, ECR-enhanced plasma source, motorized rotating stage (Ø200 mm, variable speed) |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL8 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Volume | 18 L (250 × 250 × 290 mm, aluminum) |
| External Dimensions | 530 × 600 × 550 mm |
| Gas Delivery | 1 standard mass flow-controlled line (MKS digital controller) |
| Vacuum Door | Hinged with UV- and microwave-shielded viewport |
| Control Interface | 7" GUI touchscreen, Windows CE OS |
| Optional | Dry pump system, tri-color status tower light, up to 4 gas lines, motorized φ200 mm rotating stage, ECR enhancement module |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL76 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber Volume | 76 L (400 × 400 × 490 mm, aluminum) |
| External Dimensions | 1050 × 800 × 2020 mm (incl. signal tower) |
| Gas Inlets | 3 standard mass flow-controlled lines (MKS digital controllers) |
| Door Type | Dual-mode hinged/drawer with UV- and microwave-shielded viewport |
| Control Interface | 10.4" resistive touchscreen, Windows CE OS |
| Optional | Dry pump package, tri-color signal tower, up to 4 gas lines, φ350 mm motorized rotating stage, ECR enhancement module |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | AL76 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber Volume | 76 L (400 × 400 × 490 mm, aluminum) |
| External Dimensions | 1050 × 800 × 2020 mm (incl. tri-color status tower) |
| Gas Inlets | 3 standard mass flow-controlled lines (MKS digital controllers) |
| Optional | 4th gas line, ECR enhancement, φ350 mm adjustable-speed rotating stage, dry pump package, UV/microwave-shielded viewport, hinged + drawer-type vacuum door |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150, Q235, Q240, Q310 |
| Type | Microwave-excited Capacitively Coupled Plasma (CCP) Resist Stripping System |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & Back-End-of-Line (BEOL) Process Cleaning |
| Compliance | CE-marked, SEMI S2-0216 Certified, ISO 9001:2015 Manufactured |
| Footprint Options | Benchtop (Q150), Semi-automated Loadlock (Q235/Q240), Full-automated Cluster Tool Integration Capable (Q310) |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q150, Q235, Q240, Q310 |
| Type | Microwave-excited Capacitively Coupled Plasma (CCP) Resist Stripping System |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & Back-End-of-Line (BEOL) Processing, MEMS Fabrication, Advanced Packaging |
| Compliance | CE Marked, SEMI S2-0216 Certified, ISO 9001:2015 Quality Management System |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235 (Q-Series) |
| Type | Benchtop Microwave Plasma Asher/Stripper |
| Application Domain | Semiconductor Fabrication, MEMS Processing, R&D Cleanroom Environments |
| Compliance | CE-marked, ISO 14644-1 Class 5 compatible installation, ESD-safe chamber design |
| Power Supply | 230 V AC, 50/60 Hz, 16 A |
| Microwave Frequency | 2.45 GHz |
| Max Chamber Volume | 12 L |
| Process Gas Compatibility | O₂, CF₄, SF₆, Ar/O₂ mixtures |
| Vacuum System | Integrated dry scroll pump (base pressure < 5 × 10⁻² mbar) |
| RF/Plasma Monitoring | Real-time forward/reflected power metering with auto-tuning impedance matching network |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235/Q240 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber Material | Quartz |
| Chamber Dimensions | Ø235 mm × 260 mm L |
| Maximum Wafer Size | 200 mm (8") |
| Footprint | 460 mm × 590 mm × 550 mm H |
| Gas Inlets | Standard 2-channel with digital MKS mass flow controllers |
| Chamber Door | Drawer-type with UV- and microwave-shielded viewport |
| Human-Machine Interface | 7" resistive touchscreen GUI running Windows CE |
| Optional | Dry pump package (with foreline trap & vibration isolation), Faraday cage, quartz boat, tri-color status beacon, up to 4 gas lines, export-grade crating and freight logistics |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235/Q240 |
| Plasma Source | 2.45 GHz microwave, 600 W |
| Chamber | Quartz, Ø235 mm × 260 mm L |
| Max Wafer Size | 200 mm (8″) |
| Dimensions (L×W×H) | 460 × 590 × 550 mm |
| Gas Inlets | 2 standard + optional up to 4 |
| Mass Flow Controllers | Digital MKS type |
| Chamber Door | Drawer-type with UV/microwave-shielded viewport |
| Substrate Holder | Temperature-controlled wafer chuck |
| Control Interface | 7″ GUI touchscreen, Windows CE OS |
| Optional | Dry vacuum pump system, Faraday cage, quartz boat, tri-color status beacon |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q240 |
| Plasma Source | 2.45 GHz, 1200 W |
| Chamber | Quartz, Ø240 mm × 460 mm (21 L), accommodates up to 200 mm wafers |
| Dimensions (L×W×H) | 760 × 775 × 775 mm |
| Gas Lines | 3 standard + optional 4th line |
| Mass Flow Controllers | Digital MKS |
| Vacuum Door | Drawer-type with UV/microwave-shielded viewport |
| Wafer Chuck | Temperature-controlled |
| HMI | 10.4" touchscreen, Windows CE OS |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q240 |
| Plasma Source | 2.45 GHz microwave, 1200 W |
| Chamber | Quartz, Ø240 mm × 460 mm (21 L), max. 200 mm wafer capacity |
| Dimensions (L×W×H) | 760 × 775 × 775 mm |
| Gas Control | 3-channel digital MKS mass flow controllers |
| Vacuum Door | Drawer-type with UV/microwave-shielded viewport |
| Human-Machine Interface | 10.4" touchscreen GUI, Windows CE OS |
| Brand | Analysis |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | 1300CSX |
| Price Range | USD $26,000–$39,000 (FOB US Port) |
| Max Substrate Diameter | 300 mm |
| Max Operating Temperature | 300 °C |
| Force Range | 0–445 N (0–100 lbf) |
| Speed Limit | 100 mm/s |
| Vacuum Level | −63.5 to −68.6 kPa (−25 to −27 inHg) |
| Nitrogen/CDA Supply | 689 kPa (100 psi), 28.3 L/min |
| Footprint | 1245 mm × 1003 mm × 1334 mm (W×D×H) |
| Weight | 187 kg (operational), 581 kg (shipping) |
| MTBF | >600 h / >6000 cycles |
| Uptime | >99% over 12 months |
| MTTR | <24 h |
| Throughput | 8–14 WPH (<150 mm), 4–8 WPH (200–300 mm) |
| Brand | Kingsemi |
|---|---|
| Model | KS-S150-6ST |
| Origin | Liaoning, China |
| Equipment Type | Semiconductor Resist Stripping System |
| Configuration | 6-Station Wet Processing Platform |
| Vacuum Handling | Dual-Vacuum Dual-Clamp High-Speed Robotic Arm |
| Alignment | Automated Wafer Centering (AWC) with Vision-Based Recognition |
| Bath Compatibility | Multi-Size & Multi-Angle Immersion Modules (150 mm to 200 mm wafers) |
| Pressure Control | Closed-Loop High-Pressure Fluid Delivery (±0.2 MPa accuracy) |
| Heating System | In-Line High-Pressure Resistant Heater (PID-controlled, ≤120 °C) |
| Chuck Type | Actively Clamped, Backside-Protected Electrostatic/ Mechanical Chuck |
| Chemical Recovery | Integrated Solvent Recovery and Recirculation Loop |
| Compliance | Designed for Class 100 Cleanroom Integration |
| Brand | Alpha Plasma |
|---|---|
| Origin | Germany |
| Model | Q235 (Q-Series) |
| Type | Benchtop Microwave Plasma Asher/Stripper |
| Application Domain | Semiconductor Front-End-of-Line (FEOL) & MEMS Fabrication |
| Compliance | CE-marked, ISO 9001–certified manufacturing, compatible with cleanroom Class 100/ISO 5 environments |
| Brand | SAMCO |
|---|---|
| Origin | Japan |
| Model | UV-300H |
| Maximum Sample Diameter | Ø800 mm (8-inch) |
| Operating Environment | Ambient Atmospheric Pressure |
| Heating Stage Temperature Range | Room Temperature to 150 °C |
| Safety Features | Interlocked Lid, Ozone Catalyst Scrubber, N₂ Purge Cycle, Thermal Fuse Protection, Emergency Stop |
| Compliance | Designed for ISO Class 5–7 Cleanroom Integration |
| Brand | Sindin |
|---|---|
| Model | ST-2100MW |
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Regional Classification | Domestic (PRC) |
| Pricing | Available Upon Request |
| Brand | SUNJUNE |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | VP-RS6 |
| Price Range | USD 7,000 – 14,000 |
| RF Power | 500 W |
| RF Frequency | 13.56 MHz |
| Chamber Material | 304 Stainless Steel |
| Max Operating Temperature (Chamber Wall) | ≤45 °C at Full Power (3 min) |
| Vacuum Display | Digital Pressure Readout |
| Gas Inlets | Dual Mass-Flow Controlled Ports |
| Control Interface | 7-inch Capacitive Touchscreen |
| Software Certification | China Copyright Registration No. 2021SR1026389 |
| Warranty | 24 Months Limited Hardware Warranty |