ZOLIX RTS-SEMR Raman-SEM Correlative Spectroscopy System
| Brand | ZOLIX |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | RTS-SEMR |
| Quotation | Upon Request |
| Spectral Resolution | <1 cm⁻¹ |
| Spatial Resolution | Lateral: <500 nm @ 532 nm laser |
| Axial | <2 µm @ 50 µm pinhole, 532 nm laser |
Overview
The ZOLIX RTS-SEMR Raman-SEM Correlative Spectroscopy System is an integrated analytical platform that synchronizes high-resolution scanning electron microscopy (SEM) with confocal Raman microspectroscopy within a shared vacuum-compatible sample chamber. Engineered for correlative nanoscale analysis, the system operates on a dual-beam, off-axis optical architecture: the electron beam and 532 nm excitation laser are spatially separated but precisely registered via a high-precision five-axis motorized stage. This design eliminates mechanical repositioning errors between modalities and enables true in situ correlation—where SEM-derived topographical and compositional (via EDS/BSE) data are directly overlaid with molecular fingerprinting from Raman spectra at user-defined coordinates. Unlike conventional EDS or WDS detectors, which provide elemental composition only, the RTS-SEMR delivers vibrational spectroscopic information critical for identifying crystallinity, polymorphism, chemical bonding states, carbon allotropes (e.g., graphene, diamond, amorphous carbon), organic functional groups, and isomeric distinctions—capabilities essential for advanced materials characterization in battery research, pharmaceutical solid-state analysis, geoscience mineralogy, and biomedical interface studies.
Key Features
- Off-axis dual-beam architecture ensuring sub-micron registration accuracy between SEM imaging and Raman mapping without stage relocation
- Confocal Raman optical path integrated into the SEM vacuum chamber, enabling analysis under controlled environmental conditions (vacuum or inert gas)
- Lateral spatial resolution <500 nm and axial resolution down to <1 µm (with 10 µm pinhole), optimized for nanoscale chemical mapping
- Spectral resolution <1 cm⁻¹ across visible and near-IR ranges, supporting high-fidelity peak deconvolution for complex mixtures
- 2.5 mm Raman scan range enabled by a custom-designed compound translation stage with ≤50 nm repeatability
- Simultaneous secondary electron (SE) and backscattered electron (BSE) imaging with multi-detector compatibility (in-lens, Everhart-Thornley, solid-state BSE)
- Modular optical configuration: interchangeable lasers (532 nm standard; optional 638 nm or 785 nm), spectrograph focal lengths (300 mm / 500 mm), grating densities (600–2400 l/mm), and high-NA objectives (up to 100×, NA 0.9)
Sample Compatibility & Compliance
The RTS-SEMR accommodates a broad range of conductive and non-conductive samples—including powders, thin films, cross-sectioned battery electrodes, geological thin sections, polymer blends, and biological tissue slices—without requiring metal coating when operated in low-vacuum or beam deceleration mode. Sample handling follows ASTM E1558 (Standard Guide for SEM Specimen Preparation) and ISO 16700 (Electron probe microanalysis — General principles). The system supports GLP-compliant workflows through audit-trail-enabled software logging (user actions, instrument parameters, calibration timestamps) and adheres to foundational requirements for FDA 21 CFR Part 11 compliance in regulated environments when deployed with validated electronic signatures and access controls. All optical components meet RoHS and CE directives; vacuum components conform to ISO 10110 surface quality standards.
Software & Data Management
ZOLIX Correlate™ Suite provides unified control of both SEM and Raman subsystems via a single GUI. It enables synchronized acquisition, real-time spectral preview during SEM navigation, and pixel-synchronized hyperspectral data cubes (x, y, Raman shift, intensity). Data export supports standardized formats including HDF5 (for FAIR data principles), JCAMP-DX (ASTM E131), and TIFF stacks with embedded metadata (EXIF + custom tags per ISO/IEC 11172-3). Batch processing includes automated cosmic ray removal, fluorescence background subtraction (polynomial/Asymmetric Least Squares), peak fitting (Voigt/Lorentzian models), and multivariate analysis (PCA, cluster analysis). Raw datasets retain full traceability: each spectrum is tagged with exact stage coordinates, laser power, integration time, objective magnification, and spectrometer calibration coefficients—all stored in SQLite-backed project databases with SHA-256 checksum integrity verification.
Applications
- Battery Materials: Mapping LiCoO₂ phase transitions, SEI layer composition, and graphite lithiation heterogeneity at grain boundaries
- Pharmaceutical Development: Polymorph identification in API formulations, excipient-drug interaction assessment, and tablet coating uniformity validation
- Geosciences: In situ differentiation of quartz polymorphs (α/β), carbonate mineral assemblages, and fluid inclusion chemistry
- 2D Materials: Strain distribution quantification in CVD-grown MoS₂ monolayers and layer-count verification in h-BN/graphene heterostructures
- Biomedical Interfaces: Collagen cross-linking analysis in calcified tissues and polymer scaffold degradation monitoring in vitro
FAQ
Is the RTS-SEMR compatible with existing field-emission SEM platforms?
Yes—the system is designed as a modular add-on for FE-SEM models from major vendors (Thermo Fisher, Zeiss, JEOL), provided vacuum port specifications and stage interface protocols are met. Custom flange adapters and control API integration kits are available.
Can Raman measurements be performed under variable pressure or gas environment?
Yes—when configured with differential pumping stages and a dedicated gas inlet, the system supports Raman acquisition at pressures ranging from 10⁻⁷ Pa (UHV) to 100 Pa (low-vacuum mode) and in controlled N₂ or Ar atmospheres.
What level of spectral calibration stability is maintained over extended mapping sessions?
The spectrograph features thermally stabilized mounts and active wavelength recalibration using internal Ne/Ar reference lines every 30 minutes, ensuring drift <0.05 cm⁻¹ over 8-hour acquisitions.
Does the software support third-party spectral libraries (e.g., RRUFF, ICDD)?
Yes—Correlate™ supports direct import of .spa, .txt, and .csv library files and performs match/mismatch scoring against user-loaded reference sets using cosine similarity and Mahalanobis distance metrics.
Are service and application support packages available internationally?
ZOLIX maintains certified service centers in Germany, Singapore, and the USA, offering remote diagnostics, on-site installation, and application-specific method development workshops aligned with ISO/IEC 17025 competence criteria.
