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| Brand | Guarder |
|---|---|
| Origin | Shandong, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | GDR-30PR |
| Dimensions (W×D×H) | 630 × 650 × 420 mm |
| Chamber Volume | ~30 L (290 × 290 × 360 mm) |
| Electrode Size | 180 × 210 mm (capacitively coupled, internal) |
| RF Generator | 13.56 MHz, 0–300 W continuous adjustable output with auto-impedance matching |
| Optional | 40 kHz medium-frequency plasma source |
| Control System | 7-inch HMI touchscreen + PLC (Omron/Siemens components), manual/auto modes |
| Vacuum System | Leybold vacuum pump, SMC isolation & vent valves, Inficon pressure sensor |
| Pressure Control | PID closed-loop regulation, ±1 Pa accuracy |
| Gas Delivery | Dual-channel, FITOK gas lines, mass flow controllers + needle valves |
| Operating Modes | RIE (Reactive Ion Etching) and PE (Plasma Enhanced) selectable |
| Compliance | Designed for ISO Class 5–7 cleanroom environments, compatible with GLP laboratory workflows |
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