AITOLY MFC300 Thermal Mass Flow Controller

Overview

The AITOLY MFC300 is a high-performance thermal mass flow controller engineered for precise, real-time measurement and closed-loop control of gas flow rates in laboratory, semiconductor process, analytical instrumentation, and industrial automation applications. Based on constant-temperature anemometry (CTA), the device employs a micro-machined thermal sensor element to detect convective heat transfer from a heated surface to the flowing gas—enabling direct mass flow measurement independent of pressure and temperature fluctuations. Unlike volumetric flow meters, the MFC300 delivers true mass flow output in standard cubic centimeters per minute (sccm) or standard liters per minute (slpm), eliminating the need for external compensation algorithms. Its compact monolithic architecture integrates both sensing and proportional control valve in a single housing, supporting seamless integration into OEM systems or stand-alone benchtop setups.

Key Features

• Ultra-Fast Dynamic Response: 5 ms sensor response time and 300 ms full closed-loop control response enable stable regulation under rapidly changing flow conditions—critical for pulsed gas delivery, reaction kinetics studies, and ALD/CVD precursor dosing.
• High Measurement Fidelity: ±0.5% FS accuracy and ±0.2% FS linearity over a 1:500 turndown ratio ensure reliable quantification across trace-level (e.g., 0.1 sccm) and high-flow (up to 5 slpm) regimes.
• Zero-Drift Stability: Advanced thermal drift compensation and low-power sensor excitation minimize zero-point migration, delivering consistent baseline integrity without mandatory preheating—warm-up time is ≤1 second.
• Multi-Gas Flexibility: Factory-calibrated for six common process gases (Air, N₂, O₂, Ar, CH₄, CO₂); user-selectable gas type via digital interface ensures accurate scaling without hardware modification.
• Hybrid I/O Architecture: Simultaneous analog (0–5 V, 0–10 V, 4–20 mA) and digital (RS232, RS485, CAN 2.0B) interfaces support legacy PLC integration, PC-based SCADA systems, and distributed industrial networks—no external signal converters required.
• Normally-Closed Proportional Valve: Piezoelectric or solenoid-driven valve with fine-resolution actuation ensures fail-safe operation and smooth, non-oscillatory flow modulation even at sub-sccm setpoints.

Sample Compatibility & Compliance

The MFC300 is designed exclusively for clean, dry, non-corrosive gases. It is not rated for use with condensable vapors, particulate-laden streams, or chemically aggressive media (e.g., Cl₂, NH₃, HCl, or silanes). For optimal performance and longevity, inlet gas must be filtered to ≤0.1 µm and dried to a dew point ≤−40 °C. While not certified to IEC 61508 or SIL standards, the device meets CE marking requirements for electromagnetic compatibility (EN 61326-1) and low-voltage safety (EN 61010-1). Its analog and digital outputs are compatible with systems operating under FDA 21 CFR Part 11-compliant data acquisition platforms when paired with audit-trail-enabled software.

Software & Data Management

The MFC300 supports ASCII-based command protocols over all digital interfaces, enabling straightforward integration with LabVIEW, Python (pySerial/pyCAN), MATLAB, or custom C/C++ applications. AITOLY provides a Windows-compatible configuration utility for setting gas type, calibration units, communication parameters, and PID tuning coefficients. All configuration changes—including flow setpoint updates, gas selection, and alarm thresholds—are logged with timestamps and user IDs when connected to compliant host software. The device does not store historical flow data internally; however, its real-time streaming capability (up to 100 Hz update rate) allows synchronized acquisition with external DAQ systems for GLP/GMP-aligned record retention.

Applications

• Gas blending and mixture ratio control in environmental test chambers and combustion simulators
• Precise carrier and purge gas delivery in GC, GC-MS, and FTIR sample introduction systems
• Process gas metering in plasma etch, PECVD, and sputtering tools
• Calibration reference standard for secondary flow meters and rotameters (when operated within specified uncertainty limits)
• Automated gas dosing in fuel cell testing, battery dry-room monitoring, and HVAC R&D
• Teaching and research labs requiring reproducible, digitally controllable gas flow for fluid dynamics or reaction engineering experiments

FAQ

Is the MFC300 suitable for corrosive or humid gas streams?
No. The sensor and valve internals are incompatible with moisture, condensables, or reactive gases. Use only with ISO 8573-1 Class 2 or better compressed air or instrument-grade gases.
Can I switch between different calibrated gases without recalibration?
Yes—the device includes embedded correction factors for Air, N₂, O₂, Ar, CH₄, and CO₂. Select the appropriate gas ID via serial command or configuration tool before operation.
Does the MFC300 support Modbus RTU or EtherNet/IP?
No. Native protocols are proprietary ASCII over RS232/RS485 and CANopen-compliant CAN 2.0B. Modbus gateways may be used externally.
What is the maximum allowable system backpressure?
The unit is rated for differential pressures up to 1 MPa (10 bar) across the flow body. For optimal control stability, maintain upstream pressure ≥1.2× downstream pressure.
Is firmware upgrade supported in the field?
Yes—firmware updates are delivered via UART using AITOLY’s official utility and require no hardware disassembly.