AITOLY MFC300 Thermal Mass Flow Controller
| Brand | AITOLY |
|---|---|
| Model | MFC300 |
| Type | Thermal Mass Flow Controller |
| Sensor Technology | MEMS-based thermal dispersion |
| Flow Range | 0.2–100% of Full Scale (1:500 turndown ratio) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed (NC) |
| Gas Compatibility | Clean, dry, non-corrosive gases (Air, N₂, O₂, Ar, CH₄, CO₂) |
| Pressure & Temperature Compensation | Integrated |
| Pressure Drop | Low |
| Installation Flexibility | Compact design with multiple mounting options |
Overview
The AITOLY MFC300 Thermal Mass Flow Controller is an engineered solution for precise, real-time measurement and closed-loop control of gas mass flow in laboratory, pilot-scale, and industrial process environments. Based on constant-temperature anemometry (CTA) principles, the MFC300 utilizes a MEMS (Micro-Electro-Mechanical Systems) thermal sensor element to detect convective heat transfer from a heated surface to the flowing gas stream. This method directly measures mass flow rate—unaffected by changes in temperature or pressure—without requiring separate pressure or temperature transducers for compensation. The integrated digital signal processing architecture incorporates real-time temperature and pressure compensation algorithms, ensuring stable output across variable ambient and process conditions. Designed for applications demanding high dynamic response and long-term stability, the MFC300 delivers consistent performance in gas mixing, reactor feed control, environmental simulation chambers, semiconductor tool purging, and analytical instrument carrier gas regulation.
Key Features
- MEMS-based thermal sensor with embedded temperature and pressure compensation for true mass flow measurement
- Ultra-fast sensor response time of 5 ms and closed-loop control response within 300 ms, enabling dynamic flow regulation in fast-cycling processes
- Wide turndown ratio of 1:500 (0.2–100% FS), supporting both trace-level and high-flow applications with a single device
- Low pressure drop (<1 kPa at full scale for standard configurations), minimizing system backpressure and energy consumption
- Compact, lightweight housing (typically <120 mm × 60 mm × 40 mm) with flexible mounting options—including panel-mount, DIN-rail, and direct-tube integration
- Normally closed (NC) proportional solenoid valve with high cycle life (>10⁷ operations) and low power consumption (<3 W typical)
- Pre-calibrated for six common industrial gases (Air, N₂, O₂, Ar, CH₄, CO₂); user-selectable gas calibration via digital interface
Sample Compatibility & Compliance
The MFC300 is validated for use with clean, dry, non-corrosive gases only. Moisture, particulates, oil vapor, or reactive species (e.g., Cl₂, NH₃, H₂S, HF) will degrade sensor performance and void warranty. Inlet filtration (0.1 µm sintered stainless steel) is recommended upstream of the unit when ambient air or compressed gas sources are used. The device complies with CE marking requirements for electromagnetic compatibility (EN 61326-1) and low-voltage safety (EN 61010-1). While not certified to SIL or ATEX standards out-of-the-box, its electrical architecture supports integration into safety-rated systems when deployed with appropriate external interlocks and isolation barriers. For regulated environments (e.g., pharmaceutical manufacturing or clinical research), the MFC300’s analog and digital outputs support audit-trail-capable data logging when paired with compliant SCADA or LIMS platforms adhering to FDA 21 CFR Part 11 requirements.
Software & Data Management
The MFC300 communicates via standard analog (0–5 VDC / 0–10 VDC / 4–20 mA) and digital (RS-485 Modbus RTU) interfaces. Optional USB-C and Ethernet variants enable direct PC connectivity and firmware updates. Configuration, calibration, and diagnostics are performed using AITOLY’s cross-platform MFC ConfigTool—compatible with Windows, macOS, and Linux. The software provides real-time flow visualization, multi-gas calibration table editing, PID parameter tuning, and event logging (including valve state transitions, fault codes, and over-range events). All configuration changes are timestamped and stored in non-volatile memory. Data export is supported in CSV and XML formats, facilitating integration with MATLAB, Python-based analysis pipelines, or enterprise MES systems. Firmware revision history and checksum-verified updates ensure traceability during equipment qualification (IQ/OQ/PQ) protocols.
Applications
- Precise stoichiometric gas dosing in catalytic reaction studies and microreactor development
- Mass flow control of purge and sweep gases in gloveboxes, vacuum deposition systems, and atomic layer deposition (ALD) tools
- Calibration reference for secondary flow sensors in HVAC commissioning and cleanroom monitoring
- Gas blending for medical device testing (e.g., ventilator performance validation per ISO 80601-2-12)
- Environmental chamber control of CO₂ enrichment or O₂ depletion profiles in plant physiology labs
- Carrier and make-up gas regulation in GC, GC-MS, and ICP-MS instrumentation
FAQ
What gases can the MFC300 measure accurately?
The MFC300 is factory-calibrated for Air, N₂, O₂, Ar, CH₄, and CO₂. Custom calibrations for other non-corrosive gases are available upon request and require gas-specific characterization data.
Is the MFC300 suitable for use with humidified or mixed gas streams?
No. Humidity, condensable vapors, or uncharacterized gas mixtures invalidate the built-in compensation algorithms and may cause sensor drift or permanent damage. Use only with fully dried and filtered gases.
Does the device support field recalibration?
Yes—using the MFC ConfigTool and a NIST-traceable master flow standard, users may perform zero and span adjustments. Full recalibration requires return to an AITOLY-authorized service center.
What is the maximum allowable inlet pressure?
The standard MFC300 variant is rated for inlet pressures up to 1 MPa (10 bar) absolute. High-pressure versions (up to 20 MPa) are available under custom engineering specification.
How is traceability maintained during installation and operation?
Each unit ships with a calibration certificate listing as-found/as-left data, uncertainty budgets per ISO/IEC 17025, and serial-number-matched sensor parameters. Digital configuration logs and firmware version stamps further support GLP/GMP documentation requirements.
