Aitoly MFC300 High-Precision Thermal Mass Gas Flow Meter/Controller
| Brand | Aitoly |
|---|---|
| Origin | Jiangsu, China |
| Model | MFC300 |
| Type | Thermal Mass Flowmeter |
| Flow Range | 0.2–100% FS (1:500) |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.5% FS |
| Linearity | ±0.2% FS |
| Resolution | 0.1 sccm (0–1000 sccm), 1 sccm (1–5 slpm) |
| Sensor Response Time | 5 ms |
| Control Response Time | 300 ms |
| Warm-up Time | ≤1 s |
| Valve Type | Normally Closed |
| Compatible Gases | Air, N₂, O₂, Ar, CH₄, CO₂ |
| Gas Requirements | Clean, dry, non-corrosive |
Overview
The Aitoly MFC300 is a high-precision thermal mass gas flow meter and controller engineered for laboratory, pilot-scale, and industrial process applications requiring stable, repeatable, and fast-response gas flow measurement and regulation. Based on micro-electro-mechanical systems (MEMS) thermal sensing technology, the MFC300 measures mass flow directly—eliminating dependence on pressure and temperature fluctuations—by detecting convective heat transfer from a heated element to the flowing gas stream. Integrated real-time temperature and pressure compensation ensures traceable accuracy across variable ambient and process conditions. Designed for integration into gas delivery subsystems, analytical instrumentation (e.g., GC carrier gas control, plasma chamber feed), and semiconductor process tools, the MFC300 delivers metrological performance aligned with ISO 9001-compliant manufacturing and meets functional requirements for GLP and GMP-aligned environments where flow integrity is critical.
Key Features
- MEMS-based thermal mass flow sensor with built-in temperature and absolute pressure compensation for enhanced accuracy under dynamic operating conditions
- Ultra-fast measurement response of 5 ms and closed-loop control response of 300 ms—enabling precise transient flow modulation in time-sensitive processes
- Wide turndown ratio of 1:500 (0.2–100% FS), supporting both low-flow precision (e.g., 0.1 sccm resolution in sub-1000 sccm range) and higher-capacity operation up to 5 slpm
- Compact, low-profile housing with flexible mounting options—including panel-mount, inline, and manifold-integrated configurations—reducing footprint and installation complexity
- No preheat requirement: full operational readiness within ≤1 second after power-on, minimizing system startup delays
- Normally-closed solenoid valve architecture ensures fail-safe gas shutoff and inherent safety compliance in unattended or automated operations
Sample Compatibility & Compliance
The MFC300 is validated for use with clean, dry, non-corrosive gases including air, nitrogen (N₂), oxygen (O₂), argon (Ar), methane (CH₄), and carbon dioxide (CO₂). It is not rated for use with condensing, particulate-laden, or chemically aggressive media (e.g., HCl, Cl₂, NH₃, or solvent vapors). All wetted parts are constructed from 316 stainless steel and anodized aluminum, ensuring compatibility with standard gas purity grades (e.g., Grade 5.0 and above). The device conforms to CE marking requirements for electromagnetic compatibility (EMC Directive 2014/30/EU) and low-voltage safety (LVD Directive 2014/35/EU). While not certified to SIL or ATEX standards, its design supports integration into Class 1 Div 2 or Zone 2 hazardous area systems when installed behind appropriate barrier interfaces per IEC 60079-11.
Software & Data Management
The MFC300 supports analog (0–5 VDC / 0–10 VDC / 4–20 mA) and digital (RS-485 Modbus RTU) communication protocols for seamless integration with PLCs, DAQ systems, and SCADA platforms. Optional PC-based configuration software enables stepwise flow setpoint programming, calibration offset adjustment, and real-time data logging—including timestamped flow, temperature, and pressure values. Audit trail functionality records parameter changes with user ID and timestamp, satisfying basic FDA 21 CFR Part 11 data integrity expectations for non-clinical laboratory use. Firmware updates are performed via serial interface, with version rollback capability and CRC-verified image validation to ensure operational continuity.
Applications
- Gas flow control in analytical instruments: carrier gas regulation for gas chromatography (GC), purge gas management in FTIR and mass spectrometry sample introduction systems
- Process gas dosing in thin-film deposition (PECVD, ALD), etching, and surface treatment equipment
- Environmental test chambers requiring precise humidity or gas mixture control
- Research-grade fuel cell and battery testing systems demanding stoichiometric air/fuel ratio stability
- Calibration laboratories performing secondary flow standard verification against primary gravimetric or piston provers (per ISO 4064-2 and ASTM D3241)
FAQ
What gases can the MFC300 measure and control?
Air, N₂, O₂, Ar, CH₄, and CO₂—provided they are clean, dry, and non-corrosive.
Is factory calibration traceable to national standards?
Yes; each unit ships with a calibration certificate traceable to CNAS-accredited reference standards, with uncertainty budgets reported per ISO/IEC 17025 guidelines.
Can the MFC300 be used in vacuum or back-pressure applications?
It is designed for upstream (inlet) pressure-controlled operation only; downstream pressure must remain ≥10 kPa(a) to maintain sensor linearity and valve functionality.
Does it support multi-gas switching without recalibration?
No—gas-specific calibration coefficients must be loaded prior to use; the device does not feature auto-gas recognition or embedded gas database lookup.
What is the maximum allowable inlet pressure?
Rated for continuous operation up to 1 MPa(g); pressure spikes beyond 1.2 MPa(g) may compromise long-term sensor stability.
