Aitoly MFC300 Thermal Mass Flow Controller
| Brand | Aitoly |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Principle | MEMS-based Thermal Anemometry |
| Origin | Jiangsu, China |
| Flow Measurement Technology | Constant-Temperature Anemometric (CTA) |
| Control Actuation | Proportional Solenoid Valve |
| Operating Gas Types | Air, N₂, O₂, CO₂, Ar, He, H₂, and other non-corrosive gases (calibration-specific) |
| Accuracy | ±1% FS (typical, gas-dependent) |
| Repeatability | ≤±0.2% FS |
| Response Time | <100 ms (t₉₀) |
| Zero Stability | <±0.05% FS/°C |
| Power Supply | 24 VDC ±10% |
| Output Signal | 0–5 VDC / 0–10 VDC / 4–20 mA (configurable) |
| Communication Interface | RS-485 (Modbus RTU) |
| Operating Temperature | 0–50 °C |
| Pressure Rating | Up to 1 MPa (gauge) |
| Connection | G1/4" or 1/4" NPT internal threads |
| Enclosure Rating | IP65 |
| Compliance | CE-marked, RoHS-compliant |
Overview
The Aitoly MFC300 is a high-performance thermal mass flow controller engineered for precise, real-time measurement and closed-loop control of gas mass flow rates in laboratory, pilot-scale, and industrial process environments. Unlike volumetric flow devices, the MFC300 employs constant-temperature anemometric (CTA) sensing based on micro-electromechanical systems (MEMS) technology—eliminating dependency on ambient temperature, pressure, or gas composition compensation when used with factory-calibrated gases. Its core sensor integrates a heated platinum resistance element and symmetric temperature-sensing elements on a silicon substrate, enabling direct thermal transfer-based mass flow quantification in accordance with the King’s Law principle. This architecture ensures inherent insensitivity to upstream turbulence and eliminates the need for flow conditioning hardware. Designed for integration into gas delivery subsystems requiring fast dynamic response and long-term stability, the MFC300 operates without warm-up delay and maintains consistent metrological performance across its full range—from 10 sccm to 5000 sccm (gas-dependent full scale)—making it suitable for applications demanding rapid setpoint transitions and high reproducibility.
Key Features
- MEMS-based thermal sensor platform delivering sub-100 ms response time (t₉₀) and zero warm-up requirement
- Integrated proportional solenoid valve with PID-controlled actuation for stable, low-hysteresis flow regulation
- Multi-range calibration capability with pre-loaded gas-specific coefficients for up to 12 common industrial gases (N₂, O₂, Ar, He, CO₂, H₂, air, etc.)
- Dual analog output (0–5 VDC / 0–10 VDC) and configurable 4–20 mA current loop, supporting both monitoring and control modes
- RS-485 serial interface compliant with Modbus RTU protocol for seamless integration into SCADA, PLC, and automated test systems
- Robust stainless steel wetted parts (316L SS body, Hastelloy C-276 optional) compatible with clean dry air, inert, and mildly corrosive process gases
- IP65-rated aluminum enclosure with DIN-rail mounting option and integrated status LED indicators
Sample Compatibility & Compliance
The MFC300 is validated for use with non-condensing, non-aggressive gases at standard temperature and pressure (STP) conditions. Gas compatibility extends to nitrogen, oxygen, argon, helium, carbon dioxide, hydrogen, synthetic air, and other binary or ternary mixtures—provided calibration is performed per ISO 14034 or ASTM D7504 guidelines. For trace-level or reactive gas applications (e.g., NH₃, Cl₂, HF), optional passivated or coated sensor variants are available upon request. The device complies with EU Directive 2014/30/EU (EMC), 2011/65/EU (RoHS), and carries CE marking. While not certified to SIL or ATEX standards out-of-the-box, its architecture supports functional safety integration under IEC 61508 when deployed within a validated system architecture. Traceable calibration certificates (NIST-traceable reference standards) are provided with each unit; optional annual recalibration services align with ISO/IEC 17025-accredited laboratories.
Software & Data Management
Aitoly provides the free MFC-ConfigSuite desktop application (Windows/macOS) for local configuration, real-time data logging, firmware updates, and multi-device synchronization. The software enables user-defined gas selection, setpoint ramping profiles, alarm thresholds (flow deviation, overpressure, sensor fault), and export of timestamped CSV datasets. For enterprise deployment, the MFC300 supports OPC UA server integration via third-party gateways and is compatible with LabVIEW™, Python (PyModbus), and MATLAB® instrument control toolboxes. Audit trail functionality—including parameter change history, calibration event timestamps, and user login logs—is available when operated in conjunction with a validated LIMS or MES platform adhering to FDA 21 CFR Part 11 requirements (electronic signatures and record retention enabled via external authentication layer).
Applications
- Semiconductor fabrication: Precise dopant gas dosing in CVD, PECVD, and ALD tools
- Photovoltaic manufacturing: Controlled gas injection during thin-film deposition and plasma etching
- Analytical instrumentation: Carrier and purge gas regulation in GC, GC-MS, and FTIR systems
- Bioprocessing: Sparging and headspace gas control in single-use bioreactors and fermenters
- Environmental monitoring: Calibration gas delivery for NOₓ, SO₂, and VOC analyzers
- Research laboratories: Multi-gas blending systems, fuel cell testing, and catalytic reaction studies
- Industrial automation: Leak testing, pneumatic circuit balancing, and combustion air ratio control
FAQ
What gases can the MFC300 measure and control?
The MFC300 is calibrated for 12 standard gases including N₂, O₂, Ar, He, CO₂, H₂, CH₄, and synthetic air. Custom calibrations for specialty gas mixtures are available upon request and require traceable reference standard verification.
Is the MFC300 suitable for vacuum or high-pressure applications?
It operates at line pressures up to 1 MPa (gauge) and is compatible with rough vacuum inlet conditions (≥1 kPa absolute), but is not designed for high-vacuum (10 MPa) environments.
Does the device support digital communication protocols beyond Modbus RTU?
Native support is limited to RS-485 Modbus RTU; however, Ethernet/IP, Profibus DP, and CANopen interfaces are available via external protocol converters certified for industrial interoperability.
How often does the MFC300 require recalibration?
Annual recalibration is recommended under continuous operation; intervals may extend to 24 months in stable, clean-gas environments—subject to internal verification against documented drift thresholds per ISO 9001 clause 7.1.5.2.
Can the MFC300 be used in GMP-regulated pharmaceutical processes?
Yes—when deployed with validated installation qualification (IQ), operational qualification (OQ), and documented calibration records, it meets baseline requirements for critical gas flow control in biopharmaceutical unit operations per USP and Annex 15.
